AVS1997 TuM Sessions , Tuesday, October 21, 1997 8:20 AM
Tuesday Morning
Abstract Timeline | Time Periods | Topics | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Topic | Session Name | 
|---|---|---|
| AS-TuM | AS | Depth Profiling and Analysis | 
| BI-TuM | BI | Surface Characterization of Biological Materials | 
| EM+SS-TuM | EM | Role of Hydrogen at Semiconductor Surfaces and Interfaces | 
| FP-TuM | FP | Structures & Materials for Field Emission & Vacuum Microelectronics | 
| MI+NS-TuM | MI | Magnetic Device Technology | 
| MS+AS+VT-TuM | MS | Process and Defect Characterization for Semiconductors | 
| NS+SS-TuM | NS | Nanomechanics and Adhesion | 
| PS1-TuM | PS | Novel Plasma Sources & Systems | 
| PS2-TuM | PS | Chamber Cleaning and Downstream Processing | 
| SS1-TuM | SS | Diffusion and Nucleation of Molecules and Clusters | 
| SS-TuM | SS | Gas-Surface Dynamics | 
| TF+VM-TuM | TF | Hard Coatings | 
| TF-TuM | TF | ULSI Interconnects and Metallization - I | 
