AVS1997 TuM Sessions , Tuesday, October 21, 1997 8:20 AM
Tuesday Morning
Abstract Timeline | Time Periods | Topics | Schedule Overview
Click a Session Code to view its Abstracts
Session Code | Topic | Session Name |
---|---|---|
AS-TuM | AS | Depth Profiling and Analysis |
BI-TuM | BI | Surface Characterization of Biological Materials |
EM+SS-TuM | EM | Role of Hydrogen at Semiconductor Surfaces and Interfaces |
FP-TuM | FP | Structures & Materials for Field Emission & Vacuum Microelectronics |
MI+NS-TuM | MI | Magnetic Device Technology |
MS+AS+VT-TuM | MS | Process and Defect Characterization for Semiconductors |
NS+SS-TuM | NS | Nanomechanics and Adhesion |
PS1-TuM | PS | Novel Plasma Sources & Systems |
PS2-TuM | PS | Chamber Cleaning and Downstream Processing |
SS1-TuM | SS | Diffusion and Nucleation of Molecules and Clusters |
SS-TuM | SS | Gas-Surface Dynamics |
TF+VM-TuM | TF | Hard Coatings |
TF-TuM | TF | ULSI Interconnects and Metallization - I |