AVS2002 Thursday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Thursday, November 7, 2002
2:00 PM 3:00 PM 4:00 PM 5:00 PM
AS-ThA
Transferring Classical UHV Techniques into Ambient Pressure - Is the Gap Bridged for Electrons?
Plan to Maximise Information Retrieval from the XPS Survey Scan
Real World Surface Analysis
Nanoscale Tomography with the Focused Ion Beam
Electromigration Behavior of Single Crystal Copper
XPS Analysis under External DC and AC Bias
BI-ThA
Analysis of Cell Adhesion Strengthening Using Micropatterned Substrates
Micropatterning of Polymer Surfaces for Controlled Cell Adhesion and Spreading Processes
Designing In Vitro Patterned Neuronal Networks
Development of a High Throughput Cell Printing Platform
Spatially Patterned Tissue for Retinal Cell Transplantation
Synaptic Connectivity in Geometrically Defined Neuronal Networks
Oral Keratinocyte Attachment to Chemical Surfaces
The Adaptation of Hydrogel Scaffolds to Three Dimensional Tissue Construction of Cylindrical Vessels
Integration of Cells and Silicon Devices via Surface Microengineering
DI+
Plasma Etch Processes for Ferroelectric Memory Integration
Electrical Properties of the Bi4-xLaxTi3O12 Films Etched in Cl2/Ar Inductively
Formation of Al Oxynitride Alloys by Low-temperature Remote Plasma Nitridation
Heterostructured Cu-Based Electrode for High-Dielectric Constant Oxide Thin Film Devices
Investigation of the Interfacial Region of (Ba,Sr)TiO3 Thin Films Deposited on Pt Substrates by MOCVD
Reduction of the k Value of the Low k Polyimide Film by Plasma Hydrogenation
Materials Transformation and Kinetics in the Formation of Porous Low-K Polymer Dielectrics for Advanced Interconnect Technology
Fluorinated Amorphous Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition for Solar Cell Applications
Dopant Penetration Studies in Hf Based Gate Dielectrics from Doped Polysilicon Films: Effect of Nitrogen in Penetration Robustness
Nanoporous MSSQ Films Characterised by Surface Acoustic Wave Spectroscopy and Brillouin Light Scattering
MI+
Atomic-scale Surface Magnetic Structures of Mn3N2 Observed by Spin-polarized Scanning Tunneling Microscopy
Spin-Orbit Effects on Fe/W(110) Revealed by Scanning Tunneling Spectroscopy
Magnetic Imaging and Spectroscopy of FexNi(1-x) Thin Films on Cu(111)
Falicov Award Presentation
Magnetic Resonance Force Microscopy at Millikelvin Temperatures
Magnetic Force Microscopy Study of Various Lithography Patterned Magnet Arrays
Magnetic Dipoles in Patterned Magnetic Metal Dot Arrays
MM-ThA
Addressing MEMS Reliability Through Innovative Fabrication, Integration, and Packaging Techniques
Development of Individually Addressable Micro-Mirror-Array for Space Applications
Transformer Coupled Plasma Etching of Polycrystalline 3C-SiC Films for MEMS Applications
MEMS-based Gray-scale Technology
Thick and Thermally Isolated Si Microheaters for Preconcentrators
Silicon Nitride Micromesh Bolometric Detectors for Planck
Piezoelectric MEMS for RF Filter Applications
Micro-Thermal Conductivity Detector for Chemical Sensing
NS-ThA
Biofunctionalized Nanowires for Biosensing and Assembly
Aligned Dielectrophoretic and Electrophoretic Deposition of Single Wall Carbon Nanotubes
Functionalizing Molecular Lines on H-Si(100)
Growth, Properties and Applications of Semiconductor Nanowires1
Metal-Catalyzed Nanowires for Integrated Devices and Interconnections
Gadolinium Silicide on Si(100)
Atomic Structure and Electronic Properties of Rare Earth Silicide Epitaxial Nanowires on Si(001)
Fabrication of Low-dimensional Nanostructured Substrates
PH-ThA
Tunable Microfluidic Optical Systems
A New Generation of Plastic Optical Fiber
Influence of Ge Content and Process Parameters on the Optical Quality of Low Temperature PECVD Deposited Silica Waveguides
High Density Plasma Enhanced Chemical Vapor Deposition of SiOxNy for Optical Applications: Influence of Process Parameters
PN-ThA
Nanoscale Electron Beam Stimulated Processing
Electron Beam Patterning with Carboneous Contamination Rezists below 10 nm Linewidth
A Study of PMMA EBL Cross-sections Prepared by a Novel Process
Nanometer Scale Patterning of Dielectric Surfaces with Combined Electron/laser Beams and Chemical Exposure
Field Emitter Arrays with Sharp Tips for THz Microwave Source
Structure and Field Emission Properties of SiC Nanotip Arrays Fabricated by Electron-cyclotron-resonance Plasma Process of Monolithic Si Wafer
Field Emission from Well-Aligned Heterojunctions of Carbon Nanotubes and Silicon Nanowires
Evolution of Surface Morphology and Microstructure during Ion Sputtering of Diamond
Nanoscale Morphology Control Using Ion Beams
PS-ThA
Etching Reaction Mechanism of Organic Low-k Dielectric Employing High-Density Plasmas and Multi-Beams
Modeling Dual Inlaid Feature Construction
Profile Evolution During Fluorocarbon Plasma Etching of Low-k Porous Silica1
The Effect of Aspect Ratio on the Etching Properties of Porous Low-k Material in Fluorocarbon Plasma
Etching of Porous Low-K Dielectric Films in Fluorocarbon Plasmas
Plasma Etching Chemistry and Kinetics for Low-k and Porous Low-k Dielectric Films
In Situ Real Time Monitoring of Evaporation Induced Self-Assembly and Patterned Etching of Low-k Mesoporous SiO2 in Fluorocarbon Plasmas
The Control of the Etching of SiOCH Films using C4F8/Ar/N2 Plasma
SiO2 Etch Lag in SiO2/SiLKTM/SiO2 Stack Structures
Etch Process Development of Porous Low-k Dielectrics for Dual Damascene Copper Interconnects
SS-ThA
QCM-STM Studies of the Nanoscale Dynamics of "Model-System" and "Real-World" Lubricants
A Quantitative Study of the Mechanical and Adhesive Origin of Molecular-Level Friction
Frictional Anisotropy at Crystalline Interfaces
Nanopormorphism of C60 and Hydrocarbons on Metal Surfaces
Tribochemical Wear of Silicon Nitride on Oxide Surfaces Studied by Atomic Force Microscopy
Adhesion Sensor: Non-Contact AFM for Quantitative Adhesion Measurements
The Frictional Behavior of a Hertzian Contact Analyzed using a New Contact Mechanical Model
SS+
Epitaxial Growth Dynamics of Semiconductor Quantum Dot Structures
Si Deposition on H-terminated Si(100) Surfaces*
An Atom-Resolved Study of Vacancy Dynamics and Surface Roughening on Bromine-Etched Si(100) Surfaces
Dynamics of Si(100)-(2x1) Surface Modification with Cl
Surface Modification without Desorption: Recycling of Cl on Si(100)-(2x1)
Spontaneous Roughening -- Fundamental Limits in Si(100) Halogen Etch Processing
Preparation of Atomically Flat Si(100) Surface by Ion Etching
Probing the Chemistry of Impurities with STM: The Profound Effect of Dissolved Oxygen on Silicon Etching
TF-ThA
Oxidation of InP, Si and SiC Surfaces
The Kinetics of Ultrathin Aluminum Oxide Film Growth on Aluminides
Stability of Hafnium Oxide and Silicate Ultrathin Films on Si
Electrical and Physical Properties of Very Thin, Nearly Epitaxial Cu (100) Sputter-deposited at Room Temperature
Epitaxial Growth of Au and Ag Films on Si(111) using Cu Buffer Layers
Ag Ultra Thin Film Stability on GaAs (110): An ab-initio Study
Synthesis of Ultrasmooth CNx Overcoats for 1 Tb/in2 Magnetic Storage Applications
Ultra-thin Silicon- and Aluminum Oxides on Silicon formed Layer-by-layer
Characterization of Ultra-Thin Films using Angle Resolved XPS and Maximum Entropy Methods
Sessions | Time Periods | Topics | Schedule Overview