AVS1999 Tuesday Afternoon

Sessions | Time Periods | Topics | Schedule Overview

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Session Tuesday, October 26, 1999
2:00 PM 3:00 PM 4:00 PM 5:00 PM
AS-TuA
A Microscopic View of Energetic Desorption Events
Theory of Multi-Atom Resonant Photoemission
Oxide-free Phosphate Films on Metals probed by Core and Valence Band X-Ray Photoelectron Spectroscopic Studies in an Anaerobic Cell
Spatial Resolution in Scanning Auger Microanalysis of Complex Systems
Atomic Level Characterization of Metal-Ceramic Interface Energetics and Dynamics via Ab Initio Methods
Surface Science Studies of Model Ziegler-Natta Polymerization Catalysts
Dynamic Monte Carlo Simulations of Catalytic Surface Reactions: CO + NO on Rhodium
BI-TuA
Surface Characterization of Biomaterials with Protein Layers
Surface-plasmon Field-enhanced Fluorescence Spectroscopy and -Microscopy for the Evaluation of the Hybridization Reaction of Oligonucleotides
Characterization of Supported Biomimetic Films Using Broadband Vibrationally Resonant Sum-Frequency Generation
Biosensors in Biomaterials Research
Direct Probing of the Surface Ultrastructure and Molecular Interactions of Living Microbial Cells with Atomic Force Microscopy
Contact Mechanical Properties of Confined NIPAM Films at the Biomaterial Interfaces
Novel Biomaterials through Tailoring of Solid Surfaces
Photoisomerization and Photo-induced Alignment of Ordered Polymer Ultrathin Films Containing DNA and Polypeptide Layers: Possibilities for Optobioelectronic Substrates
EM-TuA
Challenges in Gate Dielectric Scaling
Investigation of Titanium Nitride Gates for Tantalum Pentoxide and Titanium Dioxide Dielectrics
Separate and Independent Reductions in Direct Tunneling in Oxide/Nitride Stacks with Monolayer Interface Nitridation Associated with the i) Interface Nitridation and ii) Increased Physical Thickness
High K Gate Dielectrics for Sub-100nm CMOS
Evidence of Aluminum Silicate Formation at the Al2O3/Si Interface for Thermal and Plasma Enhanced Chemical Vapor Deposited Al2O3 Thin Films
Thermally Grown Gate Insulators for Heterostructure p-MOSFETs
Deposition of ZrO2/SiO2 Alloys by 300° Remote Plasma Processing for Alternative High-K Gate Dielectrics in Aggressively Scaled CMOS Devices
FP+
Nanoprobing Electrical Transport in Organic Semiconductors
Photolithographically Defined Pentacene Thin Film Transistors on Flexible Plastic Substrates
Reduced Process Complexity Organic Thin Film Transistors
Soft Lithographic Patterning and Low Temperature Film Deposition: Methods to Fabricate Amorphous Silicon Thin Film Transistors at Low Temperature
Low Damage Etching Utilizing Activated Hydrogen Beam for ITO Transparent Electrode in Flat Panel Display
Excimer Laser Processing for a-Si and poly-Si Thin Film Transistors for Imager Applications
Solid-phase Crystallization of Hydrogenated Amorphous Silicon-Germanium Alloy Films
MI-TuA
Electronic Structure of Single Crystal CrO2
Underlying Simplicity of Magnetic Dichroism in the Photoelectron Spectroscopy of Gd
Element-Resolved Magnetism Using Core-Resonant Magneto-Optical Techniques
Interatomic Effects in Resonant Photoemission in Fe/Cr Alloys and Bilayers
Dispersions of Metallic Quantum Well States in the Cu/fccM(100) [M = Ni, Co, Fe] Systems
Photoemission Study of Pseudomorphic FexNi1-x and CoxNi1-x Films on Cu(100)
Magnetic Properties of Fe-based Alloys
MS-TuA
CD Control Optimization Methodology on Shallow Trench Isolation Substrate for Sub-0.25µm Technology Gate Patterning
Patterning of Xerogel in High Density Fluorocarbon Plasmas
Surface Science of Tungsten CMP Removal
Yield Improvement Through Multizone Uniformity Control of a CMP Process Utilizing a Pre and Post-Measurement Strategy
Modeling, A Tool for Technology Development
Simulations of TiN Barrier Films Deposited by I-PVD on High Aspect Ratio Features: Macrostructure and Composition
Investigation of Si and SiO2 Etch Mechanisms Using an Integrated Surface Kinetics Model1
Design of a Dual Frequency PECVD Reactor for Advanced Integrated Circuits Processing
NS-TuA
Size, Shape, Strain, and Composition Inhomogeneities of In0.5Ga0.5As QDs Grown by Migration Enhanced Epitaxy
Cross-Sectional Scanning Tunneling Microscopy as a Probe of Atomic-Scale Order in MOVPE Grown GaInP1
Interpreting Atomic-Scale Structure in Cross-Sectional STM Images of III-V Superlattices
The Importance of Many-body Effects in the Clustering of Charged Zn Dopant Atoms in GaAs
New Methods to Measure Electrical, Optical, and Magnetic Properties on the Nanometer Scale
Field Dependent Electric Potential Gradients at Atomically Abrupt Oxide Interfaces
Dynamics of Adsorbate Islands with Nanoscale Spacial Resolution: (OH)n Formation during the NO/H2 Reaction on Pt(001)
Measuring Average Tip-sample Forces in Intermittent-contact (Tapping) Force Microscopy in Air
Imaging the Near-field Intensity Gradients with a Tapping-mode Near-field Scanning Optical Microscope
OE+
Tailoring of Properties of Organic Thin Films by Interface Control
Ordering in Two Dimensions - Phthalocyanines, Perylenes, and Related Molecular Thin Films
Influence of Steps on the Orientation of Monolayer Films of Copper Phthalocyanine (CuPc) on Au(111)
Growth Modes of N,N'-bis-(1-naphthyl)-N,N'-diphenyl1-1,1-biphenyl1-4,4'-Diamine on Standard and Ultra-flat Indium Tin Oxide
Self-Assembled Monolayers on Indium Tin Oxide
Mechanism of Formation of Self-Assembled n-Octadecylsilane Monolayers on Indium-Tin-Oxide
Growth and Characterization of Poly(arylamine) Thin Films Prepared by Vapor Deposition
HREELS Study of Ultra-thin Polyaniline Films Grown on Cu(110) by Vapor Deposition of Aniline Tetramers
PS-TuA
Infrared and Microwave Absorption Diagnostics of Plasmas for Silicon Oxide Etching and Deposition
Thomson Scattering with Gated Intensified CCD Detectors for Diagnostic of rf Discharge Plasmas
Determination of Electron Temperatures and Species Concentrations During Aluminum Etching
Peter Mark Memorial Award Address
Cavity Ring Down Spectroscopy for the Detection of Hydrocarbon Radicals during a-C:H Deposition
Characterization of Transformer Coupled Oxygen Plasmas by Trace Rare Gas-Optical Emission Spectroscopy and Langmuir Probe Analysis
Diagnostics of Large-area Plasma Produced by Surface Waves on a Metal Wall with Periodicity
UV Absorption Spectroscopy of Pulsed Fluorocarbon Plasmas
SS1+
Noncommutative Band Offset at α-Cr2O3/α-Fe2O3(0001) Heterojunctions
Ultrathin Iron Oxide Films
Islanding, Facetting, and the Lattice Relaxation in the Growth of α-Fe2O3 on α-Al2O3
Surface Reconstructions of Fe3O4(001)
The Surface Structure of α-Al2O3(0001) Studied by LEED
Formation of Epitaxial Al2O3 on Ni3Al(111) Studied by STM, HREELS, UPS, ΔΦ, and LEED
Surface Structure Determination of Yttrium-Stabilized ZrO2(001) Surface Using X-Ray Photoelectron Diffraction
Epitaxial Growth and Characterization of Zirconium-Doped CeO2(111) Thin Films on Yttria-Stabilized Zirconia(111)
Structure and Dynamics of KTaO3(001) via Elastic and Inelastic Helium Atom Scattering1
Deposition of Highly Oriented Mg3(VO4)2 Thin Films for Use in Catalysis Studies
SS2+
Medard W. Welch Award Address: Halogen Etching of Si with Emphasis on Atomic-Scale Processes
Micrometer-scale "Grooves" and Step Bunching during Extended Oxidation-induced Etching of Si(001) Surfaces
The Structure of Steps on Hydrogen-Passivated Si Surfaces
Microscopy of Si(001) Surface Defects Produced by keV He Ion Irradiation at Low Temperatures
A Variable Temperature Scanning Tunnelling Microscopy Study of Si(100) Etching Dynamics
Dissociative Adsorption and Recombinative Desorption of H2 on Si(100)-2x1
Novel Mechanisms for Plasma Etch Front and CVD (Chemical Vapor Deposition) Growth Front Roughening
Resonance-Enhanced Multiphoton Ionization Studies of the Etching of Silicon by Molecular Chlorine
Femtosecond Photo-induced Dynamics on a Cleaned and a Chlorinated Si(111) Surfaces
SS3-TuA
Mechanisms and Energetics in Diffusion of O2-Molecules and H-atoms on Si(1x1)-7x7 Surfaces
Real-Time Imaging of Step Motion on Cu(100) with the Low Energy Electron Microscope1
Diffusion and Dynamics of 2D Clusters on Crystal Surfaces
Sulfur's Effect on Cu(111) Surface Morphology
Influence of Adsorbates on the Self-diffusion of Pt Adatoms and the Stability of Pt Dimers
Study of Subsurface Hydrogen in Pd(111) by STM
Enhanced Interlayer Mass Transport and Dynamics of Film Smoothening on a Symmetry-broken Ag(111) Surface
Ion-Enhanced Surface Diffusion: Experiment and Simulation
The Effect of As4 Flux on the Ga Diffusion on the GaAs(001)-(2x4) Surface
TF-TuA
Preparation of Co and CoNx Thin Films by Unbalanced r.f. Magnetron Sputtering
Microstructural Control of Thin Silicon Films Grown by Reactive Magnetron Sputtering Utilizing Low Energy Ion Bombardment
PVD of Thin Film Silicon: How Fast Light Atom and Slow Heavy Ion Bombardment During Growth Promote Low-Temperature Crystallinity
Deposition Behavior and Film Characteristics of Aluminum Oxide Deposited using High Frequency Pulsed-DC Magnetron Reactive Sputtering
AC Reactive Sputtering of Dielectric Films using a Dual Magnetron
Characterization Studies of Reactively Pulsed Magnetron Sputtered Alumina Films
Change in Surface Roughness with the Thickness of TiO2 Film Grown on MgO(001) by Ar-ion Beam Sputtering
Chemical Vapor Deposition of Alpha Aluminum Oxide for High Temperature Aerospace Sensors
Phase Development of Radio Frequency Magnetron Sputter Deposited Pb(Mg1/3Nb2/3)O3-PbTiO3 (90/10) Thin Films
VM+
Ultra Thin DLC Film as Magnetic Disks Overcoat
Tribological Properties of Protective Carbon Coatings Used in Magnetic Storage Devices Investigated on a Sub-Nanometer Scale
Ultrathin Overcoats For Magnetic Media: Is Hardness What We Are Looking For ?
Air Bearing Collision Dynamics
Interaction of Fluoroalcohols and Fluoroethers with Various Types of Carbon Overcoats
Angle Resolved ESCA Methods: Molecular Conformation of Fluorocarbon Lubricant
Airbearing Designs for High Density Recording
VT-TuA
Vacuum Systems, Deposition Sources, Measurement and Control Tools for the Semiconductor Industry (1950-1975)
Evolution of Integrated Circuit Vacuum Processes: 1962-1975
History of Plasma Ashing and Plasma Etching in the Semiconductor Industry from 1950 to 1975
History of Commercial Ion Implantation
Application of Sub-atmospheric Plasmas to Semiconductor Device Processing
Refining Old Vacuum Knowledge for Today's Semiconductor Manufacturing Processes
Sessions | Time Periods | Topics | Schedule Overview