ALD2019 Atomic Layer Etching Sessions
Topic Abstract Book
(588KB, May 5, 2020)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| ALE-SuP | Sunday, July 21, 2019 6:00 PM | Atomic Layer Etching Poster Session |
| ALE1-MoA | Monday, July 22, 2019 1:30 PM | Energy-enhanced ALE |
| ALE2-MoA | Monday, July 22, 2019 4:00 PM | ALE of Compound Semiconductors |
| ALE1-TuM | Tuesday, July 23, 2019 8:00 AM | ALE: Gas-phase and/or Thermal ALE |
| ALE2-TuM | Tuesday, July 23, 2019 10:45 AM | Alternative Methods to ALE |
| ALE1-TuA | Tuesday, July 23, 2019 1:30 PM | Modeling & Instrumentation I |
| ALE2-TuA | Tuesday, July 23, 2019 4:00 PM | Modeling & Instrumentation II |
| ALE1-WeM | Wednesday, July 24, 2019 8:00 AM | Integration & Application of ALE |
| ALE2-WeM | Wednesday, July 24, 2019 10:45 AM | Materials Selective ALE |