AVS1996 Manufacturing Science and Technology Technical Group Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| MS-MoM | Monday, October 14, 1996 8:20 AM | Sensor-Based Fault Detection and Process Control |
| MS-MoA | Monday, October 14, 1996 1:30 PM | Sensor-Based Fault Detection and Process Control (Continued) |
| MS-MoP | Monday, October 14, 1996 5:30 PM | Manufacturing Science and Technology Group Poster Session |
| MS-TuM | Tuesday, October 15, 1996 8:40 AM | Issues in Integrated Circuit Manufacturing: Competitiveness for the R&D Community |
| MS-TuA | Tuesday, October 15, 1996 2:00 PM | Advanced Manufacturing Equipment and Processing |
| MS+PS-WeM | Wednesday, October 16, 1996 8:20 AM | Advanced Plasma Equipment: RF Sensors and Controls |
| MS-WeA | Wednesday, October 16, 1996 2:00 PM | New Sensors for Diagnostics, Fault Detection, and Process Controls |
| MS+AS-ThM | Thursday, October 17, 1996 8:20 AM | Analysis and Control of Defects and Contamination |
| MS-ThA | Thursday, October 17, 1996 1:30 PM | Advanced Manufacturing Equipment and Processing - Cleaning Technology |
| MS-FrM | Friday, October 18, 1996 8:20 AM | Process & Equipment Modeling |