AVS1998 Plasma Science and Technology Division Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS-MoM | Monday, November 2, 1998 8:20 AM | Feature Evolution |
| PS1-MoA | Monday, November 2, 1998 2:00 PM | Environmental Issues and Emerging Technologies |
| PS2-MoA | Monday, November 2, 1998 2:00 PM | Diagnostics I |
| PS-MoP | Monday, November 2, 1998 5:30 PM | Plasma Science and Technology Poster Session |
| PS1-TuM | Tuesday, November 3, 1998 8:20 AM | Pulsed Plasmas |
| PS2-TuM | Tuesday, November 3, 1998 8:20 AM | Oxide Etching |
| PS+MS-TuA | Tuesday, November 3, 1998 2:40 PM | ULSI Technology |
| PS-WeM | Wednesday, November 4, 1998 8:20 AM | Plasma Damage |
| PS-WeA | Wednesday, November 4, 1998 2:00 PM | Plasma-Surface Interactions I |
| PS-ThM | Thursday, November 5, 1998 8:20 AM | Plasma Applications in Copper Metallization |
| PS-ThA | Thursday, November 5, 1998 2:00 PM | Diagnostics II |
| PS-ThP | Thursday, November 5, 1998 5:30 PM | Plasma Science and Technology Division Poster Session |
| PS-FrM | Friday, November 6, 1998 8:20 AM | Plasma-Surface Interactions - II |