ICMCTF1998 Session G1: Innovations in Thin-film Manufacturing Processes

Monday, April 27, 1998 8:30 AM in Room Town & Country

Monday Morning

Start	Invited?	Item
8:30 AM		G1-1 Plenary
8:50 AM	Invited	G1-2 Plenary
9:30 AM	Invited	G1-4 Plenary
10:10 AM		G1-6 Plenary
10:30 AM	Invited	G1-7 Plasma-Enhanced, Magnetron-Sputtered, Deposition (PMD^TM) of Materials J.N. Matossian, R. Wei (Hughes Research Laboratories, Inc.) Plasma-Enhanced, Magnetron-Sputtered, Deposition (PMD^TM) combines conventional, balanced-magnetron sputtering with an independently-generated plasma to achieve large-scale, ion-enhanced (or plasma-enhanced) deposition of hard coatings. Since 1990, we have been involved in the research and development of PMD^TMcoating technology with primary emphasis on the deposition of TiN for cutting tools used in automotive gear manufacturing. Research began in 1990 using an 18-inch-diameter coating chamber for controlled deposition experiments on end-mill cutting tools to identify the dominant PMD^TM process parameters (temperature and interfacial oxide concentraion) to achieve a 2-3x improvement in tool wear life beyond that achieved using conventional coating technologies. Scaling of the PMD^TM coating process began in 1994 using a 4-ft-diameter x 8-ft-long vacuum chamber to establish the same level of tool wear performance on end mills and then extend the process to actual automotive gear-manufacturing cutting tools such as hobs and shaper/cutters. Analytical modeling of the PMD^TM coating process was performed to predict the target-poisoning performance curves for the 18-inch-diameter and 4-ft-diameter laboratory coaters. This modeling then provided the basis for the design of a 4.5-ft-diameter x 5-ft-long prototype production coater with a 2000-lb load capacity that is presently in the final phase of system integration and is planned for production coatings of tools by January 1998. In this talk, we will review the evolution of the PMD^TMcoating technology from laboratory coater performance to large-scale Prototype coater performance. In addition, we will also present a description of the operating characteristics of PMD^TM coating technology, including a comparison with conventional coating technologies such as unbalanced magnetron sputtering, arc evaporation, and reactive evaporation. Finally, we will review the performance of PMD^TMcoated cutting tools tested under actual gear-manufacturing wear conditions with a comparison of conventionally-coated tools technologies as well.
11:10 AM	Invited	G1-9 Self-Propagating High Temperature Syntehsis (SHS) Process Application for Thin Films and Coating Deposition S.A. Suschenko (Frontier Science, Inc.); T.E. Fischer, B. Gallois (Stevens Institute of Technology); S. Danyluk (Georgia Institute of Technology) The self-propagating high temperature synthesis (SHS) process is suggested as an ideal deposition process to perform the economical thin film and coating onto complex shape components. The SHS process permits to deposit such coatings with good quality, good conformity on complex shapes and with a good adhesion to the substrate. The mechanics of the process based on exothermic reaction has described. Through the exothermic reaction the SHS creates its own process heat, thus eliminating the need for costly equipment and external power source. The film deposition with chromium has been achieved by SHS process. The thin film deposition reaction with this ingredient has described. The most important parameters of SHS vapor formation process such as the burning temperature and thickness of deposited thin film have been investigated. This SHS thin film deposition process can be used to deposit any kind metallic or nonmetallic single or a few (two or three) elements simultaneously. Development of the SHS coating process is described using as an example deposition of titanium-nitride ceramic coating. The fields of SHS industrial applications such as aerospace, commercial aviation, gas turbine and diesel engine parts, electronic substrates, semi-, and superconductors, chemical piping, kiln and furnace lining, functional gradient coatings have been suggested.
11:50 AM		G1-11 Advanced Electron Beam Installation for Coating Gas Turbine Blades M.I. Grechanyuk, P.P. Kucherenko (J.S. Company Gekont, Ukraine) The EB-PVD technology is widely used for deposition of protective coatings like MeCrAlY/ZrO₂ - Y₂O₃ on the gas turbine blades. The installation to be discussed comprises advanced crucible assembly which allows to intorduce practically any desired quantity of additional alloying elements including Hf, Si, Y, B etc. to the conventional MeCrAlY alloys. It gives new possibilities to improve the properties of used protective coatings and to obtain new metallic layers with dispersion strengthened, grade and multilayered structures. It also allows to develop new types of ceramic heat barrier top coatings with increased fracture toughness.