AVS2004 Monday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, November 15, 2004
8:20 AM 9:20 AM 10:20 AM 11:20 AM
AS-MoM
Application of TOF-SIMS to Environmentally Relevant Surface and Interfaces
Cluster Primary Ion Beam Secondary Ion Mass Spectrometry for 2 and 3 Dimensional SIMS Analysis
Fundamentals and Applications of a New Bi-cluster Liquid Metal Ion Source
TOF-SIMS Studies using a Newly Developed C60+ Primary Ion Gun: Fundamental Aspects and Applications
ToF-SIMS Quantitation of PDMS at the Surface of a Dehydrated Commercial Hydrogel Material
SIMS Trace Uranium Measurements in HfO Films with the ims-1270
Improved Analysis of Bulk Insulators using Magnetic Sector SIMS with O2+ Primary Beam and Electron Beam Adjacent to Analysis Area
Ionization of Al Atoms Emitted from Al Metal
BI-MoM
High-Resolution Structural and Dynamic Characterization of Proteins on Biomaterial Surfaces
Protein-Surface Interactions Studied with Internal Reflection Ellipsometry
Angle-resolved Imaging Surface Plasmon Resonance
Feasibility Study of a Waveguide Excitation Fluorescence Microscope for Micro and Nanoscale Characterization of Bio-Interfaces
In situ Sum Frequency Generation Characterization of Peptide Monolayers on Hydrophobic and Charged Surfaces
Measurement of Conformational Changes of Surface Bound Biomolecules: a Novel Strategy for Analytical Biosensing
Study of Metal Film-Tethered (Bio)Molecules in Aqueous Solution by Enhanced ATR-IR Spectroscopy
Investigation of Fibrinogen Displacement from Oxide Surfaces
Probing the Conformation of Hydrated Molecular Adsorbates on Solid Interfaces Using Long Period X-ray Standing Wave Fluorescence
CT+
Impact of Electron-Phonon Coupling on Thermal Boundary Resistance by Molecular-Dynamics Simulation
Thin Film SiGe Superlattice Micro Refrigerators Flip-Chip Bonded with IC Chips
Interfaces, Functionalization and Heat Flow in Nanoscale Materials.
Thermal Transport in Nanostructured Materials
Thin Film Micro Refrigerators for on Chip Thermal Management
Micro- and Nanoscale Thermal Phenomena in Magnetic Recording Heads
Transport and Mechanics in Hard and Soft Nanomaterials
MN-MoM
Porous Thin Films for MEMS and Nano Applications
Nanotribological Characterization of Perfluoropolymer Thin Films for BioMEMS Applications
Multi-scale Friction Experiments Using Atomic Force Microscopy and Surface Micromachined Interfaces
Deposition and Characterization of Nitrogen-Doped Polycrystalline SiC Films for MEMS Applications
Characterization of Nanotribological Properties and Surface Chemistry of Advanced Nanostructured Carbon Materials for MEMS and NEMS Applications
Critical Issues in Epitaxial Growth of Pulse Laser Deposited AlN Films for MEMS and NEMS based RF Resonators
Vapor Phase Uptake of Mobile Organophosphates for MEMS Lubrication Purposes
Mechanical and Electrochemical Characterization of Gold Membranes on a Drug Delivery MEMS Device
Microfabrication and Nanomechanical Characterization of Polymer MEMS for Biological Applications
NS-MoM
Quantitative Analysis of Electronic Properties of Carbon Nanotubes by Scanning Probe Microscopy: from Atomic to Mesoscopic Length Scales
Electronics and Optoelectronics with Single Carbon Nanotubes
Ballistic Transport of Hole in 4µm Carbon Nanotube Channel Transistor with Coulomb Blockade Effect
Carbon Nanotube Photo-detectors
Field Electron Emission from Aligned Carbon Nanotube Bundles at an Ultra-Low Threshold of 1 V/µm
Modeling of Gas-modulated Carbon Nanotube Schottky Barrier
Environmental Effects on Double Wall Carbon Nanotube Field Effect Transistors
Electrical Characterization of Carbon Welds between Multiwalled Carbon Nanotubes
Stiffness and Nonlinear Mechanical Properties of Single-Walled Carbon Nanotube Bundles
PS1-MoM
Etching of SiC and SiCN with Tetrafluoroethane/Oxygen Reactive Plasma
Investigation of Fundamental Etching Reaction of Organic Low Dielectric Film Using Ion Beams with Radical Injection
Fluorocarbon Surface Chemistry in Dual Frequency Capacitively Coupled Discharges for Dielectric Etching: A Comparison with Inductively Coupled Plasmas
Low-k and Porous Low-k Sidewall Roughening: Fluorocarbon Plasma and Beam Measurements
The Effects of Pore Morphology on the Diffusive Properties of a Porous Low-K Dielectric
Using In-vacuo Electron-Spin-Resonance and Infrared Spectroscopy Technique in the Analysis of Surface Reactions of Low-k films during/after Plasma Processes
Minimizing low-k Damage during In-situ Photoresist Strip
Comparison of In-situ and Ex-situ Resist Strip Process for Ultra Low-k/ Cu Interconnect
Impact of Different Ashing Plasmas on Porous and Dense SiOCH
Analysis of Ash-Induced Modification of Porous Organosilicate Glass Inter-Level Dielectric Materials on Patterned Structures Utilizing Electron Energy Loss Spectroscopy and Angular Resolved XPS
Highly Selective Etching of Si3N4 to SiOC by Precise Ion Energy Control for sub-90 nm Dual Damascene Formation
PS2-MoM
Challenges Facing Deep Trench Silicon Etching for Present and Future Trench Technology Nodes
Etching High Aspect Ratio Structures in Si using SF6/O2 Plasma: Experiments and Feature Scale Modeling
Etch Rate and Profile Evolution Model for High Aspect Ratio Etch in HBr/NF3/O2 Plasma
Optimal Chamber Aspect Ratio of an Inductively Coupled Plasma Etcher for Advanced Gate Application
Highly Anisotropic and Damage-free Gate Electrode Patterning in Neutral Beam Etching Using F2 Based Gas Chemistry
Silicon Recess Formation During High Density Plasma Polysilicon Gate Etching
Deep Cryo-Etching for Silicon Structures
Atomic-scale Simulations of Spontaneous and Ion-assisted Etching of Silicon
X-ray Photoelectron Spectroscopy Analyses of SiGe and Si Surfaces after Selective Etching of Si
SC+
Heterointerfaces and Magnetism in Ferromagnetic Semiconductor Heterostructures
Structural and Magnetic Properties of a Magnetic Semiconductor MnGeN2 Grown by MBE
Thermal Stability of GaCrN Epitaxial Layers
Structural Characterization of GaMnN Thin Films Grown by Chemical Beam Epitaxy (CBE).
Induced Host Moments and Mn Electronic Structure in Mn-Doped Iii-V Ferromagnetic Semiconductors
Intrinsic Versus Extrinsic Nature of Co Doped TiO2 Diluted Magnetic Semiconductor Thin Films
Ferroelectric Field Effect on Ferromagnetism in Diluted Magnetic Insulator Anatase Co:TiO2
Applications of a Dilute Magnetic Semiconductor Based on AlN
Ferromagnetism and Polaron Percolation in MnxGe1-x Dilute Magnetic Semiconductor
SE-MoM
Structure and Hardening in TiN/a-SiNx Multilayers and Self Organizing Ti1-xAlxN Films
Structure and Optical Behavior of As-Grown and Annealed Titania/Alumina Nanolaminate Films
The Growth of Depth-Graded WSi2/Si Multilayer Linear Zone Plates*
Early Stages of Oxidation at 800°C for CrAlON Superlattice Coatings used to Improve Oxidation Resistance of Steel Plates for Applications as SOFC Interconnects*
Oxide Nanolaminate Coatings for Protection Against Perforated Pitting Corrosion in Stainless Steel
Environmentally Friendly Plasma Electrolytic Processes for Corrosion and Wear Protection of Lightweight Metals
Evaluation of Plasma Polymer Coatings in Corrosion Protection of Aluminum Alloys
Nano-coatings for Complex Uneven Surfaces Cellular Foams & Nano-fibers of Carbon
SS1-MoM
Electronic Stablization of Nanophase Separation Along Si Atomic Chains
The Hammett Equation in Single Molecule Chemistry: Probing a Linear Free Energy Relationship One Molecule at a Time
Benzene on Au{111} at 4 K: Observation of Molecular Cascades and Substrate-Mediated Interactions
Listening to Atom Dynamics During Atomic Manipulation
Electronic Structure and Excitations at the Atomic Scale
Quantum Well States in Thin Films of Pb on Si(111)
Newns-Anderson Model for Chemicurrents
Direct Observation of Electron Emission from a Metal Surface Due to Scattering of Vibrationally Excited Molecules
Co-Adsorption of Polar Molecules with SF6 on Ru(0001): Effect on Adsorption Geometry, Ion Yields and Electron-Mediated Chemistry
Spin-Resolved Plasmon Dispersion of Gd(0001)
SS2-MoM
Atomic-level Control of Chemical Properties of Si(100) with Dopant Impurities
Chemistry on Surfaces of Thin Films and at Thin Film/Silicon Buried Interface: Vinyltrimethylsilane and (hfac)Cu(VTMS) on Si(100)-2x1 and on TiCN/Si(100)
Functionalization of Semiconductor Surfaces
Adsorption of Amines on Germanium and Silicon Surfaces
Silicon Surface Chemistry of Substituted Triazines
Carbonyl Chemistry at the (100)-2x1 Semiconductor Interface
Adsorption of Chiral Enantiomers of 2,3 butanediol on Si(100)
Self Assembly on Si(114)-(2x1): Molecular Attachment Via Alkene Functional Groups
Adsorption of Cata-condensed Aromatic Compounds on Si(100)
Ideal Methyl Termination of the Si(111) Surface
TF-MoM
Atomic Layer Deposited Barriers for Copper Interconnects
Effects of Surface Chemistry on ALD Ta(N) Barrier Formation on Low k Dielectrics
Evaluation of Plasma Enhanced Atomic Layer Deposition TaN for Metal Gate Electrode Application
Nucleation and Electrical Characterization of Ruthenium formed by Selective Area Atomic Layer Deposition
Atomic Layer Deposition for Metal Gate and Capacitor Electrodes
Infrared Analysis of HfO2 ALD from Hafnium Diethyl-Amide on SiO2 and Si-H surfaces
Area-selective Atomic Layer Deposition for high-κ Dielectric Materials
SiO2 Atomic Layer Deposition Using HSi[N(CH3)2]3 and H2O2
Radical-Enhanced Atomic Layer Deposition of Pure and Erbium-Doped Y2O3 Thin Films
Sessions | Time Periods | Topics | Schedule Overview