Papers

AVS1998 Session NS+EM+SS-MoA: Cross-sectional Scanning Tunneling Microscopy of Semiconductors

Monday, November 2, 1998 2:00 PM in Room 321/322/323

Monday Afternoon

Start	Invited?	Item
2:00 PM		NS+EM+SS-MoA-1 Scanning Tunneling Microscopy Studies of Atomic-Scale Structure In Semiconductor Heterostructures E.T. Yu, S.L. Zuo (University of California, San Diego) Engineering of advanced heterostructure and nanoscale semiconductor devices requires a detailed understanding of the structure and properties of semiconductor materials and devices at the atomic to nanometer scale. Cross-sectional scanning tunneling microscopy provides unique and powerful capabilities for characterization of structural morphology and electronic properties in semiconductor epitaxial and device structures with spatial resolution at or near the atomic scale. In conjunction with results obtained using complementary characterization techniques, such studies can provide valuable insights into the relationships among epitaxial growth conditions, atomic-scale compositional structure, and various aspects of device behavior. We will discuss a number of recent applications of cross-sectional scanning tunneling microscopy to the characterization of III-V compound semiconductor heterostructures. Studies of InAsP/InP heterostructures, currently of interest for optoelectronic devices operating at 1.3-1.55 microns, have revealed that extensive nanoscale compositional clustering occurs, with As-rich and P-rich clusters bounded preferentially by {111} planes forming in the InAsP alloys. Related studies of InNAsP/InP heterostructures, in which low concentrations (~1-2%) of N are incorporated, have provided information about the influence of N on heterojunction band alignments. And STM images of InAsP/InAsSb superlattices of interest for midwavelength infrared emitters have revealed nanoscale compositional fluctuations in these materials consistent with previously reported observations by electron diffraction of partial ordering in InAsSb alloys.
2:40 PM		NS+EM+SS-MoA-3 Growth Asymmetry in InGaAsP/InAsP Superlattices Studied by Scanning Tunneling Microscopy B. Grandidier, H. Chen, R.M. Feenstra (Carnegie Mellon University); R.S. Goldman (University of Michigan); C. Silfvenius, G. Landgren (Royal Institute of Technology, Sweden) InGaAsP based multiple quantum well structures are increasingly used to fabricate optoelectronic devices. However the strain can lead to lattice relaxation processes during the growth which degrades the optical properties of these structures. To understand the differences in the photoluminescence efficiency of several superlattices composed of InGaAsP quaternary wells, we have investigated a series of InGaAsP/InGaP and InGaAsP/InAsP superlattices using cross-sectional scanning tunneling microscopy (xSTM). These superlattices were grown by metalorganic vapor phase epitaxy, with different number of periods and with or without InP interlayers inserted in the barrier. For InGaAsP/InGaP superlattices, the individual well and barrier layers are well resolved in the xSTM images. In contrast, for InGaAsP/InAsP superlattices, the InGaAsP quantum well and preceding InAsP barrier layers can be clearly seen, whereas the subsequent InAsP barriers are severely intermixed with the quantum wells. Possible mechanisms for this intermixing are described. In addition, the contrast observed in both types of superlattices has been related to the strain which exists in the layers; the compressively strained InAsP barrier protudes outwards from the (110) cleavage plane whereas the tensilely strained InGaP barrier contracts inwards. Finite element computations are used to quantify these elastic relaxation effects of the cleavage surface.
3:00 PM		NS+EM+SS-MoA-4 Microstructure of Mixed-Anion Interfaces Examined with XSTM¹ J. Harper, M. Weimer (Texas A&M University); D. Zhang, C.H. Lin, S.S. Pei (University of Houston) The quality of the interfaces between the nearly-lattice-matched 6.1 Å materials (InAs, GaSb, and AlSb) is important for a number of applications, including the development of mid-IR lasers, long-wavelength photodetectors, and resonant-tunneling devices. Cross-sectional scanning tunneling microscopy (XSTM) is a powerful tool for characterizing the heterojunctions in these structures, which pose special challenges for molecular beam epitaxy (MBE) because of the mixed-anion nature of this material system. We have observed a white-noise component in the roughness spectrum of the GaSb-on-InAs interface with XSTM that is associated with the presence of interface point defects; these defects most likely arise from thermodynamically favored anion exchange reactions that occur during the crossover from arsenide to antimonide growth. Abruptness of the InAs-on-GaSb interface, on the other hand, is limited by antimony segregation that causes compositional grading within the arsenic layers. We have quantitatively characterized the Sb fraction as a function of distance from the arsenide-on-antimonide heterojunction, and find this compositional grading is well described by an exponential profile. ¹ ¹ Work supported by the National Science Foundation (DMR-9633011).
3:20 PM		NS+EM+SS-MoA-5 X-STM Study of InAs/In_1-xGa_xSb/InAs/AlSb Laser Structures¹ W. Barvosa-Carter, M.J. Yang, L.J. Whitman (Naval Research Laboratory) Strained-layer heterostructures involving the 6.1 Å family of III-V semiconductors (including InAs, GaSb, and AlSb) are being investigated for use in a growing number of high-speed and opto-electronic devices. Recently it was shown in InAs/In_0.73Ga_0.28Sb/InAs/AlSb mid-IR structures that the photoluminescence (PL) intensity and x-ray superlattice diffraction quality are strongly dependent on MBE growth temperature. These characteristics were shown to be optimized within a rather narrow growth temperature range (410-460°C) and much worse outside of that range. Although the quality of the interfaces in these structures is expected to play a crucial role in determining device performance, little is known about the actual atomic-scale structure of the interfaces. We present an atomic-resolution cross-sectional STM (X-STM) study of these laser structures in order to directly correlate atomic-scale features, such as interface roughness and layer intermixing, with material quality as measured by PL and x-ray measurements on the same samples. Two such laser structures have been examined, one grown at the optimum temperature and another grown at a higher temperature. Interface roughness appears to be larger in the higher temperature structure. In addition, intermixing occurs at the AlSb-on-InAs interfaces which results in electronic structure differences between the InAs-on-AlSb and AlSb-on-InAs interfaces as observed by X-STM. Based on our X-STM results, we will discuss the atomic-scale sources of device degradation, and present possible routes towards improvement of the growth of these laser structures. ¹ ¹ Funded by the Office of Naval Research and the Air Force Research Laboratory.
3:40 PM		NS+EM+SS-MoA-6 Kinetics of Anion Cross Incorporation in Type-II Heterostructures Characterized with XSTM¹ J. Steinshnider, J. Harper, M. Weimer (Texas A&M University); D. Zhang, C.H. Lin, S.S. Pei (University of Houston) We have used cross-sectional scanning tunneling microscopy (XSTM) to examine MBE material quality in the mixed-anion InAs/GaSb/AlSb system under growth conditions (including the use of cracked arsenic and antimony sources) similar to those presently employed for type-II quantum well and interband cascade lasers. Two apparently different anion defects are noted within the antimonide layers. The demonstration of a linear correlation between the defect densities observed with STM and the arsenic valve setting during antimonide-layer growth establishes background arsenic incorporation as the common origin for both of these defects.² The distribution of As substitutional defects in a (110) cleavage plane is analyzed by way of the two-dimensional pair correlation function. We observe a pronounced attractive correlation in the [110] direction, parallel to the Sb dimer bonds of the (1x3) reconstructed growth surface, whereas the distribution in the orthogonal [001] direction is essentially random. This anisotropic correlation reflects the kinetics of arsenic dimer incorporation during growth and not the equilibrium distribution associated with strain-mediated repulsive interactions. ¹ ¹ Work supported by the National Science Foundation ²(DMR-9633011). ³ ² J. Harper, M. Weimer, D. Zhang, C.H. Lin, and S.S. Pei, JVST B 16, in press (1998).
4:00 PM		NS+EM+SS-MoA-7 Low Temperature Cross-Sectional Scanning Tunneling Microscope-Induced Luminescence of GaN S. Evoy, C.K. Harnett (Cornell University); S. Keller, U.K. Mishra, S.P. DenBaars (University of California, Santa Barbara); H.G. Craighead (Cornell University) The GaN system is of interest for applications in the green, blue, and UV spectral regions. Advances in device development have been made in spite of issues such as dislocation densities and defect induced visible luminescence. These issues prompted interest in spatially resolved luminescence studies of the material. Scanning tunneling microscope-induced luminescence (STL) offers nanometer scale resolution and control of the injection bias. In-situ cleaving and cross-sectional imaging is of particular interest for nanoscale luminescence studies of GaN heterostructures and interfaces. We recently reported the first low temperature STL of GaN, and the first STL images of this material. We now report the low temperature cross-sectional STL of MOCVD-grown GaN. Optical interference filters are used for semiquantitative spectral analysis. Room temperature top-view experiments reveal faint visible emission at tip biases above 1.5 V, with no clear evidence of UV luminescence. However, a sharp increase of emission in the 350±35 nm range is observed under liquid He cooling at biases above 3 V. The room temperature visible emission may be related to surface issues, suggesting that low temperature is required for the analysis of intrinsic bulk luminescence. Cross-sectional experiments are performed on in-situ cleaved samples. Incompatible cleaving planes between the GaN and the sapphire produce 200-400 nm wide vertical features, yielding an edge roughness of 30-50 nm. Behavior of luminescence is similar to what was observed in top-view. However, close to the sapphire interface, the 350±35 nm band-edge emission is undetected even at low temperature. Images show strong correlation between the remaining visible emission and the cleaved-induced artifacts. We are currently working on our cleaving technique in order to improve the quality of the edge. The technique will also be applied to the study of GaN heterostructures such as InGaN/GaN quantum wells.
4:20 PM		NS+EM+SS-MoA-8 Cross Sectional STM Study on MBE-grown Si/Ge(111) Interface H. Hirayama, M. Ohmori, K. Takayanagi (Tokyo Institute of Technology, Japan) We studied the (111) cross sectional surface of MBE grown Si/Ge(111) samples. Samples were cleaved in ultra-high vacuum, and their (111) cross s ection were investigated in-situ by using STM. On the as-cleaved surface, 2x1 reconstruction were observed at both Si and Ge side. After annealing, 2x1 reconstruction changed to 7x7 and c(2x8) on the Si and Ge layer, respec tively. At around the interface, 7x7 reconstruction changed to c(2x8) reco nstruction in moving from Si to Ge side. But, the transition from 7x7 to c( 2x8) was not abrupt. The transient region of the width of c.a.200nm was obs erved. In the transient region, adatoms arranged with 2x2 and c(2x4) shor t range orderings. Patchy domains of 7x7 reconstruction, which was accompa nied with (110)- oriented grooves and non-double layer height steps, were a lso observed in the sea of 2x2 and c(2x8) arrangement of adatoms. In a det ailed analysis of adatom arrangement, we found that the non-double layer hei ght step was caused by the glide in the (111) plane parallel to the substr ate. The groove was triggered by partial dislocations at the edge of the gild region. The strain field with the glide-induced step and grooves modifi ed the surface strain locally, and caused patchy 7x7 domains.
4:40 PM		NS+EM+SS-MoA-9 Scanning Tunneling Microscopy Characterization of the Depletion Zone of a Si Lateral pn Junction M.L. Hildner, R.J. Phaneuf, E.D. Williams (University of Maryland, College Park) Scanning tunneling microscopy (STM) and scanning tunneling spectroscopy (STS) are used to characterize lateral pn junctions fabricated on silicon (100) surfaces. Two separate device structures , one with p⁺-n and the other with n⁺-p abrupt junctions, were examined. The STM images of the first set of devices show both an electronic feature and a structural groove on each side of the ion implanted p-type regions. The groove is an etching artifact of the implantation mask fabrication process and was easily avoided in making the second set of devices which show only a similar electronic feature. The electronic feature widens with applied reverse bias with a voltage dependence that closely matches that expected for the depletion zone. However, the width of the electronic feature is much smaller than that of the depletion zone. The STS measurements show that the tip-junction system can be modeled as a series of non-equilibrium metal-insulator-semiconductor (MIS) diodes formed with a semiconductor of spatially variable carrier density. From this model, we qualitatively describe the electronic feature as confined to that portion of the depletion region in which the biasing sense of the MIS junction is switched from the biasing sense when the junction is in the lightly doped neutral region. Thus, the electronic feature commences, as the tip is moved from the lightly doped neutral region into the depletion region, when the majority carrier changes (from electrons to holes for the lightly doped n devices). This work has been supported by the Laboratory for Physical Science, with partial support from the NSF-MRSEC.