AVS1998 Wednesday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
| Session | Wednesday, November 4, 1998 | ||||||||||
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| 8:20 AM | 9:20 AM | 10:20 AM | 11:20 AM | ||||||||
| AS+ |
Structural Characterization of the Outermost Surface Monolayers of CH3 and CF3 Terminated n-Alkanethiol Monolayers Self-Assembled on Au(111)
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Fundamental Studies of Phase Transitions in Functionalized Amphiphile Monolayers
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Characterization of Fluorinated Monolayers
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Controlling Defects in Self-Assembled Monolayers
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New Preparation Methods for Self Assembly of Alkanethiolates on III-V Semiconductor Surfaces
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The Effect of Solvents and Electrical Fields on the Molecular Conformation in Organic Monolayers
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Nanometer-Scale Design and Fabrication of Polymer Interfaces using Polydiacetylene Monolayers
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Bias-dependent Contrast in STM Images of Phenyloctadecylethers
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Self-Assembling Trichloro- and Trimethoxy- silanes on TiO2(100) Crystal
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| EM-WeM |
Surface Preparation and Contamination Control for Advanced CMOS Processing
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Dissolution of Cu and Au into Aqueous Semiconductor Processing Solutions
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A Reduced Carbon Contaminant, Very Low-Temperature Silicon Substrate Preparation for Defect-Free Homoepitaxy
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The Modeling of Excimer Laser Particle Removal From Silicon Surfaces
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Chelating Agents for Dry Removal of Metals
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Process Optimization of CMP of Dielectrics for ULSI Multilevel Metallization
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Nanoscale Corrosive Wear of Ionic Materials: A Model System for Chemical Mechanical Polishing
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Studies on Passivation Behavior of Tungsten in Application to Chemical Mechanical Polishing
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Studies of the Pad-Slurry-Surface Interactions in Chemical-Mechanical Polishing of Copper Thin Films and Patterned Structures
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| MI+ |
Limiting Factors in Dense Pseudo Spin Valve and Spin Dependent Tunneling Memory Arrays
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New Aspects of GMR Spin Valves: Enhancing Specular Electron Scattering and Using Surfactants for Improved Growth
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High Temperature Pinning Properties of IrMn vs. FeMn in Spin Valves
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Magnetisation Reversal Studies by TEM of Continuous and Patterned GMR Films
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Deposition and Processing of Novel GMR Structures 1
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Direct-Measurement of Spin-Dependent Transport Across Ferromagnetic and Non-Magnetic Thin Films
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Effect of Noble Gas Addition (He,Ar,Xe) on Cl2-Based Etching of NiFe and NiFeCo
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Magnetoresistance Properties in Granular Silicide Thin Films Formed by High Dose Iron Implantation
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| MS-WeM |
Complete Solvent Free Stripping of via Structures using NF3,H2O,O2 Ashing Chemistry
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Studies of a New High Dissociation Inductively-Coupled Plasma Downstream Strip Module
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Lithography for Smaller than 0.15 Micron Silicon Technology
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Evaluation of Chamber Liners, in TCP Metal Etchers, to Reduce the Equipment Clean Time and to Increase the Mean Time between Cleans
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Evolution Effects of Reactor Inner Wall Surface on Fluorocarbon Plasma Parameters
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Studies of 300MM Poly-Silicon Etch Processes Using A Inductively Coupled Plasma Source
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Integrating Process Models and Operational Methods
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Application of an Inductively-Coupled Plasma Source to Destruction and Abatement of Fluorine-based Gases
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Low Dielectric Polymer Etching with a Downstream Microwave Plasma
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| NS+ |
Recent Progress in the Functionalisation of AFM Probes using Electron-Beam Nanolithography
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Surface Derivatization of Nanoscale Tungsten Tips for Interfacial Force Microscopy
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Silicon Cantilevers for Ultrahigh-Density Data Storage
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Capacitative Force Modulation Technique in Nanoindentation
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Nanoindentation as a Probe of Stress State
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Nano-scale Observations of Stress-Enhanced Dissolution in Monoclinic CaHPO4 2H2O: Chemical vs. Mechanical Effects
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Conductance and Force at an Atomically Defined Junction
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Chemical Imaging with Scanning Near Field Infrared Microscopy
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Tapping-Mode and Nonoptical Force Sensing Near-Field Scanning Optical Microscopy
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Development and Application of a Dual-Probe Scanning Tunneling Microscope for Nanoscale Investigations of Materials
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| PS-WeM |
Gate Oxide Damage: Testing Approaches and Methodologies
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Evaluation of Charging Damage Test Structures for Ion Implantation Processes
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SPORT Measured Electron Shading Effects and Comparison with Computer Simulation
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Suppression of Charging Damage Caused by Electron Shading Effect in Gate Etching Technology
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Modeling of Charging Damage during Dielectric Deposition in High-Density Plasmas
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Silicon Oxidation Employing Negative Ion under Transformer Coupled RF Bias
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Direct Measurement of VUV Caused Oxide Conduction during Plasma Charging
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Vacuum Ultraviolet Spectra of Metal-Etch Plasma Processing Discharges
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Spatial Characterization of Plasma VUV Emission in an ECR Etcher
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| SE-WeM |
Ab Initio Studies of the Surfaces and Growth of GaN and AlN
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Film Defects and Growth Dynamics in Wide Bandgap Epitaxy
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Growth of Thin Film Materials with Supersonic Molecular Beams
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Selected Energy Etching of Semiconductors by Electron-enhanced Surface Reactions
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Velocity, Temperature, and Chemical Composition of a dc-Arcjet Plume
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| SS1-WeM |
Medard W. Welch Award Lecture - Optical Spectroscopy of Surfaces and Interfaces: Progress and Opportunities
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Chemistry and Intermolecular Interactions of Nitridation and Oxidation Precursors on Si(100)-(2x1)
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Spectromicroscopy Evidence of Lateral Inhomogeneities for Metal-(III-VI) Semiconductor Interfaces
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Direct Determination of the Interplay between Gas-Surface Reactivity, Thin Film Strain and Alloy Surface Segregation: Growth of Strained Heteroepitaxial Si1-xGex Thin Films on Si(100)
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Ballistic Electron Emission Microscopy Studies of Tunneling to Surface and Bulk States on Cu (111) Thin Films
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Current-Voltage Measurements of Ultrathin Metal-Si(111) Sensors
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Electroless Deposition of Au onto H-Si(111)
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Growth of Si1-xGex on Si(011): Kinetics, Surface Structure, and Morphological Evolution
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Surface Structural Study of Ultra-Thin Si (111) on SiO2
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Reconstructed Oxide Structures Stable in Air: Monolayer Silicate on Hexagonal SiC Surfaces
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| SS2-WeM |
Monte-Carlo Simulation of the Adsorption and Desoption of CF4 on Cu/CuO(110)
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Adsorption, Absorption, and Abstraction of Hydrogen on Cu(111) Surfaces
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A Comparison of State-Resolved Studies of Reaction and Inelastic Scattering for H2 with Palladium and Copper Surfaces
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Energy Dependent Al(111) Oxidation Kinetics
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Initial Stages of Al(111) Oxidation by Oxygen - Temperature and Surface Morphology Effects
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Comparison of Chemical Selectivity and Kinetic Energy Release in Si(s) + ICl(g) and H(g) + ICl(g)
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Hydrogen Atom Induced Decomposition of Water Adsorbed on Si(100)
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Nonthermal Effects of Photon Illumination on Surface Diffusion
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The Role of Surface Reconstruction in the Photofragmentation Dynamics of Oriented Methyl Bromide Adsorbed on GaAs
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| SS3-WeM |
The Atomic Steps of Oxygen Adsorption on Pt(110)-(1x2)
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Etching of the Si(001) Surface with Molecular Oxygen
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Surface Morphology Induced on Metal Surfaces by Ion Sputtering
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Direct Observation of Etching Mechanisms of Cu Surfaces with STM
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How Predictable Is Surface Morphology?
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Restructuring of Non-Square Vacancy and Adatom Clusters and of Indentations and Protrusions at Step Edges for Ag/Ag(100)
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Evolution and Structure of the Stripe Phase Reconstruction of Cu/Ru(0001)
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Dynamics of the Striped Nanostructure of the Oxidized Cu(110) Surface: A Momentum-Resolved ESDIAD Study
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Evidence and a Model for a Chemically Mediated Roughness Transition
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Reconstruction of Bimetallic Systems: Ultrathin Films of Rh, Pt and Pd on W(211)
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| TF-WeM |
ULSI Metallization and Interconnects
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Pinhole Formation in Solid Phase Epitaxial Film of CoSi2 on Si(111)
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Investigation of the Structural and Chemical Stability of Advanced Metal Gate and Ultra-Thin Gate Dielectric Interfaces
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Low Temperature Deposition of Zirconium Diboride, A Candidate Diffusion Barrier, Using Remote Plasma CVD
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A Parameter Free Model for the Simulation of Trench Filling Profiles under Al PVD and Al IPVD Conditions
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Energy Dependent Atomistic Simulations of Trench-filling
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Sputtered Copper Seedlayer Processing Issues
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The Effect of Sputter Process and Target Pass-Through Flux on Sputter Deposition of Co Thin Film for Cobalt Silicide Metallization
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Improvement of Morphological Stability of Ag Thin on TiN Layer
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| VT-WeM |
Electron Beam Degradation of Sulfide-Based Thin Film Phosphors for Field Emission Flat Panel Displays
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Current Status of Field Emission Displays (FED's)
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Thin Film and Powder Phosphors for Field Emission Flat Panel Displays
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A Poor Vacuum Tolerant, Low-Voltage, Scalable, Thin-Film-Edge Dispenser Field Emitter Array
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Diamond Coated Silicon Field Emitter Array
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Field Emission Characteristics of SiC Capped Si Tip Array by Ion Beam Synthesis
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