AVS1998 Monday Afternoon

Aqueous Leachability of Single Crystal and Polycrystalline Calcium Titanate

XPS Investigations of the Chemistries of Soils

Problems in Surface Characterization of Oxides and Insulators

ESCA Depth Profiling of Insulating Thin Film Structures

Quantification of Nitrogen in Silicon Oxynitride Thin Films by XPS

XPS Characterization of Nitrogen Profile and Chemical States in Ultrathin Silicon Oxynitrides

Ultra Shallow Depth Profiling by ESCA and SIMS

Valence Band X-ray Photoelectron Spectroscopic Studies to Distinguish Between Oxidized Aluminum Species

Influence of Mg on the Oxide Formation on Al¹

Cell Solid-Surface Interactions Under Flow

Leukocyte Adhesion on Self-Assembled Thiol Monolayers under Flow

Smart Polymers for Bacterial Release

Characterization of Biorecognition Surfaces

Neuronal Networks as the Basis for Computational Systems

Growth of Central Nervous System Cells on Microfabricated Pillars

Directed Neuron Attachment and Growth by Micrometer-Scale Chemical Patterning of Glass Substrates

Characterization of Cellular Interfacial Forces with AFM

Pathways Toward Chemically Assembled Electronic Nanocomputers

Room Temperature Silicon Single Electron Memory and Switch and Nanoimprint Lithography

Terabit Integration: New Ideas, Need for New Materials

Oxide-Confined Vertical Cavity Surface Emitting Lasers using Quantum Well and Quantum Dot Active Regions

Polysilicon Sealed Vacuum Cavities for MEMS

Wafer Level Vacuum Packaging for MEMS

A Dual Sensor Vacuum Gauge: Advanced Micromachined Thin Film Pirani Sensor Combined with a Piezoresistive Sensor

The Knudsen Compressor as a Micro and Macroscale Vacuum Pump Without Moving Parts or Fluids

Novel Microvalve with Low Leakage

Green House Effect and LSI Process Technology

Ultra-Low-Temperature Growth of High-Integrity Silicon Oxide and Nitride Films by High-Density Plasma with Low Bombardment Energy

Low-Temperature Large-Grain As-Deposited Poly-Si Formation by Microwave-Excited PECVD Using SiH₄/Xe

Balanced Electron Drift Magnerton Plasma Source for Uniform SiO₂ Etching

Influence of Wafer Back Surface Finish on Dry Etching Characteristics

Precise Control of Gas Ratio in Process Chamber

Clean Aluminum Oxide Formation on Surface of Aluminum Cylinder in an Ultraclean Gas Sampling System

Gradational Lead Screw Pump Development

Etching and Cleaning of Silicon Wafers using HF Vapor Process in the Non-Condensed Etching Regime

Scanning Tunneling Microscopy Studies of Atomic-Scale Structure In Semiconductor Heterostructures

Growth Asymmetry in InGaAsP/InAsP Superlattices Studied by Scanning Tunneling Microscopy

Microstructure of Mixed-Anion Interfaces Examined with XSTM¹

X-STM Study of InAs/In_1-xGa_xSb/InAs/AlSb Laser Structures¹

Kinetics of Anion Cross Incorporation in Type-II Heterostructures Characterized with XSTM¹

Low Temperature Cross-Sectional Scanning Tunneling Microscope-Induced Luminescence of GaN

Cross Sectional STM Study on MBE-grown Si/Ge(111) Interface

Scanning Tunneling Microscopy Characterization of the Depletion Zone of a Si Lateral pn Junction

Organic Thin Film Transistors

Fast Electronic Transport in Organic Molecular Solids?

Soluble and Processable Oligothiophenes and Analogues as Semiconductors for Thin Film Transistors

Field Effect Conductance of 1-6 Monolayer Thick Crystals of Organic Semiconductors

Charge Injection and Transport in Organic Films

Localized Growth and Electrical Characterization of Polypyrrole on Temperature Programmed Microhotplates

Scaling of PFC Abatement Using Plasma Burn-Boxes¹

Point-of-Use Plasma Abatement of PFCs in a High Density Inductively Coupled Plasma

Plasma Etching Using PFC Replacement Chemicals

Challenges in Plasma Etching and Patterning for Fabrication of New Systems and Devices

PECVD and Dry Etching on Large Glass Substrates for Flat Panel Displays

Use of a One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) to Kill a Broad Spectrum of Microorganisms¹

High Pressure Plasmas as an Anti-Terrorist Technology

Density Measurements of Cf_x in a GEC Reference Cell by Infrared Absorption

Un-Collided Beam Mass Spectrometric Measurements in C₂F₆ and CHF₃ Dielectric Etch Discharges

Modeling High-Density Plasma Etching of Aluminum and Photoresist¹

Studies of Ion Bombardment in Plasma Cleaning and Etching Gases

Diode Laser Measurements of CF_x and CO Radicals in an Inductively Coupled GEC Reference Cell

Cavity Ring Down Spectroscopy on an expanding Ar/C₂H₂ Plasma

VUV-Visible Emission Spectroscopy Investigation of Frequency Effects in Low Pressure Plasmas

Plasma Sheath Electric Field Strengths Above a Grooved Electrode in a Parallel-Plate Radio Frequency Discharge

Ultrahigh Frequency vs. Inductively-Coupled Chlorine Plasmas: Comparisons of Cl and Cl₂ Concentrations and Electron Temperatures Measured by Trace Rare Gases Optical Emission Spectroscopy

Spectroscopic Measurements in an Inductively Coupled RF Discharge in Hydrogen¹

Momentum Resolved ESDIAD, A New Technique, Probing the Low Frequency Motion of Adsorbed Molecules on Single Crystal Surfaces¹

UV Spectroscopy of CO and Benzene on Pt(110)

Calorimetric Measurements of Metal Adsorption and Adhesion Energies on Clean, Single-Crystalline Surfaces

Multispectral Image Classifications of Si(001) Surface Electronic Structure

A Simple Nulling Technique for Measuring Complex-Valued Nonlinear-Optical Susceptibilities of Interfaces

Characterization of Near-Field Probes for Enhanced Raman Spectroscopy

Element Specific Real-Space Imaging Surface Crystallography

An Axial Resonant Force Probe for Atomic Force Microscopy

Super Transmission and Resolution Energy Analyzer and Mass-Analyzer System (STREAMS)

Adsorption and Mass Transfer Processes on Stepped Metal Surfaces

Visualization of Heterogeneously Catalytic Processes

Studies of Oxygen Species on a Heated Silver Membrane

Promotion through Gas Phase Induced Surface Segregation: Methanol Synthesis from CO, CO₂ and H₂ over Ni/Cu(100)

Carbon-Sulfur Bond Activation in Adsorbed Methylthiolate on Ni(100) with Gas Phase Atomic Hydrogen at 120 K

Propylene Oxidation on the Pt (111) Surface over an Extended Range of Coverages

The Catalytic Chemistry of Small Hydrocarbons on Palladium: Cyclization, and Hydrogenation

Dehydrogenation of Ethylbenzene Studied on Single Crystalline Iron Oxide Model Catalyst Films

Chemisorption on and Modification of Molybdenum Carbide Surfaces

Computer Simulation Modeling of Sculptured Thin Films

Characterization of TiN/CN_x Multilayers Deposited by DC Magnetron Sputtering

Characterization of Stress-Morphology Relationships in Sculptured Thin Films (STFs)

Mechanical Properties Measurements using Scanning Force Microscopy

Meso-Scale Contact Hardness, Friction, and Wear of Aluminum Oxynitride Films

Nanotribology of Single Crystal ZnO Surfaces: Relation of Atomic Level Friction to Macro Tribology of Thin Films

Surface Stress in Silicon Oxide Layer made by Plasma Oxidation with Applying Sample Bias

Stress Alignment in SiO₂ Thin Films Deposited on Thin Chromium and Aluminum Film

Investigation of Induced Recrystallization and Stress in Close-Spaced Sublimation CdTe Thin Films

Low Temperature Growth of Protective Coatings in an ECR Plasma

Low Temperature Polycrystalline Silicon Resistors on Glass Substrates

Closed Loop Control of Reactive Sputtering of Oxide Thin Films

Unbalanced Magnetron Sputtered Composite Metal-DLC Coatings

Overview of Plasma Source Ion Implantation

Improvement of Tribological Properties of Pure Aluminium by Isotropic ECR Ion Implantation

Molecular Dynamics Study of Al PVD Processes

An XPS Study of the Effects of Chemical Pre-Cleaning of Aluminum Alloys on the Anti-Corrosion Properties of Plasma Deposited Films