ALD/ALE 2022 ALD Fundamentals Sessions
Topic Abstract Book
(972KB, May 7, 2022)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| AF1-MoM2 | Monday, June 27, 2022 10:45 AM | New Precursors and Processes I |
| AF2-MoM2 | Monday, June 27, 2022 10:45 AM | High Aspect Ratio/High Surface Area/Powder ALD |
| AF1-MoA | Monday, June 27, 2022 1:30 PM | New Precursors and Processes II |
| AF2-MoA | Monday, June 27, 2022 4:00 PM | Simulation, Modeling, and Theory of ALD I |
| AF3-MoA | Monday, June 27, 2022 1:30 PM | Plasma Enhanced ALD |
| AF4-MoA | Monday, June 27, 2022 4:00 PM | Surface Science |
| AF-MoP | Monday, June 27, 2022 5:45 PM | ALD Fundamentals Poster Session |
| AF-TuM2 | Tuesday, June 28, 2022 10:45 AM | Simulation, Modeling, and Theory of ALD II |
| AF1-TuA | Tuesday, June 28, 2022 1:30 PM | Characterization I |
| AF2-TuA | Tuesday, June 28, 2022 4:00 PM | Characterization II |