AVS1996 Thursday Afternoon

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Session Thursday, October 17, 1996
1:30 PM 2:30 PM 3:30 PM 4:30 PM
AS-ThA
Surface Modification of Polymers using Plasma Source Ion Implantation
SIMS of Polymer Films and Modified Polymer Surfaces
Analysis by TOF-SIMS of Perfluoro-polyethers with Active Endgroups
Temperature Programmed SIMS: Desorption and Surface Diffusion of Polymer Molecules on Metal Substrates
Surface Characterization of Poly (p- phenylenevinylene) and its Derivatives, MEH-PPV and DMOS-PPV, using XPS and Static SIMS
Charge Neutralization Effects in High Resolution Electron Energy Loss Spectra (HREELS) of Polymer Surfaces
HREELS Studies of Vapor Deposited Polyaniline Thin Films
Polymer Self-Assembled Thin Films and Their Applications for Chemical Sensing
Variable Angle Internal Reflection Raman Spectroscopy of Multi-layer Polymer Thin Films
EM+
Theoertical Studies of Diffusion and Growth Phenomena on Semiconductor Surfaces
III-Sb(001) "Odd" Reconstructions: A Violation of the Electron Counting Model?
Atomic Layer Epitaxy for II-VI Material Growth
Low-temperature Selective Growth of GaAs by Modulated Flux Chemical Beam Epitaxy
Positron Annihilation Induced Auger Electron Spectroscopy (PAES) Study of the Structure of Si/H/Ge(100) Interfaces
Etching of Double-Height-Stepped Si(100)-2x1: A Study of Steps and Their Interactions
Evolution of Step Structures on Vicinal Si(111) during Adsorption and Etching by Bromine and Chlorine\super *\
Control of Atomic Step Distributions on Si(001) by Thermal Processing
Steps Structures on Passivated Si(111)-1x1 Surfaces
FP-ThA
Pulsed Laser Deposition of Tb-doped Y\sub 2\O\sub 3\ Photoluminescent Thin Films
Electron Beam Dissociation of CO and CO\sub 2\ on ZnS Thin Film Field Emission Display Phosphors
High Luminance Nanophosphors by a Novel Gas Condensation Process
Characterization of Novel Luminescent Films for Field Emission Flat Panel Display Application
Structural and Optical Properties of Alkali Halide Multilayers LiF:NaF Films
Y\sub 2\O\sub 3\:Eu and Y\sub 3\Al\sub 5\O\sub 12\:Eu Red Luminescent Films
Pulsed Laser Deposition of Thin Film Phosphors for Field Emission Flat Panel Displays
MI-ThA
Structure, Morphology, and Giant Magnetoresistance of Spin Valves
Schottky Barrier Formation vs Interfacial Structure for Fe on Reconstructed Surfaces of GaAs(001)
In-situ Ellipsometric Control of Metallic Multilayer Thin Films
Structural and Magnetic Properties Calculated using Density Functional Theory
The Structure of the Ferromagnetic MnNi Surface Alloy
Growth, Morphology and Magnetic Properties of Monolayer Epitaxial Co Films on Cu(100)
Growth, Structure, and Magnetic Properties of Fe\sub 3\O\sub 4\ and \gamma\-Fe\sub 2\O\sub 3\ Epitaxial Thin Films Grown by Oxygen-Plasma-Assisted Molecular Beam Epitaxy
Mg Outdiffusion on Ferrite Films Grown on MgO (001)
MS-ThA
An Example of Technology Innovation Resulting in a Successful Product
Temperature and Concentration Effects on Ozone Ashing of Photoresist
Defect Reduction and Cost Savings through Re-inventing RCA Cleans - A Joint Research and Manufacturing Project
Vapor Phase Cleaning of Sodium from Silicon Surfaces
Post High Dose Implant and Post Via-Etch Photoresist Stripping and Cleaning without the Use of Acids and Solvents
In Situ Cleaning of LPCVD Tools using a Thermal NF\sub 3\ Etch Process
Effects of Plasma Etching Damage and Cleaning Treatment on Titanium Silicide Formation
Integrated Dry Cleaning of Contamination Resulting from Reactive Ion Etching of Silicon Dioxide
Carbon Contamination in an Etching Reactor using Electron Cyclotron Resonance Plasma and the Effect of N\sub 2\ Addition
NS+
From Clusters and Nanophase Assemblies to Nanowires
Transport Properties Along Finite-Length Atomic Chain
Nanostructural and Local Electronic Properties of Fe/W(110) Correlated by Scanning Tunneling Spectroscopy
Photoluminescence Spectra of Self-organized SiGe Quantum Dot Lattices
Tunneling Spectroscopy in High Mobility GaAs/AlGaAs Heterostructure Subject to Surface Field Effect Induced Periodic Potentials
In Situ, Growth-Controlled Fabrication of Semiconductor Nanostructures
Microscopic Processes of Crystal Growth: How can we Control Surface Roughness and Self-organization of Nano-scale Islands
Growth and Properties of Self-Organized Si/Si\sub 1-x\Ge\sub x\ Clusters in Multilayer and Single Films
PS1-ThA
Electroluminescence as an Indicator for "Soft-breakdown" in Thin Oxides Due to Plasma Processing
Direct Measurement of Charging Voltages and Currents
Electrical-Stress Simulation of Plasma-Damage to Submicron MOSFETS: A Comparison between DC and AC Stresses
Direct Measurement of Surface Discharging Currents during Plasma Etching
Mechanism of Halogen Etching of Cu Surfaces
Minimizing Metal Etch Rate Pattern Sensitivity in a High Density Plasma Etcher
Characterization of Pit-like Sidewall Corrosion in the Etching Process of Al-Cu Alloy
Performance of Different Etch Chemistries on Titanium Nitride Arc Layer and Related Selectivity and Microloading Improvements for Submicron Geometries on a High Density Metal Etcher
Modeling and Profile Simulation of Aspect Ratio Dependent Metal Etching in an Inductively Coupled Plasma Etcher
Loading Effect Reduction in Tungsten Etchback using SF\sub 5\Helicon Plasma
PS2-ThA
Ionized Physical Vapor Deposition using a DC Magnetron Sputtering System Coupled with Secondary Plasma Sources
Sputtering Apparatus with External Plasma Injection and with Target/Source Focusing of Deposition Material
The Effect of Metal on Ionization Mechanism in Magnetron Sources Operating in Self-Sputtering Mode
Determination of Ionization Fraction and Ion Energy using a Quartz Crystal Oscillator and Gridded Energy Analyzer
Optical and Film-related Diagnostics of Relative Ionization Uniformity in Ionized Magnetron PVD (I-PVD) System
Crystallographic and Electrical Properties of Sputter-deposited Ta Thin Films formed under Various Ion Bombardment Conditions
Ta Metallization using an Electron Cyclotron Resonance Plasma Source Coupled with Divided Microwaves
Compositional Variations of Sputter Deposited Ti/W Barrier Layers on Substrates with Pronounced Surface Topography
Reactive Sputtering Deposition of Aluminum Nitride and Aluminum Oxide Thin Films using Pulsed Techniques
Reactive Sputter Deposition of TiO/sub X/ Thin Films
SS1-ThA
Mimicking Aspects of Heterogeneous Catalysis
Direct Dissociative Chemisorption of Methane, Ethane, Propane, and Cyclopropane on Ir(110)
Selective C-C Bond Activation in Small Cycloalkanes by Gas Phase Atomic Hydrogen on the Ni(100) Surface
\pi\-Allyl Coordination and Allyl Radical Desorption from a Cu(100) Surface
A Dramatic Increase in the Selectivity for Methane Formation from the Decomposition of Methanethiol on Ni-covered W(001)
Surface Chemistry of Phenol on Al(111)
Identification of the Fragmentation Pathways of Ferrocene on Cu(100)
Cyclization and Related Reactions of Iodoethanol on Ag(110)
Structure of Methyl Nitrite on Ag(111)
SS2-ThA
Adsorption and Reaction at Model Cloud Particle Surfaces
Surface and Bulk Diffusion of HDO and H\sub 2\\super 18\O on Single-Crystal H\sub 2\\super 16\O Ice Multilayers
The Structure of Water Films formed by Condensation on Mica Surfaces
Dehydroxylation and Rehydroxylation of \alpha\-Al\sub 2\O\sub 3\ Surfaces
Adsorption and Photoreaction of Oxygenates on Tropospheric Metal Oxide Particulates
XPS Studies of Chromium Adsorption on Iron Mineral Surfaces
Growth Kinetics of Phosphate Films on Metal Oxide Surfaces
Structure and Phase Transition in Thin Pyridine Films Adsorbed on Ag(111) and Ag(100): A Second Harmonic Generation Study
SS3-ThA
Evidence for Weakly Bound Oxygen on Ceria Films
Chemisorption Geometry, Vibrational Spectra, and Thermal Desorption of Formic Acid on TiO\sub 2\(110)
Ultraviolet Raman Spectroscopy of Catalysts and Other Solids
The Reactions of Carbonyls on the Oxides of Lanthanides and Actinides
Adsorption of D\sub 2\O on the Surface of a Fe\sub 3\O\sub 4\(001) Epitaxial Film Grown by MBE: A TPD, LEED and AES Study
Reaction of Hydrogen with Oxide and Sulfide Surfaces: Formation of Water and Hydrogen Sulfide
Electron Stimulated Desorption Studies of the Reaction of MgO(100) Surface with D\sub 2\O
The Growth, Structure and Reactivity of Au on TiO\sub 2\(110)
An In Situ Xps Study of Gold Oxidation by UV/Ozone
TF-ThA
The Influence of Strain on Semiconductor Thin Film Epitaxy
Evolution of the Surface Morphology of MBE Grown Tensile Strain Si\sub 0\\sub .\\sub 5\Ge\sub 0\\sub .\\sub 5\/Ge(001)
Boron Segregation with and without Atomic Hydrogen during the Growth of Boron Doped Layers on Si(110), Si(100), and Si(111)
Low Temperature Polycrystalline Silicon Film Formation Technology by a Harmonization with Sputtering and Plasma CVD using a Low Kinetic Energy Particle Process
The Effects of Ion Beam Pretreatment of SiO\sub 2\ Surfaces on the Nucleation and Surface Roughness of Polycrystalline Films Produced by Rapid Thermal Chemical Vapor Deposition
Microstructural Properties of Polycrystalline Silicon Solid-Phase-Crystallized from a-Si:H on Glass: The Effects of a Silicon Nitride Layer between a-Si and Glass
Effect of Substrate Structure on CdTe OMVPE
The Effect of Temperature Profiling Techniques on the Properties of CdTe Thin Films
Highly Oriented Crystalline 2H-WS\sub 2\ Thin Films by Metal Organic Chemical Vapor Deposition
Sessions | Time Periods | Topics | Schedule Overview