AVS2002 Thursday Afternoon

Transferring Classical UHV Techniques into Ambient Pressure - Is the Gap Bridged for Electrons?

Plan to Maximise Information Retrieval from the XPS Survey Scan

Real World Surface Analysis

Nanoscale Tomography with the Focused Ion Beam

Electromigration Behavior of Single Crystal Copper

XPS Analysis under External DC and AC Bias

Analysis of Cell Adhesion Strengthening Using Micropatterned Substrates

Micropatterning of Polymer Surfaces for Controlled Cell Adhesion and Spreading Processes

Designing In Vitro Patterned Neuronal Networks

Development of a High Throughput Cell Printing Platform

Spatially Patterned Tissue for Retinal Cell Transplantation

Synaptic Connectivity in Geometrically Defined Neuronal Networks

Oral Keratinocyte Attachment to Chemical Surfaces

The Adaptation of Hydrogel Scaffolds to Three Dimensional Tissue Construction of Cylindrical Vessels

Integration of Cells and Silicon Devices via Surface Microengineering

Plasma Etch Processes for Ferroelectric Memory Integration

Electrical Properties of the Bi_4-xLa_xTi₃O₁₂ Films Etched in Cl₂/Ar Inductively

Formation of Al Oxynitride Alloys by Low-temperature Remote Plasma Nitridation

Heterostructured Cu-Based Electrode for High-Dielectric Constant Oxide Thin Film Devices

Investigation of the Interfacial Region of (Ba,Sr)TiO₃ Thin Films Deposited on Pt Substrates by MOCVD

Reduction of the k Value of the Low k Polyimide Film by Plasma Hydrogenation

Materials Transformation and Kinetics in the Formation of Porous Low-K Polymer Dielectrics for Advanced Interconnect Technology

Fluorinated Amorphous Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition for Solar Cell Applications

Dopant Penetration Studies in Hf Based Gate Dielectrics from Doped Polysilicon Films: Effect of Nitrogen in Penetration Robustness

Nanoporous MSSQ Films Characterised by Surface Acoustic Wave Spectroscopy and Brillouin Light Scattering

Atomic-scale Surface Magnetic Structures of Mn₃N₂ Observed by Spin-polarized Scanning Tunneling Microscopy

Spin-Orbit Effects on Fe/W(110) Revealed by Scanning Tunneling Spectroscopy

Magnetic Imaging and Spectroscopy of Fe_xNi_(1-x) Thin Films on Cu(111)

Falicov Award Presentation

Magnetic Resonance Force Microscopy at Millikelvin Temperatures

Magnetic Force Microscopy Study of Various Lithography Patterned Magnet Arrays

Magnetic Dipoles in Patterned Magnetic Metal Dot Arrays

Addressing MEMS Reliability Through Innovative Fabrication, Integration, and Packaging Techniques

Development of Individually Addressable Micro-Mirror-Array for Space Applications

Transformer Coupled Plasma Etching of Polycrystalline 3C-SiC Films for MEMS Applications

MEMS-based Gray-scale Technology

Thick and Thermally Isolated Si Microheaters for Preconcentrators

Silicon Nitride Micromesh Bolometric Detectors for Planck

Piezoelectric MEMS for RF Filter Applications

Micro-Thermal Conductivity Detector for Chemical Sensing

Biofunctionalized Nanowires for Biosensing and Assembly

Aligned Dielectrophoretic and Electrophoretic Deposition of Single Wall Carbon Nanotubes

Functionalizing Molecular Lines on H-Si(100)

Growth, Properties and Applications of Semiconductor Nanowires¹

Metal-Catalyzed Nanowires for Integrated Devices and Interconnections

Gadolinium Silicide on Si(100)

Atomic Structure and Electronic Properties of Rare Earth Silicide Epitaxial Nanowires on Si(001)

Fabrication of Low-dimensional Nanostructured Substrates

Tunable Microfluidic Optical Systems

A New Generation of Plastic Optical Fiber

Influence of Ge Content and Process Parameters on the Optical Quality of Low Temperature PECVD Deposited Silica Waveguides

High Density Plasma Enhanced Chemical Vapor Deposition of SiOxNy for Optical Applications: Influence of Process Parameters

Nanoscale Electron Beam Stimulated Processing

Electron Beam Patterning with Carboneous Contamination Rezists below 10 nm Linewidth

A Study of PMMA EBL Cross-sections Prepared by a Novel Process

Nanometer Scale Patterning of Dielectric Surfaces with Combined Electron/laser Beams and Chemical Exposure

Field Emitter Arrays with Sharp Tips for THz Microwave Source

Structure and Field Emission Properties of SiC Nanotip Arrays Fabricated by Electron-cyclotron-resonance Plasma Process of Monolithic Si Wafer

Field Emission from Well-Aligned Heterojunctions of Carbon Nanotubes and Silicon Nanowires

Evolution of Surface Morphology and Microstructure during Ion Sputtering of Diamond

Nanoscale Morphology Control Using Ion Beams

Etching Reaction Mechanism of Organic Low-k Dielectric Employing High-Density Plasmas and Multi-Beams

Modeling Dual Inlaid Feature Construction

Profile Evolution During Fluorocarbon Plasma Etching of Low-k Porous Silica¹

The Effect of Aspect Ratio on the Etching Properties of Porous Low-k Material in Fluorocarbon Plasma

Etching of Porous Low-K Dielectric Films in Fluorocarbon Plasmas

Plasma Etching Chemistry and Kinetics for Low-k and Porous Low-k Dielectric Films

In Situ Real Time Monitoring of Evaporation Induced Self-Assembly and Patterned Etching of Low-k Mesoporous SiO₂ in Fluorocarbon Plasmas

The Control of the Etching of SiOCH Films using C₄F₈/Ar/N₂ Plasma

SiO₂ Etch Lag in SiO₂/SiLK^TM/SiO₂ Stack Structures

Etch Process Development of Porous Low-k Dielectrics for Dual Damascene Copper Interconnects

QCM-STM Studies of the Nanoscale Dynamics of "Model-System" and "Real-World" Lubricants

A Quantitative Study of the Mechanical and Adhesive Origin of Molecular-Level Friction

Frictional Anisotropy at Crystalline Interfaces

Nanopormorphism of C60 and Hydrocarbons on Metal Surfaces

Tribochemical Wear of Silicon Nitride on Oxide Surfaces Studied by Atomic Force Microscopy

Adhesion Sensor: Non-Contact AFM for Quantitative Adhesion Measurements

The Frictional Behavior of a Hertzian Contact Analyzed using a New Contact Mechanical Model

Epitaxial Growth Dynamics of Semiconductor Quantum Dot Structures

Si Deposition on H-terminated Si(100) Surfaces^*

An Atom-Resolved Study of Vacancy Dynamics and Surface Roughening on Bromine-Etched Si(100) Surfaces

Dynamics of Si(100)-(2x1) Surface Modification with Cl

Surface Modification without Desorption: Recycling of Cl on Si(100)-(2x1)

Spontaneous Roughening -- Fundamental Limits in Si(100) Halogen Etch Processing

Preparation of Atomically Flat Si(100) Surface by Ion Etching

Probing the Chemistry of Impurities with STM: The Profound Effect of Dissolved Oxygen on Silicon Etching

Oxidation of InP, Si and SiC Surfaces

The Kinetics of Ultrathin Aluminum Oxide Film Growth on Aluminides

Stability of Hafnium Oxide and Silicate Ultrathin Films on Si

Electrical and Physical Properties of Very Thin, Nearly Epitaxial Cu (100) Sputter-deposited at Room Temperature

Epitaxial Growth of Au and Ag Films on Si(111) using Cu Buffer Layers

Ag Ultra Thin Film Stability on GaAs (110): An ab-initio Study

Synthesis of Ultrasmooth CN_x Overcoats for 1 Tb/in² Magnetic Storage Applications

Ultra-thin Silicon- and Aluminum Oxides on Silicon formed Layer-by-layer

Characterization of Ultra-Thin Films using Angle Resolved XPS and Maximum Entropy Methods