AVS2011 Plasma Science and Technology Division Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS-MoM | Monday, October 31, 2011 8:20 AM | Advanced FEOL / Gate Etching I |
| PS+BI-MoA | Monday, October 31, 2011 2:00 PM | Multiphase (Liquid, Solid, Gas) and Biological Related Plasmas |
| PS+SE-MoA | Monday, October 31, 2011 2:00 PM | Advanced FEOL / Gate Etching II |
| PS+MN+TF-TuM | Tuesday, November 1, 2011 8:00 AM | Plasma Processing for Disruptive Technologies |
| PS-TuM | Tuesday, November 1, 2011 8:00 AM | Advanced BEOL / Interconnect Etching I |
| PS1-TuA | Tuesday, November 1, 2011 2:00 PM | Advanced BEOL / Interconnect Etching II |
| PS2-TuA | Tuesday, November 1, 2011 2:00 PM | Plasma Diagnostics, Sensors and Control I |
| PS+SE-WeM | Wednesday, November 2, 2011 8:00 AM | Atmospheric Plasma Processing and Micro Plasmas |
| PS+SS-WeM | Wednesday, November 2, 2011 8:00 AM | Plasma Surface Interactions (Fundamentals & Applications) I |
| PS+EM-WeA | Wednesday, November 2, 2011 2:00 PM | Low-K Materials & Integration |
| PS-WeA | Wednesday, November 2, 2011 2:00 PM | Plasma Sources |
| PS+TF-ThM | Thursday, November 3, 2011 8:00 AM | Plasma Deposition and Plasma Enhanced ALD |
| PS-ThM | Thursday, November 3, 2011 8:00 AM | Neutral Beam and Low Damage Processing |
| PS+SS-ThA | Thursday, November 3, 2011 2:00 PM | Plasma Surface Interactions (Fundamentals & Applications) II |
| PS-ThA | Thursday, November 3, 2011 2:00 PM | Plasma Diagnostics, Sensors and Control II |
| PS-ThP | Thursday, November 3, 2011 6:00 PM | Plasma Science and Technology Poster Session |
| PS-FrM | Friday, November 4, 2011 8:20 AM | Plasma Modeling |