ALD2018 ALD Fundamentals Sessions
Topic Abstract Book
(863KB, May 5, 2020)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| AF1-MoA | Monday, July 30, 2018 1:30 PM | Precursor and Process I |
| AF2-MoA | Monday, July 30, 2018 4:00 PM | Mechanism and Surface Science |
| AF1-TuM | Tuesday, July 31, 2018 8:00 AM | Precursor and Process II |
| AF2-TuM | Tuesday, July 31, 2018 10:45 AM | Mechanism and Surface Science |
| AF1-TuA | Tuesday, July 31, 2018 1:30 PM | Characterization |
| AF2-TuA | Tuesday, July 31, 2018 4:00 PM | High Aspect Ratio |
| AF-TuP | Tuesday, July 31, 2018 5:30 PM | ALD Fundamentals Poster Session |
| AF1-WeM | Wednesday, August 1, 2018 8:00 AM | Plasma ALD I |
| AF2-WeM | Wednesday, August 1, 2018 10:45 AM | Plasma ALD II |
| AF1-WeA | Wednesday, August 1, 2018 1:30 PM | In-situ Monitoring and Analysis |
| AF2-WeA | Wednesday, August 1, 2018 4:00 PM | Process Development |