ALD2019 ALD Fundamentals Sessions
Topic Abstract Book
(853KB, May 5, 2020)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| AF1-MoA | Monday, July 22, 2019 1:30 PM | ALD Growth Mechanisms I |
| AF2-MoA | Monday, July 22, 2019 1:30 PM | ALD Precursors I |
| AF3-MoA | Monday, July 22, 2019 4:00 PM | Growth and Characterization I |
| AF4-MoA | Monday, July 22, 2019 4:00 PM | Growth Mechanisms II |
| AF1-MoP | Monday, July 22, 2019 5:45 PM | Precursor Synthesis and Process Development Poster Session |
| AF2-MoP | Monday, July 22, 2019 5:45 PM | Precursor Selection and Growth Optimization Poster Session |
| AF3-MoP | Monday, July 22, 2019 5:45 PM | Growth Mechanisms and In Situ Studies Poster Session |
| AF4-MoP | Monday, July 22, 2019 5:45 PM | Plasma Enhanced ALD Poster Session |
| AF5-MoP | Monday, July 22, 2019 5:45 PM | Characterization of ALD Films Poster Session |
| AF1-TuM | Tuesday, July 23, 2019 8:00 AM | In-Situ Characterization of ALD Processes |
| AF2-TuM | Tuesday, July 23, 2019 8:00 AM | ALD Precursors II |
| AF3-TuM | Tuesday, July 23, 2019 10:45 AM | Growth and Characterization II |
| AF-TuA | Tuesday, July 23, 2019 1:30 PM | Plasma ALD: Growth and Characterization |