AVS2017 Plasma Science and Technology Division Sessions
Topic Abstract Book
(1MB, May 6, 2020)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS+AS+SE-MoM | Monday, October 30, 2017 8:20 AM | Atmospheric Pressure Plasmas |
| PS+AS-MoM | Monday, October 30, 2017 8:20 AM | Plasma Processing of Challenging Materials |
| PS+AS+SS-MoA | Monday, October 30, 2017 1:40 PM | Plasma Surface Interactions |
| PS-TuM | Tuesday, October 31, 2017 8:00 AM | Advanced FEOL/Gate Etching |
| PS+SS-TuA | Tuesday, October 31, 2017 2:20 PM | The Science of Plasmas and Surfaces: Commemorating the Career of Harold Winters (ALL INVITED SESSION) |
| PS-TuP | Tuesday, October 31, 2017 6:30 PM | Plasma Science and Technology Poster Session |
| PS+NS+SS-WeM | Wednesday, November 1, 2017 8:00 AM | Plasma Processing for Nanomaterials & Nanoparticles |
| PS-WeM | Wednesday, November 1, 2017 8:00 AM | Advanced BEOL/Interconnect Etching |
| PS+SS+TF-WeA | Wednesday, November 1, 2017 2:20 PM | Plasma Deposition |
| PS-WeA | Wednesday, November 1, 2017 2:20 PM | Modeling of Plasmas |
| PS+NS+SS+TF-ThM | Thursday, November 2, 2017 8:00 AM | Atomic Layer Etching I |
| PS-ThM | Thursday, November 2, 2017 8:00 AM | Plasma Sources |
| PS+TF-ThA | Thursday, November 2, 2017 2:20 PM | Plasma Enhanced ALD |
| PS+VT-ThA | Thursday, November 2, 2017 2:20 PM | Plasma Diagnostics, Sensors and Control |
| PS+NS+SS+TF-FrM | Friday, November 3, 2017 8:20 AM | Atomic Layer Etching II |