AVS1999 Thursday Afternoon

Conformation and Orientation Effects in the XPS Spectra of Thin Polymer Films

Correlative XPS and FTIR Imaging Analysis of Polymer Blends

Beam Induced Damage Effects in XPS Studies of Thin Organic Films

Surface Analysis of Nitrogen Plasma-Treated Poly (ethylene-2,6-naphthalate) Films using XPS and Gas Phase Derivatization Reactions

Quantitative Analysis of Functional Groups with TOF-SIMS

Determination of Helical Conformation Effects in PTFE NEXAFS Spectra with FEFF8 Calculations

Monitoring the Kinetics of Migration/ Absorption/ Desorption/ and Cross-linking in a Curing Silicone Coating, using the QCM-D Technique

Angle Resolved XPS Study of Random Fluoro-methacrylate Copolymers

Surface Analysis Characterization of Titanium/Sol-Gel/Polyimide Adhesive Systems

Surface Chemical Changes during Cu Chemical Mechanical Polishing

Effect of Thin Film Properties on Copper Removal in CMP

Damascene Patterning of Advanced Interconnect Structures

Tungsten CMP Process Post Tungsten Etch Back Process to Improve the Reliability for Sub-Micron Device Technology

Etching and Cleaning of Silicon Wafers using HF Vapor Process in the Monolayer Etching Regime

Chlorosilane Treatment of SiO₂-Covered Si Surfaces for Modification of their Chemical Reactivity in Si CVD

The Passivation of Si(100)-2x1 with Alcohols

Silicon Carbide: Material of the 21st Century?

Characterization of PECVD SiC and its Application in Advanced Reticle Technology-SCALPEL Membrane

Contact Properties of Cerium Ultrathin Film on SiC

A Thermodynamic Analysis of Silicide and Carbide Formation and Stability of W, Co, V, and Zr Thin Films on Single-Crystal SiC

Deposition of Yttrium Oxide by Yttrium Sputter/Thermal Oxidation and Reactive Sputtering for Advanced High k Gate Dielectrics

Bi₄Ti₃O₁₂ Ferroelectric Thin Films Deposited on Silicon by Pulse Injection Metal-Organic Chemical Vapor Deposition

Film-Formation Mechanisms and Step Coverage of (Ba,Sr)TiO₃ Films Grown by MOCVD

Anhydrous Zirconium (IV) Nitrate as a CVD Precursor for ZrO₂

A New Approach for the Fabrication of Device-Quality Ge/GeO₂/SiO₂ Interfaces Using Low Temperature Remote Plasma Processing

Cryogenic Magnetic Force Microscopy Instrumentation

Modified Tips for High Resolution In-plane Magnetic Force Microscopy

Progress Toward Achieving Single-Spin Force Detection

Magnetic Imaging by Spin-polarized Scanning Tunneling Microscopy

Spin-Polarized Scanning Tunneling Spectroscopy: Magnetic Domain Imaging and Beyond

Scanning-aperture Photo-emission Microscope for Magnetic Imaging

Magnetic and Chemical Microanalysis Using SEMPA and SAM

Low Temperature Magnetic Domain Imaging with Spin Polarized Low Energy Electron Microscopy

Ballistic Electron Magnetic Microscopy: Imaging Magnetic Domains with Nanometer Resolution

Quadrupole Mass Spectrometry using MEMS

Miniaturizing an Ultra-High Vacuum Orbitron Pump

Scaling and Microfabricating a Low-Pressure Inductively Coupled Plasma Source

Design and Fabrication of an Electromagnetically Driven Microvalve for Micro Total Analysis Systems

MEMS Micro-Valve for Space Applications

Compact Fiber-Optic Pressure Sensors Using Microfabricated Sensing Membranes

Opportunities and Challenges for Nanotubes in Future Integrated Circuits

Simulations of Plasticity and Kink Catalyzed Functionalization of C and BN Nanotubes

Nanoindentation and Nanotribology with Carbon Nanotubes

Quantum Chemistry Study of Carbon Nanotube Fluorination

Gear-like Rolling Motion of Carbon Nanotubes on HOPG

Selectivity and Diffusion of Binary Fluids in Carbon Nanotubes

Improved Tungsten Disulfide Nanotubes as Tips for Scanning Probe Microscopy

High Fidelity Pattern Transfer

High Volume Self Aligned Contact Etch for SRAM

High Density Plasma Oxide Etching of SAC (Self-Aligned Contact) and 0.25 micron HARC (High Aspect Ratio Contact) Structures: Process and Repeatability Results

The Angular Dependence of SiO₂, Si₃N₄, and Poly-Silicon Etching Rates in Inductively Coupled Fluorocarbon Plasmas

Process Optimization of Plasma Polymerized Resists for Advanced Lithography Applications

DUV Resist Degradation and Surface Roughening under Plasma Exposure

Transfer Etching of Bilayer Resists in Oxygen-based Plasmas

Integration of Metal Masking and Etching for Deep Submicron Patterning

Manufacturable Aluminum RIE Processes for 150 nm and Beyond

Power Modulated, Inductively-Coupled Plasmas

Method for Ion Energy and Ion Energy Distribution Functions Control at the Substrate during Plasma Processing

Modulation Frequency Effects on Metal Etching Processes Using Pulsed-Power Plasma of Cl₂/BCl₃ Admixture

Characterization of Process-Induced Charging Damage in Scaled-Down Devices and Reliability Improvement using Time-Modulated Plasma

Reduction and/or Elimination of Undesirable Topographic Differential Charging Effects in Semiconductor Processing by using Simultaneous Modulation of Source and Wafer RF

Time-Resolved Optical Measurements of a Pulsed Inductively Coupled Plasma

Substrate and Plasma Heating within High Frequency Bi-polar Pulsed-DC Magnetron Sputtering Applications

Dislocation Structures of Submonolayer Films near the Commensurate-Incommensurate Phase Transition: Ag on Pt(111)

Non Capillarity Driven Grain Growth in a Strained Cu Ultrathin Film

Exchange Processes in Metal on Metal Growth Studied with High-resolution STM

Self-diffusion on Pt(110)-1x2: Ab-initio Barriers vs. Experiment¹

Novel Temperature Dependence of the Morphology of Deposited Multilayer Ag/Ag(100) Films

Edge Diffusion During Growth: Kink Ehrlich-Schwoebel Effect and Resulting Instabilities¹

Atom-by-Atom Growth: Bonding and Rebonding on Metal Surfaces

Diffusion of Lead on the Au(111) Surface Studied by Scanning Tunneling Microscopy and Embedded-Atom Method Molecular Dynamics

Low Energy Electron Microscope Investigation of Pb Overlayers on Cu(100)

Dissociative Adsorption of H₂ on Si(001): Reaction Channels and Structure Sensitivity

Adsorption of Molecular Hydrogen on the Si(100)-2x1 Surface

Molecular Beam Study of the Adsorption and Desorption of Hydrogen Sulfide on Au(100)

Decomposition of Nickelocene on Single Crystal Surfaces

New Opportunities in Surface Studies using High Brilliance Synchrotron Radiation

The Surface Chemistry of Iron Pentacarbonyl on Palladium (111)

Adsorption Driven Displacement of N₂ from Pt(111)

The Vibrational Spectra of Adsorbed Alkoxies on Cu(100) and W(110): Experimental Data and ab initio Calculations

Probing the Metal Sites of a V-oxide/Pd(111) "Inverse Catalyst": Adsorption of CO

Thia(Ethylene Oxide) Alkanes: Tuning the Structure of a Supported Biomimetic Membrane via Spacer Length and Packing Density

Quantitative Analyses of Biological Interactions using Surface-Biofunctionalized Surface Plasmon Resonance Devices

Adsorption and Reactions in Enzymes and on Surfaces: Similarities And Differences

The Role of Hydrogen Bonding in Chemisorbed Aminoacids

Working Smarter with Microanalytical Tools

Near Surface Chemical Dependence of Electronic States at Al-Doped TiO₂(110)Ultrathin Films

Microstructure and EL Properties of the ZnS:Mn Luminescence Materials with Co-dopants

Structural Determination of Wear Debris Generated from Sliding Wear Tests on Ceramic Coatings Using Raman Microscopy

Effect of Rapid Thermal Annealing Temperature on the Formation of CoSi Studied by X-ray Photoelectron Spectroscopy and Micro Raman Spectroscopy

Optical Metrology for Process Development and Control of Universal Anti-Reflective Layers

Temperature Dependence of Structure and Electrical Properties of Germanium-Antimony-Tellurium Thin Films