ALD2020 ALD Fundamentals Sessions
Topic Abstract Book
(744KB, Jul 28, 2020)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| AF1-MoA | Monday, June 29, 2020 2:00 PM | ALD Precursors I & II |
| AF2-MoA | Monday, June 29, 2020 1:45 PM | Plasma Enhanced ALD |
| AF3-MoA | Monday, June 29, 2020 4:00 PM | ALD Growth and Surface Chemistry |
| AF-MoP | Monday, June 29, 2020 5:45 PM | ALD Fundamentals Poster Session |
| AF1-TuM | Tuesday, June 30, 2020 8:45 AM | ALD Mechanisms and Modeling |
| AF2-TuM | Tuesday, June 30, 2020 10:00 AM | Conformality of ALD |
| AF-TuA | Tuesday, June 30, 2020 1:15 PM | Characterization I & II |