AVS 68 Plasma Science and Technology Division Sessions

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Topic Abstract Book
(1MB, Nov 18, 2022) Topics | Time Periods | Schedule Overview

Session Code Start Session Name
PS-MoM Monday, November 7, 2022 8:20 AM Plasmas for the Environment and Sustainability: Plasmas-Liquid Interactions, Water, Air, Soil Treatment
PS+AS-MoA Monday, November 7, 2022 1:40 PM Plasma Chemistry and Catalysis
PS1+NS-TuM Tuesday, November 8, 2022 8:00 AM Advanced Plasma Patterning: EUV-Based, Multipatterning and Alternative Patterning Approaches (Imprint, DSA, Etc.)
PS2+MS-TuM Tuesday, November 8, 2022 8:00 AM Modelling of Plasmas and Plasma Driven Processes, and Machine Learning
PS1+TF-TuA Tuesday, November 8, 2022 2:20 PM Plasma Processing for Advanced Emerging Memory Technologies, Advanced Packaging and Heterogeneous Integration
PS2+AS+SS-TuA Tuesday, November 8, 2022 2:20 PM Plasma-Surface Interactions
PS-TuP Tuesday, November 8, 2022 6:30 PM Plasma Science and Technology Poster Session
PS1+AP+TF-WeM Wednesday, November 9, 2022 8:00 AM Plasma Deposition and ALD Processes for Coatings and Thin Films
PS2+TF-WeM Wednesday, November 9, 2022 8:00 AM Plasma Processes of Non-Silicon Related Semiconductors for Energy-Efficient Devices in Power, Photovoltaics and Optoelectronics Applications
PS1+AP-WeA Wednesday, November 9, 2022 2:20 PM Plasma Assisted Atomic Layer Etching
PS2+SE-WeA Wednesday, November 9, 2022 2:20 PM Atmospheric Pressure Plasmas and their Applications
PS-ThM Thursday, November 10, 2022 8:00 AM Plasma Processing for Advanced Semiconductor Devices
PS-ThA Thursday, November 10, 2022 2:20 PM Harnessing the Power of Plasmas for Real-World Applications: PSTD Award Lectures
PS2+SE-FrM Friday, November 11, 2022 8:20 AM Plasma Sources, Diagnostics, Sensors and Control
PS1+MS+SS-FrM Friday, November 11, 2022 8:20 AM Modelling of Plasmas and Plasma Driven Processes, and Plasma-Surface Interactions II
Topic Abstract Book
(1MB, Nov 18, 2022) Topics | Time Periods | Schedule Overview