AVS2000 Plasma Science and Technology Sessions
Click a Session Code to view its Abstracts
Topics | Time Periods | Schedule Overview
| Session Code | Start | Session Name |
|---|---|---|
| PS-MoM | Monday, October 2, 2000 8:20 AM | Plasma-Surface Interactions I |
| PS1-MoA | Monday, October 2, 2000 2:00 PM | Emerging Plasma Applications |
| PS2-MoA | Monday, October 2, 2000 2:00 PM | Plasma Etching of Conductors |
| PS-TuM | Tuesday, October 3, 2000 8:20 AM | Modeling of Plasma Processes |
| PS2-TuA | Tuesday, October 3, 2000 2:00 PM | Plasma Diagnostics I |
| PS-TuP | Tuesday, October 3, 2000 5:30 PM | Poster Session |
| PS+MS-WeM | Wednesday, October 4, 2000 8:20 AM | Plasma-Induced Damage |
| PS-WeP | Wednesday, October 4, 2000 11:00 AM | Poster Session |
| PS1+MS-WeA | Wednesday, October 4, 2000 2:00 PM | Sensors and Control in Plasma Processing |
| PS2-WeA | Wednesday, October 4, 2000 2:00 PM | Feature Evolution |
| PS1+TF+SE-ThM | Thursday, October 5, 2000 8:20 AM | Fundamentals of Plasma Enhanced Chemical Vapor Deposition |
| PS2-ThM | Thursday, October 5, 2000 8:20 AM | Plasma Diagnostics II |
| PS1-ThA | Thursday, October 5, 2000 2:00 PM | Plasma-Surface Interactions II |
| PS2-ThA | Thursday, October 5, 2000 2:00 PM | Dielectrics I |
| PS-FrM | Friday, October 6, 2000 8:20 AM | Dielectrics II |