AVS2004 Plasma Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS1-MoM | Monday, November 15, 2004 8:20 AM | Low-k Dielectric Etching |
| PS2-MoM | Monday, November 15, 2004 8:20 AM | Silicon Etching |
| PS1-MoA | Monday, November 15, 2004 2:00 PM | Plasma Surface Interactions in Etching |
| PS2-MoA | Monday, November 15, 2004 2:00 PM | Emerging Plasma Applications |
| PS-MoP | Monday, November 15, 2004 5:00 PM | Poster Session |
| PS1-TuM | Tuesday, November 16, 2004 8:20 AM | Dielectric Etching |
| PS2-TuM | Tuesday, November 16, 2004 8:20 AM | New Gate Conductor Etching |
| PS+MS-TuA | Tuesday, November 16, 2004 1:20 PM | 45nm Node with Panel Discussion |
| PS2-TuA | Tuesday, November 16, 2004 1:20 PM | Plasma and Polymers |
| PS-TuP | Tuesday, November 16, 2004 4:00 PM | Poster Session |
| PS1-WeM | Wednesday, November 17, 2004 8:40 AM | Plasma in Nanoscale Applications |
| PS2-WeM | Wednesday, November 17, 2004 8:20 AM | Plasma Sources |
| PS-WeA | Wednesday, November 17, 2004 2:00 PM | Plasma Diagnostics |
| PS-ThM | Thursday, November 18, 2004 8:20 AM | Atmospheric and Microdischarges |
| PS-ThA | Thursday, November 18, 2004 2:00 PM | Plasma-Surface Interaction |
| PS+BI-FrM | Friday, November 19, 2004 8:20 AM | Plasmas in Bioscience |
| PS1+DI-FrM | Friday, November 19, 2004 8:20 AM | High K and Difficult Materials Etch |