AVS2002 Wednesday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Wednesday, November 6, 2002
8:20 AM 9:20 AM 10:20 AM
AS-WeM
Verification of Silicon Native Oxide Growth Models using Spectroscopic Ellipsometry
Measurement of Semi-Isolated Poly-Silicon Gate Structure with Optical Critical Dimension Technique
Progress in Spectroscopic Ellipsometry: Applications from Vacuum Ultraviolet to Infrared
Application of Bragg Light Scattering Method for Studying of Spatial Dispersion Effects in Ferroelectrics
Titanium Dioxide Thin Film Growth on Si(111) by Chemical Vapor Deposition of Titanium(IV) Isopropoxide
Nitrided Silicon-Silicon Dioxide Interface: Electrical and Physico-Chemical Characterization by Complementary Surface Techniques
Accurate SIMS analysis of SiON Films
BI+
A Challenging Problem: Interfaces between Condensed Matter
Surface Chemistry of Environmentally Relevant Transition Metal Oxides Studied in Aqueous Solutions using Soft X-ray Spectromicroscopy
Investigation of Protein Adsorption with Simultaneous Measurements of Atomic Force Microscope (AFM) and Quartz Crystal Microbalance (QCM)
Real-time AFM Investigations of the Enzymatic Degradation of DNA-polymer Dendrimer Complexes
Interaction of Water with Protein Resistant Self-Assembled Monolayers: Neutron Reflectivity Measurements of Water Density in the Interphase Region
Force Spectroscopy of Self-Assembled Monolayers Containing 'Sandwiched' Oligo(Ethylene Glycol) Interfaces on Gold under Electrolyte Solution
HS-WeM
Chemical and Biological Agent Decontamination of Civilian Facilities
Science and Technology for Combating Terrorism
Basic Research Needs for Countering Terrorism
Panel Discussion: Science & Technology Issues for Homeland Security, T. HOPKINS, Defense Threat Reduction Agency; T. MICHALSKI, Sandia Nat. Labs; E. RABER, Lawrence Livemore Nat. Lab; M.J. SAILOR, UC, San Diego; D. WALT, Tufts Univ.; L.J. WHITMAN, NRL
MI-WeM
Perpendicular Recording Media Near 100 Gbit per square inch
High Frequency Noise Measurements in Spin-Valves
Theory of Spin-dependent Tunneling
In-Situ Conductance Measurements of Giant Magnetoresistive Multilayers
MM+
Probing Nanomechanical Systems with Electron Tunneling Devices
Fabrication and Characterization of a Carbon Nanotube Torsional Oscillator
Femtogram Detection using Nanoelectromechanical Oscillators
IR Imaging Using Uncooled Nanostructured Microcantilever Thermal Detectors1
Frequency and Phase Entrainment in MEMS Oscillators
Fabrication of Submicron-Scale Metallic Comb-Drive Actuators
Controlling Energy Losses in Nanoscale Structures with Surface Chemistry
NS-WeM
Electronic Structure of Nitrogen Doped Ultrananocrystalline Diamond
Growth, Microstructure and Properties of Fullerene-Like Carbon Nitride Thin Solid Films Deposited by DC Magnetron Sputtering
Selective Oxidation of Faulted Halves of Si(111): (7x7) with Ozone
Dynamics of Br-Si(100)-(2x1): Surface Modification in the Absence of Desorption
Surface, Bulk and Interfacial Analysis of Self-assembled NAno-phase Particle (SNAP) Films
Electronic Structure of Ag/Cu Striped Nanostructures
Patterned Anodization on Aluminum Surfaces
OF+
Interfaces between Metals and Conjugated Organic Materials: From Physisorption to Covalent Bonding
Structural and Electronic Properties of the Interfaces between Au(111) and the Organic Semiconductors Pentacene and p-sexiphenyl
Growth of Organic Molecules on Ferromagnetic Substrates for Hybrid Organo-metallic Spintronic Devices
Controlling Metallic Contacts to Molecular Electronic Devices
DLC Thin Film as Electron Injection Layer in Organic LEDs
Self-assembly of Molecular 1D wires on Cu(110)
Dip Pen Nanolithography on Insulating Substrates
PS-WeM
Plasma Etch Chemistries for III-V Lasers and Light-Emitting Diodes
Surface Chemical Changes of Aluminum During NF3-Based In-Situ Chamber Cleaning: Critical Discharge Parameters
Metal Etching in High-Density Plasmas
Effects of Dry Etch Process for Platinum Upper Electrodes on Electrical Properties of High-k (Ba,Sr)TiO3 Thin-Film Capacitors
Residual-Free Reactive Ion Etching of the Bell Contact Ti/Pt/Au
Advanced Metal Gate Etch with 193nm Lithography in a Silicon Decoupled Plasma Source Etcher (DPSII)
Effect of Carbon Based Polymer Formation on Process Stability in Polysilicon Etching
PS+
Plasma Enhanced Chemical Vapor Deposition of a Dense SiO2 Cap Layer on Low-k Nanostructured Porous Silica
RIE processes of Formation of Nanometer-Scale Dot Arrays
Efficient Production of Single-Wall Carbon Nanotubes by Means of the Gravity-free Gas Arc Dischargee
Patterned Growth of Vertically Aligned Carbon Nanofibers using a High Density Plasma Enhanced Chemical Vapor Deposition Process
Carbon Nanotubes by ICP-CVD: Growth, Characterization, Plasma Diagnostics, and Modeling
Zinc Oxide Nanowires Grown by Plasma Assisted Chemical Vapor Deposition
SS-WeM
Surface Vibrational Spectroscopy Beyond the Harmonic Approximation: Experiments and ab initio Calculations of Ethoxy Adsorbed on Cu(100)
Development of a Time-of-Flight HREELS Using Pseudorandom Modulation
The STM as Operative Tool: Physics and Chemistry with Single Atoms and Molecules
Microscopic Nature of the Interaction of Water with Noble Metal Surface
First Principles Simulation for NC-AFM Images of Si(111) √3x√3-Ag Surface
Single Molecular Motion and Reaction Induced by STM Inelastic Tunneling
Dry De-intercalation in Layered Compounds upon Controlled Surface Charging in XPS
SS+
Nucleation and Epitaxial Growth of Gallium Nitride on Sapphire (0001) using Ion-beam-assisted Molecular Beam Epitaxy
STM Characterization of Ge Nucleation on Ge(001)
High Resolution Large Area STM Analysis of Nucleationless Island Formation in SiGe/Si(100)
Scanning Probes and Transition States: Uncovering the Low-barrier Si ad-dimer Diffusion Mechanism on Si(001) by its Electric Field Dependence
Simulations of Surface Diffusion on Amorphous Silicon
Relaxation of a Single Silicon Mound during Silicon Deposition on the Si(111)(7x7)
Morphology of Crystal Growth on Vicinal Surfaces: MBE and H-assisted MBE Growth on Laser-textured Ge(001)
Characterization of Si(100) Homoepitaxy Grown in the STM at Low Temperatures
TF+
The PE-ALD of Ta Based Metals/Nitrides: The Growth, Materials Properties, and Applications to Future Device Fabrications
Characteristics of TiN Films Deposited by rf Remote Plasma Enhanced Atomic Layer Deposition (ALD) Method using Metal Organic Precursor
Importance of Hydrogen Recombination on Flow Tube Walls During Hydrogen Radical-Assisted Metal Atomic Layer Deposition
Improved Nucleation of TiN ALD Films on Low k Polymer Dielectrics Using Al2O3 ALD Adhesion Layers
Alternating Layer Deposition of Dielectric Films
Photochemically-Assisted ALD of BN Thin Films
VT-WeM
Influence of Thermal and Surface Treatments on the Outgassing Of Austenitic Stainless Steels Studied by Thermal and Electron Stimulated Desorption
Comparison of Outgassing Rates of Bare and TiN-coated Stainless Steel Vacuum Chambers*
Degassing of Static Expansion Vacuum Gauge Calibration Chamber
Organic Contaminants Adsorption Behavior on Silicon Wafer Surface Under Reduced Pressure
Study on Desorption of Carbonaceous Gas Molecules from Copper Surfaces under Electron Bombardment and the Surface Characterization
Solubility and Diffusion of Hydrogen in Ordered Metals
Sessions | Time Periods | Topics | Schedule Overview