AVS1997 Friday Morning

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Session Friday, October 24, 1997
8:20 AM 9:20 AM 10:20 AM 11:20 AM
AS+
Tribology and Lubricant Issues in Thin-Film Hard Disk System
Flow of Thin Viscous Polymer Films on Rotating Disks: Importance to Disk Drive Lubrication
Molecular Deformation of Ultrathin Perfluoropolyether Lubricant Films Adsorbed on Amorphous Carbon Substrates
Lubricant Degradation Mechanisms in Disk Drives
Carbon Overcoat Composition and Structure using Secondary Ion Mass Spectrometry (SIMS)
Calibrating Perfluoropolyether Lubricant Thickness Measurements
Evaluation of the Lubricant Thickness Measurement by XPS/ESCA on Current Hard Disk Surfaces.
Evidence for Galvanic Corrosion of Aluminum, Iron, and Nickel by a Polyperfluoroether Lubricant
EM+
Process Modeling Fundamentals for Microelectronics Manufacturing
Modeling of Ultathin Oxynitride Gate Dielectrics Formed by Remote Plasma Nitridation of Silicon Dioxide
Combined Beam Profile Reflectometry, Beam Profile Ellipsometry, and Ultraviolet-Visible Spectrometry Characterization of Ultrathin Oxide-Nitride-Oxide Films on Silicon
Interface Studies of Titanium Nitride and Tungsten Nitride Composite Metal Gate Electrodes with Thin Dielectric Layers
High Resolution 2D Imaging of Dopant Profiles using Small Area Contact C-V Measurement
Time and Length Scales in Plasma Etching
Equipment Simulation of a Deep Silicon Trench Etch Reactor
Analytic Simulation of Silicon Etch Profiles from a HDP Plasma
Si Self-Interstitial Effective Diffusivity in the Presence of Carbon
MS-FrM
Trends in Real-Time Process Control
The Software Controls Challenge: Delivering Solutions to OEMs and End-Users
Sensor-based RF Power Monitoring and Control in an Inductively Coupled Plasma Etcher
Feedback Control of Inductively Coupled Plasma Reactors1
Automatic Matching Algorithms with Improved Convergence for Inductively Coupled Plasma Sources
Run-to-Run Process Control and Endoint Detection on a Dual-Coil TCP with FWI and OES
Non-Periodic Lot Processing, Random Measurement Delays, and Intermittent Lot Processing with an Extended Predictor Corrector Controller
PS-FrM
Challenges from the NTRS for Interconnects
Low k Dielectrics Etching : Application to via Level for Sub-quarter Micron Technology
Effect of Precursors on the Properties of Pulsed Plasma Enhanced Chemical Vapor Deposited Fluorocarbon Thin Films
Structure and Chemical Composition of Fluorinated SiO2 Films Deposited Using SiF4/O2 and SiF4/SiH4/O2 Plasmas
Nuclear Magnetic Resonance (NMR) Spectroscopy of Low-k Fluorocarbon Films from Pulsed Plasma Enhanced Chemical Vapor Deposition
Stability of Si-O-F Low-K Dielectrics: Ab Initio Calculations of Reactions between Water Molecules and Si-F Bonding Groups
Pulsed Plasma Deposition of SiOx Barrier Coatings from HMDSO/O2 Mixtures.
Investigation of the Chemistry, Morphology and Growth Mechanisms of SiO2 Films Deposited on Silanized PET and Polycarbonate Substrates by PECVD
Transparent Barrier Coatings on PET by Dual-Frequency PECVD.
SS1-FrM
In-Situ Probing of Metal-Liquid-Gas Catalytic Interfaces Using Surface-Enhanced Raman Spectroscopy
Creating Ordered Chiral Templates to Stereodirect Reactions at Metal Surfaces
Vibrational Study of CH2 and CH3 Radicals on the Cu(111) Surface by HREELS
Hydrogen Induced C-N Bond Activation in C6 Amines on Ni and Pt Surfaces
A Comparison of H Atom Induced C-C Bond Activation on the Nickel and Platinum(111) Surfaces
Acetylene Cyclization to Benzene on Pd/W(211)*
Reaction Mechanisms and Kinetics in Hydrotreating Models on Palladium: A Study of Furan, Thiophene, and Pyrrole on Pd(111) using LITD/FTMS and STM
An STM Investigation of the Adsorption and Chemistry of Cyclic Aromatic Hydrocarbons on Pd(111)
A Scanning Tunneling Microscopy Study of Benzene Adsorption on Si(100)-(2x1)
Benzene/Si(100): Metastable Chemisorption and Binding State Conversion
Vibrational Spectroscopic Studies of Diels-Alder Reactions with a Si(100)-2x1 Surface as a Dienophile.
TF-FrM
Structure and Properties of Thin ZnO Films
Efficient Investigations of Processing/Property/Performance Relationships for Metal/Oxide Sensing Films Using Micromachined Platforms
Microstructure-Dependent Ferroelectric Properties in SrBi2Ta2O9 Thin Films Fabricated by the Radio Frequency Magnetron Sputtering Techniques
Preparation and Properties of Ferroelectric SrBi2Ta2O9 Thin Films On SrTiO3 and MgO Substrates By Radio Frequency Magnetron Sputtering
Compositional Effect on Sputtered Multicomponent Oxide Thin Films.
XPS Study of TiN Films Produced with TDMAT and Selected N-Containing Precursors on SiO2
Preparation of High Quality RuO2 Electrodes for High Dielectric Thin Films by Low Pressure Metal Organic Chemical Vapor Deposition
Magnetoresistance Effect in as-grown La-Ca-Mn-O Films Prepared by MBE Co-evaporation Technique
Abstract Epitaxial Growth and Surface Morphology of Ferroelectric BaTiO3 Thin Films.
Characterization and Thickness Effects on Sputtered Ba0.5√sub 0.5TiO3 Thin Films
Sessions | Time Periods | Topics | Schedule Overview