ALD/ALE 2024 ALD Fundamentals Sessions
Topic Abstract Book
(1MB, Aug 10, 2024)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| AF-MoA | Monday, August 5, 2024 4:00 PM | Precursors and Chemistry: Precursor Design, New Precursors, Process Development I |
| AF-MoP | Monday, August 5, 2024 5:45 PM | ALD Fundamentals Poster Session |
| AF1-TuM | Tuesday, August 6, 2024 8:00 AM | Precursors and Chemistry: Precursor Design, New Precursors, Process Development II |
| AF2-TuM | Tuesday, August 6, 2024 10:45 AM | Growth and Characterization: Plasma Enhanced ALD I |
| AF1-TuA | Tuesday, August 6, 2024 1:30 PM | Precursors and Chemistry: Precursor Design, New Precursors, Process Development III |
| AF2-TuA | Tuesday, August 6, 2024 4:00 PM | Precursors and Chemistry: Simulation, Modeling, and Machine Learning for ALD |
| AF1-WeM | Wednesday, August 7, 2024 8:00 AM | Growth and Characterization: High Aspect Ratio/High Surface Area/Powder ALD and Characterization of ALD Films |
| AF2-WeM | Wednesday, August 7, 2024 10:45 AM | Growth and Characterization: Low Temperature ALD |
| AF1-WeA | Wednesday, August 7, 2024 1:30 PM | Growth and Characterization: In-situ and in-vacuo Analysis, Surface Science of ALD I |
| AF2-WeA | Wednesday, August 7, 2024 4:00 PM | Growth and Characterization: In-situ and in-vacuo Analysis, Surface Science of ALD II |
| AF3-WeA | Wednesday, August 7, 2024 4:00 PM | Growth and Characterization: Plasma Enhanced ALD II |