ALD2020 Wednesday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Wednesday, July 1, 2020
10:00 AM 11:00 AM 12:00 PM
LI3-WeM
Welcome & Introduction
Surface Reactions Between Metals and Diketone induced by Gas Cluster Ion Bombardments
ALE 2020 Best Student Paper Award Talk: Isotropic Plasma ALE of Al2O3 using SF6 Plasma and TMA
Break
Monolayer Lithography: Exploiting Inhibition Contrast from the Extreme Ultraviolet Irradiation of Organic Monolayers for Area Selective Depositions
Super-Conformal ALD of Metallic Mo Films by Simultaneous Deposition and Etch
Process Optimization in Atomic Layer Deposition Using Machine Learning
ALD/ALE Student Awards, Closing Remarks, & Sponsor Thank You
Sessions | Time Periods | Topics | Schedule Overview