AVS1997 Tuesday Morning

The Dependence of the Depth Resolution on the Structure of the Specimen.

Determination and Application of the Depth Resolution Function in Sputter Profiling with SIMS and AES

SIMS Depth Profiling of Ultra-Shallow Boron Implants in Silicon: Use of Low Energy Oxygen Primary Ion Bombardment and Oxygen Flooding of the Sample Surface

Ultra Shallow Depth Profiling by TOF-SIMS

SIMS Measurements of Ultra-Shallow Junctions Comparing Normal and Oblique Angle Primary Ion Beam Bombardment

Progress and Challenges in Depth Profiling with Angle Resolved XPS

X-ray Photoelectron Spectroscopy, Depth Profiling, and Elemental Imaging of the Effects of Humidity and Temperature on the Stability of a Metal/Polyimide Interface.

Tungsten Silicide Composition Analysis by RBS, AES, and XPS

The Use of the Navy Oxygen Cleaner for Bearing Steels

An Electron Spectroscopic Study of the Effects of Annealing on the Pd/SiC Schottky Structure

Direct Measurements of Microenvironmental Influences on Biomolecular Recognition at Interfaces

Orientation of "G-wires" on Mica

Atomic Force Microscope Measurements of Enzyme Interactions with Various Cotton Fibers

Water Interfaces and Tunnel Channels in STM Studies

Solid State NMR Methods for Determination of Peptide Structure on Crystalline Surfaces

Biological Material Analysis by Matrix-Enhanced SIMS

Two Laser Mass Spectrometry for the Surface Analysis of Biological Materials

TOF-SIMS Analysis of Streptococcus Salivarius

Diffusion at the Adhesive/Dentin Interface

The Structure of Hydrogen-Passivated High-Index Silicon Surfaces

Deuterium Diffusion in Annealed NMOS Devices: A SIMS Study

SIMS Characterization of the Deuterium Sintering Process for the Enhanced Life-time CMOS Transistors

Hydrogen in Silicon: Fundamental Properties and Consequences for Devices

Hydrogen Desorption from the H-terminated Si(001)-3x1 Surface

Cryogenic UHV-STM Study of Electron Stimulated Desorption of Hydrogen and Deuterium from Silicon(100)

Infrared Spectroscopy of Hydrogen in Silicon: Defects, Platelets and Exfoliation

The Effect of Phosphorus on Hydrogen Desorption from Silicon

Effects of Surface Phosphorus on the Kinetics of Hydrogen Desorption from Silane-adsorbed Si(100) Surface at Room Temperatures

Hydride Reactions on Boron-doped Si(100)

Diamond Cold Cathodes*

Field Emission of Heavily Nitrogen Doped Diamond Films

Electron Transport and Emission Properties of Diamond

Demonstration of Low Work Function, Stable Li-Based Alloy Coatings for Field Emitter Displays

Carbon Based Thin Film Cathodes for Field Emission Displays

Electron Emission Properties of Nanocrystalline Diamond- Coated Si Field Emitter Arrays*

Dynamics of Current-voltage Characteristics In Field Emission Cathodes Built from Various Types of Carbon Fibers

Field Emission from ZrC Films on Mo Field Emitters

Low-Voltage Platinum Lateral-Edge Field Emitter Lamp

Pseudo Spin Valve MRAM

Giant Magnetoresistance of NiMnSb-Based Multilayers

Tunneling Magnetoresistance through RF-Sputtered Alumina Barriers in Fe-Al₂O₃-Fe Junctions.

Ferromagnet-Insulator-Ferromagnet Tunnel Junctions Using the Heusler Alloy PtMnSb

Spin Conserved Tunneling and Large Magnetoresistance

Controlled Resistivity of Spin Dependent Tunnel Junctions with Al₂O₃ Barriers

Control of Switching in Magnetic Tunnel Junctions

Hybrid Ferromagnet - Semiconductor Devices

Quantitative Measurement of Nodule Formation in W-Ti Sputtering

Spectroscopic Ellipsometry Investigation of Nickel Silicide Formation by Rapid Thermal Process

Particle and Defect Detection and Characterization

Ultra-Shallow Junction Measurements: A Review of SIMS Capabilities for Implanted and Processed Wafers

In Situ Analysis of Airborne Molecular Contamination Using TOF-SIMS with a Liquid Nitrogen-Cooled Sample Stage: Advantages for Semiconductor Processing

The Application of X-ray Photoelectron Spectroscopy for the Routine Monitoring of Surface Composition.

Effect of Post-Al Etch Treatment on Corrosion Control : Determination of Residual Chlorine by Small Area Ion Chromatography

In Situ Particle Monitoring for Vacuum Processes; Today and Tomorrow

Viscoelastic Effects in Nanoscale Contacts Under Shear

Shear Modulation Spectroscopy in Nanometer Scale Contacts

Adhesion and Mechanical Properties at the Nanometer Level.

Nanomechanical Properties of Au (100), (110), and (111)

Calculations of Plastic Deformation and Recovery during Surface Indentation

Nanoindentation of Atomically Modified Surfaces

Adhesion at an Atomically Defined Junction.

Investigation of Ice-Solid Interfaces by Force Microscopy

Modification of Molecularly Thin Films of Water on Mica Surface by Nanometer Scale Contacts ---- A Scanning Polarization Force Microscopy Study

Correlation of Film Stress and the Nano-Mechanical Properties of Au Thin Films

Magnetically Neutral Loop Discharged Plasma Sources and Systems

Diagnostic and Simulation Study on the Relation between Electron Energy Distribution and Etching Characteristics of Ultrahigh-Frequency Plasmas

ECR Plasma Source for 12-inch Wafer Etching Using Slant Slot Antenna

Large Area High Density Plasma Excitation Using Standing Surface Waves

Investigations of 3D Asymmetries in rf Biased Inductively Coupled Plasma Tools Using a New Ambipolar Acceleration Technique¹

Simulations of Particle Trapping Produced by 3-Dimensional Structures in Plasma Tools¹

Control of Capacitive Currents in Inductively Coupled Plasma Sources for Uniformity Optimization

Coupling Between a Planar Geometry ICP Coil and an rf Bias Platten

Characterization of a Novel Lambda Balanced Inductive Plasma Source

Two Dimensional Modeling of Two-Frequency-Operated-Plasma in Ar by Relaxation Continuum Model

Characterization of Dry Cleans in a Polysilicon Etch Reactor

The Study of Plasma Clean Process On TCP^TM 9400SE Through Optical Emission Spectrometer

Fundamental Studies Applied to Environmental Challenges in Plasma Processing

Characterization of In-Situ O₂ Clean for High Density Plasma Silicon Dioxide Etching

Evaluation of Trifluoroacetic Anhydride as an Alternative PECVD Chamber Clean Chemistry Using Optical Emission Spectroscopy, Quadrupole Mass Spectroscopy, and Fourier Transform Infrared Spectroscopy

Optimizing Destruction Efficiencies in Electronegative Discharges: The Importance of the Impedance Phase Angle.

Ultra-High Selectivity Silicon Nitride Etch Process Using an Inductively Coupled Plasma (ICP) Source

Initial Results of a Quartz Crystal Microbalance Study for Characterizing Atomic Oxygen in Plasma Tools.

Fast Isotropic Etching of Phototresist and Silicon using an Expanding Thermal Plasma

Ion Density Distribution in an Expanding Thermal Nitrogen Plasma for Plasma/Surface Interaction Studies

Molecular Dissociation at Surfaces: Is there Life beyond the Reaction Coordinate?

Vibrational Relaxation of H₂ Scattered from Pd(111)

Steric Preferences in Surface Chemistry: Energy and Internal State Dependence of Alignment in D₂(v,J) Associative Desorption From Cu(111)

H Atom Abstraction of D Adsorbed on Si(100): Dynamical Evidence for an Eley-Rideal Mechanism

Trajectory of H and D Desorption from a Passivated Si(100) Surface Induced by Electronic Excitation

Dissociative Sticking of O₂ on Al(111)

Double-Precursor Mechanism in the Adsorption of Oxygen on Pd(111)

Direct Collisionally Activated and Trapping-Mediated Chemisorption of Neopentane on Clean Pt(111): The Activity of Surface Defect Sites

State Resolved Dynamics of Methyl Desorption from GaAs

Effects of Vacancies and On-Top Adatoms on Mobilities of Two-Dimensional Pt Clusters on Pt(111)

Cluster-Step and Cluster-Cluster Coalescence: Post-Deposition Dynamics in Ag/Ag(100) Adlayers

A New Understanding of Island Decay on Metal Surfaces

Island Diffusion and Coarsening on Metal (100) Surfaces

The Diffusion of Large, Adsorbed Molecules on Metal Surfaces

Mechanisms for Vacancy Formation in the Rh/Ag(001) System*

Kinetics of Ultrathin Film Growth and Island Thickening of Au on TiO₂(110)

Growth and Epitaxial Studies of Nanometer Au islands on TiO₂ (110)

Intermixing and Growth Anisotropy for Ni/Au(111)

Effects of Low Energy N₂⁺ Irradiation on Surface Morphological Evolution during TiN(001) Epitaxy by Reactive Magnetron Sputtering

Production of Low Defect Density Ultrathin Multilayer Coatings for ULSI Applications Using an RF Inductively Coupled Ion Beam Deposition System

How the PVD / CVD Metal Equipment Supplier Industry will meet the sub 0.25 µm Challenge

Re-Emission of Sputtered Refractory Metals during Deposition

Al Diffusion into Atomically Clean and Oxidized TiN(100)

A Novel Approach in the Activation of TiN for Highly Selective Electroless Copper Deposition Studied by Ex Situ Non-Contact AFM and XRD

The Effect of Process and Hardware on Ta Phase Formation of Ta Thin Film Deposited by Sputtering

Temperature, Pressure, and Substrate Dependence of the Beta to Alpha Phase Transition of Sputtered Tantalum

XPS Characterization of the Oxidation of Electroplated and Sputtered Copper Surfaces

Thermal Stability of NiSi in Deep Submicron Polysilicon Lines

Film Growth of Nanostructured C-N/TiN_x Mulilayers Reactively Sputtered in Pure Nitrogen.

Electrical and Optical Properties of Magnetron Sputtered Boride and Silicide Coatings

Diffusion Bonding of Steel to Titanium to produce Hard Wearing Surface Layers.

Frictional and Related Surface Chemical Properties of Carbide and Nitride Hard Coating Materials

Recent Developments in the Design, Deposition, and Processing of Hard Coatings

Structure, Mechanical and Tribological Properties of Sputtered and Electron-Beam Evaporated TiAlBN PVD hard Coatings

Plasma Assisted Growth and Wear Behavior of Aluminum Oxynitride Thin Films.

Effect of Temperature on Ti and TiN Films Deposited on BN Substrate

An XPS Study of N₂ Plasma Pretreatments on the Interface between Aluminum Alloy 7075-T6 and Films formed by Trimethylsilane Plasma Deposition.