AVS2003 Monday Afternoon

Nanotechnology: A Policy Perspective

Nanotechnology: Future Challenges and Opportunities

Self-Assembly Processing for Nanomanufacturing

Nanotechnology: Constructing a Computer from Molecular Components

Massively Parallel Assembly

Vibrational Behavior of Adsorbed CO₂ on the Interior and Exterior Surfaces of Carbon Nanotubes: An Experimental and First Principles Study

Adsorption and Dimerization of NO Inside of Single Walled Carbon Nanotubes - An Infrared Spectroscopic Study

Adsorption of CF₄ on Opened Single Walled Carbon Nanotubes

Sidewall Chemistry of Carbon Nanotubes Investigated by STM

Iron-Oxide Nanoparticle Stability in an Ion Beam

Scanning Tunneling Spectroscopy of Boron Nitride Nanotubes; Evidence for a Giant Stark Effect

Size Dependency of Structural, Optical, and Photocatalytical Properties of TiO₂ Nanoparticles

Determination of the Fermi Level of Isolated Single-Walled Carbon Nanotubes in Solution

Band Modulation in Various Nanopeapods and Its Origin

Towards the Prevention of Protein Adsorption, and Bacterial and Cell Adhesion by Optimised Surface Modification

Factors that Determine the Protein Resistance of Oligoether Self-assembled Monolayers - Internal Hydrophilicity, Terminal Hydrophilicity and Lateral Packing Density

Use of QCM-D to Analyze Thin Polymer Films at Interfaces

Non-Fouling Surfaces: Their Use and Study by Matrix-Assisted Laser Desorption / Ionization Mass Spectrometry

Comparison of Immunoassay Blocking Strategies on Metal Oxide Substrates

Lubricating with Water: Biomimetic Additives

Boundary Lubrication Properties of Bio- and Synthetic Polymers Containing Poly- and Oligosaccharides

The Role of Polysaccharides in Bacterial Adsorption: A Chemical Perspective

Etching and Thermal Stability of Zirconium and Hafnium Oxide High-k Dielectrics

Structure and Stability of Alternative High-K Gate Dielectrics

Hafnium Silicate High-K Dielectric Etch with High Selectivity to Si at Low Wafer Temperatures

Post Deposition Stability of High-k Dielectrics to Air Exposure and its Implications to Interface Reactivity

Growth, Characterization and Thermal Stability of High-K Gate Stacks

Hafnium Germanosilicate Thin Films for Gate and Capacitor Dielectric Applications: Thermal Stability Studies

Localized Defect States, Impurities, and Doping in Al_xGa_1-xN Epilayers

Contactless Characterization of High Electron Mobility Transistor Structures using Surface Photovoltage Spectroscopy

Atomic Bonding and Electronic Changes at InGaAs/InP Heterojunctions

Nanoscale Electronic Characterization of Semiconductors: from Operating Devices to Atomic Scale Defects

STM Observation of Subsurface Boron Dopants on the Si(001)-2x1 Clean Surface

Surface Defects After the Growth of Highly P and Sb Doped Si

The Effect of Strain on Impurity States in Si and Methods of Calculation Thereof

New Mechanism for Coupling between Properties of Interfaces and Bulk Semiconductors

Materials/Structures for High Areal Density Write Poles

Influence of Pd and Pt Buffers on the Soft Magnetic Properties of Fe₇₀Co₃₀ Thin Films

Atomistic Simulations of Metal/Metal Oxide Heterostructures

Quantum-size Effect of Tunneling Magnetoresistance in Magnetic Tunnel Junctions

Magnetization Dynamics and Magneto-transport in Epitaxial Nano-structures

Artifacts in Ballistic Magnetoresistance Measurements

Arrays of Magnetoresistive Sensors for Non-destructive Testing

Research and Challenges in Nano Mechanics and Materials

Opportunities and Challenges in the Materials Supply Chain for Semiconductor Manufacturing

New Processes and Materials for Environmentally Benign Semiconductor Manufacturing

Sub-100 nm Copper Wiring Challenges and Solutions

Nanoporous Organosilicates for On-Chip Applications Using Sacrificial Macromolecular Porogens

Characterization of Organic-Metal and Organic-Organic Interfaces

The Role of Charge Neutrality Level in Molecular Level Alignment at All-organic Heterojunctions

Au/CuPc Interface: A Photoemission Investigation

XPS and HRSEM Studies on the Interfaces of Au/CuPc vs. Au/FCuPc

A Combined Photoemission Spectroscopy and Scanning Probe Microscopy Study of Organic Charge Injection Layer / Metal Interfaces

Electronic Structures of Al/Liq/Alq₃ Interfaces Studied by Photoemission Spectroscopy

Direct Observation of the Evolution of the Molecular Orbital Energy Levels of a Silole Derivative as a Function of Magnesium Deposition

Band Alignment on Patterned Surfaces

A General Soft Contact Evaporation Method for Molecule-Based (Opto) Electronic Devices

Ion-Acoustic Solitons in a High Power Pulsed Magnetron Sputtering Discharge

Next Generation RF Ion Beam Source for Three-Dimensional and other Critical Etching Applications

The Use of Reactive Gases with Broad-beam RF Ion Sources for Industrial Applications

Reactive Sputter Deposition of Nanocrystalline Compound Thin Films with a Hollow Cathode Source Operated in a Static Mode

Evolution of Radiofrequency Plasma Sources

Physics of High-pressure Helium and Argon Plasmas

Two-dimensional Self-consistent Modeling of Wave Propagation and Plasma Dynamics in a Helicon Source

Large Area Electron-Beam Generated Plasma Processing System¹

Post-etch Wafer Cleaning by a New Dry-cleaning Technique using Both Gas Flow and Plasma

Understanding Deep Silicon Etching: Mechanisms for Formation and Removal of Sidewall Passivation

Improvement of Anisotropy and Aspect Ratio of a Pattern Etched in Bosch Process by using a Faraday Cage

Exploring Microdischarges for Manufacturing and Sensing Applications

Feature Scale Model of Etching High Aspect Ratio Structures in Silicon using SF₆/O₂ Plasma

Etching of High Aspect Ratio Structures in Si using SF₆/O₂ Plasmas

Via Drilling on Silicon Wafers using the Cryogenic Process

Si, SiO₂ Feature Etching for MEMS Fabrication: A Combined Simulator Coupling Local Transport, Surface Etch, and Profile Evolution Models

In-Situ On-wafer Monitoring for Charge Build-up Voltage during Plasma Process

Plasma Etching of Chromium as a Hard Mask for a Complex Metal Stack Etch

Metrology Needs for Ultrathin Films in the Wafer Processing Industry. What is Needed? What is Available?

Intercomparison of Silicon Dioxide Thickness Measurements Made by Multiple Techniques - The Route to Accuracy

Comparative Thickness Measurements of SiO₂/Si Films for Thicknesses less than 10 nm

The Thickness and Composition of Ultra-thin SiO₂ Layers on Si

Characterization and Metrology for High k Materials using Parallel Angular Resolved XPS (PARXPS)

Multivariate Statistical Analysis of Spatially Compressed Time-of-Flight Secondary Ion Mass Spectrometry Images¹

High-resolution TEM Study the Microstructure of W-Si-C Films in the Vicinity of the Crystalline-Amorphous Transition

Metrology of 1-10 nm Thick CNx Films: Thickness, Density and Surface Roughness Measurements

Reactive Magnetron Sputtering of Hard Si-C-N and Si-B-C-N Films and Their Properties

Using NMR to Probe the Bonding in Amorphous Carbon Nitride Thin Films

DLC and CNx Coatings Produced by Pulsed Laser and Filtered Vacuum Arc Techniques

Fabrication and Properties of Ultra-nano, Nano, and Polycrystalline Diamond Membranes and Sheets

Nanotribological Properties of Nanocomposite and Amorphous CrBN Thin Films

Growth of Ordered and Disordered Arrays of Silicon Pillars During Laser-Assisted Etching

Defect-driven Photodesorption at UV and VUV Excimer Laser Wavelengths

Hot Electron Generation and Detection from Chemical Reactions on Metal Surfaces

Factors Influencing Ion Yields and Angular Distributions in Electron Stimulated Desorption

Effects of Water Ice Films on Thermal Stability and Electron-activated Decomposition of CF₂Cl₂ on Metal Surfaces

Water Enhanced Decomposition and Nanometer Scale Structure Formation Generated by Radiative Exposure of Solid Surfaces

Electron-stimulated Reactions in Thin Amorphous Solid Water Films on Pt(111).

Temperature-Dependent Thresholds for Ion-Stimulated Surface Diffusion: Experiments with Second Harmonic Microscopy

Femtosecond Photo-generated Carrier and Reaction Dynamics on a Chlorinated Silicon Surface: Reaction Yield Calculation by Rate Equation of Adsorbed Chlorine

Super Hydrophobic Interactions: From the Inside and Out

Friction Anisotropy at Pd(100)/Pd(100) Interfaces

Direct Observation of Superlubricity

The Role of the Third Body Processes in the Friction and Wear of MoS2 and MoST Coatings

Molecular and Bulk Material Mechanisms of Smooth and Stick-slip Sliding

Evaluation of the Surface Characteristics and Mechanical Properties of Interconnect Films and their Correlation with CMP Process

A Comparative Study of the Adhesion, Friction, and Mechanical Properties of CF₃ and CH₃ Terminated Alkanethiol Monolayers

Reaction of Trimethylphosphate with TiC and VC(100) Surfaces

Degradation of Self-Assembled Monolayer in Humid Environments

Catalysis by Supported Metal Nanoclusters

Gold Nano-Clusters on Rutile TiO₂(110) - A Combined UHV and High Pressure STM Study

Dimethyl Methylphosphonate Decomposition on Supported Ni Nanoparticles Deposited on a TiO₂(110) Surface

Dynamics and Chemical Reactivity of Au on TiO₂ (110) Rutile

Oxygen-Induced Morphological Changes in Cu and Ni Islands on TiO₂(110)

Chemical Reactions on Free Iridium and Platinum Clusters

STM Study of Copper Growth on ZnO(0001)-Zn and ZnO(0001bar)-O Surfaces

Charge Exchange between Alkali Ions and Nanocrystal Metal Surfaces

Electronic Detection of Oscillatory Reactions on Supported Platinum Particles

The Application of Plasma for Metal Atomic Layer Deposition for Cu Interconnect Technology

Copper Atomic Layer Deposition Using In Situ-Generated Cu₃Cl₃ and Hydrogen Radicals

Dynamic Equipment and Process Simulation for Atomic Layer Deposition Technology

Al₂O₃ Atomic Layer Deposition for the Enhancement of MEMS Performance and Reliability

Processes and Properties of Porous CVD Low-k Materials

Deposition of Low k OSG Films Exhibiting Enhanced Mechanical Properties by PECVD

Expanding Thermal Plasma for Low-k Dielectrics: Guiding the Film Chemistry by Means of Selected Dissociation Paths in the Plasma

Photoresist Removal on Porous Low-k Materials Using an Energetic (100s of eV) Oxygen Neutral Beam