ALD/ALE 2024 Atomic Layer Etching Sessions

Topic Abstract Book
(627KB, Aug 10, 2024)
Topics | Time Periods | Schedule Overview

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Session Code Start Session Name
ALE-SuP Sunday, August 4, 2024 6:00 PM Atomic Layer Etching Poster Session
ALE-MoA Monday, August 5, 2024 4:00 PM ALD+ALE and Emerging Topics in ALE
ALE1-TuM Tuesday, August 6, 2024 8:00 AM ALE Applications and Methodologies
ALE2-TuM Tuesday, August 6, 2024 10:45 AM Thermal Gas-phase ALE
ALE1+AM-TuA Tuesday, August 6, 2024 1:30 PM ALE & Sustainability
ALE2+AM-TuA Tuesday, August 6, 2024 4:00 PM A.I. for ALD and ALE, and Wet-Chemical ALE
ALE1-WeM Wednesday, August 7, 2024 8:00 AM Plasma and Energy-Enhanced ALE
ALE2-WeM Wednesday, August 7, 2024 10:45 AM Selectivity, Metrology and Diagnostics in ALE
ALE-WeA Wednesday, August 7, 2024 1:30 PM Modeling in Atomic Layer Etching
Topic Abstract Book
(627KB, Aug 10, 2024)
Topics | Time Periods | Schedule Overview