AVS2002 Wednesday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

Hover over a paper or session to view details. Click a Session in the first column to view session papers.
Session Wednesday, November 6, 2002
2:00 PM 3:00 PM 4:00 PM 5:00 PM
AS-WeA
Ultra-high Resolution AES Depth Profiling using a Masked Specimen Holder
Sputtering Artifacts in Depth Profile Analysis of HfO2 and HfSixOy
Challenges for the Characterization and Integration of High-k Gate Dielectrics
Quantitative Depth Profiling of Hafnium Films by Electron Spectroscopies
Binding Energy Shifts in Soft X-ray Photoelectron Spectroscopy of HfO2/SiO2/Si High-k Gate-dielectric Structures
Chlorine and Oxygen Transport in ALD Grown ZrO2 and HfO2 Films on Silicon
A Study of the Microstructure and Electrical Properties of the Reoxidized HfO2 upon Annealing Methods
BI-WeA
Polyelectrolyte Multilayers: Design of Biofunctional Surfaces
Poly-(L-Glutamic Acid)/Poly-(L-lysine) Multilayers used as Biomaterial Coating
Cellular Interactions with Multilayered Polyelectrolyte Films
Entrapment of Phosphate Ester Hydrolyzing Enzymes in Polyelectrolyte Multilayers Deposited on Glass Beads and Extended Retention of Their Enzymatic Activity
In-situ Measurements of Polyelectrolyte Multilayer Build-up using Ellipsometry and QCM-D : 9
Nanoscale Surface Properties of Microbial Cells
Development of a Fluorescent Based Assay for Quantifying Ligand Surface Density on IPN-Modified PS for High Throughput Applications
EL+
Scanning Tunneling Microscopy and Spectroscopy of Gallium Oxide and Indium Oxide Deposition on GaAs(001)-(2x4)
Structure-Sensitive Oxidation of the Indium Phosphide (001) Surface
The Addition of Sb and Bi 'Surfactants' during GaN Growth by Metal Organic Vapor Phase Epitaxy
Surface Reaction Study of Tungsten Nitride Precursors Decomposition on Si(100)-(2 x 1)
Thermal Decomposition and Desorption Study of Tetrakis(diethylamido)zirconium(TDEAZr) on Si(100) for MOCVD and ALD of ZrO2
Reactions of Organosulfur Compounds with Si(100) for Chemically Controlled Epitaxy of II-VI Semiconductors on Si(100)
Kinetics and Mechanism of Adsorption and Ultrathin Oxide Growth by Ozone on Si(100)2x1 and Si(111)7x7
Stress-induced Dissociative Chemisorption of Oxygen on Si(001)
Direct Detection of D2O and D2 on D/Si(111) Surfaces under O Atom Exposures
HS+
Photonic Crystals Derived from Nanocrystalline Porous Si: Applications in Detection of Chemical Warfare Agents, Explosives, Pollutants, and Biochemicals
Magnetic Labeling and Microarray Detection of Biomolecules
Optical Microarrays for Chemical and Biological Detection
Real-time Detection of TNT Using Microcantilevers with Microcyclic Cavitand Coatings1
A New Nanoscale Platform for Gas Sensor Applications
Metal Phthalocyanine Thin Films as Gas Sensors
MI-WeA
Investigation of Magnon Generation by a dc Current through a Point Contact/Magnetic Multilayer Junction
Mechanical Detection of Ferromagnetic Resonance in Micron-size YIG Disk
Spin Wave Dynamics in Structured Magnetic Media
Spin Wave Excitations by Low Energy Electrons in Fe
Dynamical Investigation of Transient Magnetic Anisotropy in Ni80Fe20
A New Equation for Magnetization Dynamics Based Upon Transverse Relaxation Processes
NS+
Recent Development in Nanoimprinting Lithography
Fabrication of Molecular Nanostructures by Scanning Near-Field Optical Lithography
Photoinduced Anisotropy of Second-Harmonic Generation from Azobenzene-Modified Alkylsiloxane Monolayers
Nanostructuring of Hydrogenated Silicon Surfaces by Electron Beam Irradiation of Self-assembled Hydroxybiphenyl Monolayers
Electrode Modification by Electron-induced Patterning of Self-assembled Monolayers
Electrochemically Controlled Film Formation of Self-assembled Monolayers of Biphenyl-based Thiols
Modification of Self-assembled Monolayers by Free Radical-dominant Plasma: The Effect of the Chain Length and the Substrate
OF+
Recent Developments in Organic Optoelectronics
Electron Transport in Platinum Complex Molecules: An Approach to Molecular Electronics
Organic Light-Emitting Diodes and Solar Cells with Electrically Doped Transport Layers
Understanding Charge Transport Across Metal-Molecule-Metal Junctions
Zero-bias Anomaly in Molecular Monolayer Tunneling
Lateral Confinement of Interfacial Electrons by a Surface Dipole Lattice
Measurement of the Site Specific PDOS of Organic Electronic Materials via Soft X-ray Emission Spectroscopy1
PS+
Application of Plasma in Tissue Engineering
Can Plasma Polymerised Surfaces Promote the Co-culture of Human Dermal Fibroblasts and Human Epidermal Keratinocytes in the Tissue Engineering of Skin?
The Role of Reactive Neutral and Ionic Species in the Deposition of Organic Thin Films from an Isopropyl Alcohol and Argon Plasma
Plasma Micropatterning for the Spatially Controlled Adsorption of Proteins
Chemical Surface Micropatterning by Plasma and VUV Photochemical Modification of Polymers for Controlled Cell Culture.
Study of Adhesion Mechanism of Protein-based Hydrogel to Plasma Treated Polymer Surface
Permanent Hydrophilic Modification of Porous Membranes Using Low-Temperature Plasmas
Acrylic Acid Films Deposition by RF PACVD: Relation between Monomer Fragmentation and Surface Properties
PS+
Plasma Molding Over Trenches and Resulting Ion/Fast-neutral Distribution Functions
Physically Based Modelling of High-Density-Plasma-CVD on the Feature Scale
Micro- and Nano-Fabrication Technology for High Aspect Ratio Micro-Electromechanical Systems (MEMS)
Critical Tasks in the High Aspect Ratio Silicon Dry Etching for MEMS
Deep Silicon Etch Profile Control for Micro-Sensor Applications
Profile Control as a Function of Process Parameters in Deep Anisotropic Etching of Silicon
Mechanisms Involved in the Silicon Cryogenic Etching Process
3-Dimensional Feature Profile Evolution Using Level Set Methods
SS1-WeA
Interaction of Gas-phase H Atom with Metal Surfaces : Cu(111) vs Pt(111)
Anomalous Reactive Scattering: Hyperthermal Energy Collisions of State-selected Bromine Ions on Pt(111)
Hyperthermal Ejection of Atomic Cl from the Reaction of Cl2 on the Al(111) Surface: Evidence of a Nonadiabatic Electron Harpooning Mechanism
Degradation of Alkanethiol Self Assembled Monolayers under Hyperthermal O+ Bombardment
Charge Transfer in Low Energy Li Ion Scattering from Halogen-covered Metal Surfaces
Adsorption and Radiation Induced Decomposition of SF6 on Ru(0001)
Dynamical Behaviors of GaCl on GaAs Surfaces by Pulsed Molecular Beam Scattering
A New Mechanism for Ion-Stimulated Surface Processes at Low Energies
Photochemistry of Caged Molecules: CD3Cl in Ice
SS2-WeA
Real Time Monitoring of the Structure and Morphology of Growing Nanoparticles by Grazing Incidence Small and Wide Angle X-ray Scattering, in situ, in UHV
Structural Analysis of Quasicrystalline Al-Pd-Mn using Angle-Resolved Low Energy Ion Scattering
Structural Studies of Ti/Pt(111) Surfaces
Thermal Stability of Thin Ti Films on Al Single Crystal Surfaces1
Nucleation and Growth of Ag Films on a Quasicrystalline AlPdMn Surface
Helium Atom Scattering Studies of Si-Cu (001) and Sn-Cu (001) Surface Alloys
Growth and O2 Reactivity of the Cu/Si(5 5 12) System
NIXSW Analysis of the Disorder Transition of Chlorine on Cu(111)
Vibrations of Water Adsorbed on Ru(0001)1
TF-WeA
Influence of Film Roughness on the Electrical Properties of W / Al2O3 Films Grown on Si(100) by Atomic Layer Deposition
Growth and Structure of Al2O3/W Nanolaminates Fabricated Using Atomic Layer Deposition Techniques
Examination of New ALD Processes for Microelectronics
Temperature Effects during Quartz-crystal Microbalance Measurements of Thin Film Growth during Atomic Layer Deposition
Atomic Layer Deposition of Tribological Coatings for MEMS Devices
Conformal Coating of Ultrahigh Aspect Ratio Anodic Alumina Membranes by Atomic Layer Deposition
Low Temperature Al2O3 Atomic Layer Deposition
Theoretical and Experimental Investigation of Atomic Layer Deposition of Copper(I) Oxide
VT-WeA
Eight Unconventional Gauges: A User's Impressions
The Effect of Ambient Temperature on the Sensitivity of Hot-Cathode Ionization Gauges
The Method of Calibrating and Adjusting Sensitivity of Mass Spectrometer
Using DeviceNet for Improved Vacuum Monitoring
Closed Loop Process Control for Reactive Sputter Deposition of Dielectric Films
Soft LaserBellows
An Ultra-sensitive Leak Detection and Calibration System
A Compact Leak Rate Calibration System for Both Pressure and Vacuum Modes
Sessions | Time Periods | Topics | Schedule Overview