ALD2020 Wednesday Morning

Sessions | Time Periods | Topics | Schedule Overview

Hover over a paper or session to view details. Click a Session in the first column to view session papers.
Session Wednesday, July 1, 2020
10:45 AM 11:45 AM
AA-WeM
Atomic Layer Epitaxy of GaN Directly on 4H-SiC using Ga–N Bonded Precursors
AS-WeM
Promixity Effect of Selective Co ALD on the Nanoscale
Cobalt Electron-Enhanced Atomic Layer Deposition (EE-ALD) Using High Electron Flux Hollow Cathode Plasma Electron Source (HC-PES): Rapid Growth and Bottom-Up Fill
Probing the Selectivity of Area-Selective Spatial ALD + Etch-Back Supercycles for SiO2 by Low Energy Ion Scattering
EM-WeM
Vapor-Phase Synthesis and Surface Area Analysis of ZIF-8 Metal Organic Framework (MOF) on Fibrous Substrates via Atomic Layer Deposition
Vapor Phase Infiltration for Transforming Polymers into Hybrid Materials: Mechanisms of Inorganic Entrapment and Structure-Property Implications
NS-WeM
Exploring ALD 2D Chalcogenides Beyond MoS2
Growth of Wafer-Scale Monolayer MoS2 using Adsorbate-Controlled Atomic Layer Deposition
Sessions | Time Periods | Topics | Schedule Overview