AVS2010 Plasma Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS-MoM | Monday, October 18, 2010 8:20 AM | Advanced BEOL / Interconnect Etching I |
| PS1-MoA | Monday, October 18, 2010 2:00 PM | Advanced FEOL / Gate Etching I |
| PS2-MoA | Monday, October 18, 2010 2:20 PM | Atmospheric Plasma Processing and Micro Plasmas |
| PS1-TuM | Tuesday, October 19, 2010 8:20 AM | Advanced FEOL Etching II |
| PS2-TuM | Tuesday, October 19, 2010 8:00 AM | Plasma Diagnostics, Sensors and Control |
| PS1-TuA | Tuesday, October 19, 2010 2:00 PM | Advanced BEOL/Interconnect Etching II |
| PS2-TuA | Tuesday, October 19, 2010 2:00 PM | Plasma Sources |
| PS-TuP | Tuesday, October 19, 2010 6:00 PM | Plasma Science and Technology Poster Session |
| PS+MN-WeM | Wednesday, October 20, 2010 8:00 AM | Plasma Processing for 3D Integration, TSV, and MEMS |
| PS-WeM | Wednesday, October 20, 2010 8:00 AM | Plasma Surface Interactions (Fundamentals & Applications) I |
| PS1-WeA | Wednesday, October 20, 2010 2:00 PM | Plasma Surface Interactions (Fundamentals & Applications) II |
| PS2-WeA | Wednesday, October 20, 2010 2:00 PM | Neutral Beam Processing |
| PS+TF-ThM | Thursday, October 21, 2010 8:40 AM | Plasma Deposition and Plasma Enhanced ALD |
| PS-ThM | Thursday, October 21, 2010 8:20 AM | Plasma Surface Interactions (Fundamentals & Applications) III |
| PS1-ThA | Thursday, October 21, 2010 2:00 PM | Plasma Modeling |
| PS2+BI-ThA | Thursday, October 21, 2010 2:00 PM | Plasmas for Medical and Biological Applications |
| PS-ThP | Thursday, October 21, 2010 6:00 PM | Plasma Science and Technology Poster Session |
| PS-FrM | Friday, October 22, 2010 9:00 AM | Liquids and Multiphase Discharges |