AVS 71 Session PS2-TuA: Sustainability and Plasmas 

Tuesday, September 23, 2025 4:15 PM in Room 201 ABCD W
Tuesday Afternoon

Session Abstract Book
(287 KB, Jun 15, 2025)
Time Period TuA Sessions | Abstract Timeline | Topic PS Sessions | Time Periods | Topics | AVS 71 Schedule

Start Invited? Item
4:30 PM Invited PS2-TuA-10 Fluorinated Gases in Plasma Etch: Challenges, Accomplishments, and Opportunities
David Speed (GlobalFoundries)
Plasma etch and chamber clean processes are a primary source of CO2-e emissions from semiconductor manufacturing processes. Net zero emissions and F-gas phase-out goals bring challenges that require multifaceted solutions, many of which have been the subject of industry efforts for over 30 years. This presentation surveys the principal challenges, accomplishments, and opportunities for achieving reduced CO2-e emissions from plasma etch processes. Topics to be addressed will include etch process optimization, alternative low-GWP gases, enhanced abatement processes, gas capture and recovery, design integration strategies, and digital twin approaches.
5:00 PM PS2-TuA-12 Kinetic Study of Microwave-Powered, Atmospheric-Pressure Hydrogen Plasma Reduction of Iron Oxide
Daniel Ellis, Vivek Pachchigar, Jazline Rebollar (University of Illinois Urbana-Champaign); Nabiel Abuyazid (Lam Research Corporation); Necip Üner (Middle East Technical University); Ivan Shchelkanov (Starfire Industries, LLC); Brian Jurczyk (Starfire Industries); Jessica Krogstad, Mohan Sankaran (University of Illinois Urbana-Champaign)

The reduction of iron ore is a key step in steel production. There has been growing interest in applying plasmas to overcome thermodynamic and kinetic limitations with molecular hydrogen as a feedstock. Microwave excitation is of particular interest because of the potential to energy efficiently generate reactive plasma species. Previous studies have been carried out at low (vacuum) pressure or at high temperatures where the contribution of plasma species to the reduction process were not clear.

Here, we studied an atmospheric-pressure, microwave-powered hydrogen plasma for iron oxide reduction. By using a solid-state amplifier to generate the microwave power and a coaxial geometry to transmit the radiation and excite the gas, a plasma jet free from any surface is produced which can be used to treat a material downstream at low temperatures (<~400 oC). Using this setup, we treated thin films of iron oxide (hematite) powder to minimize diffusional resistance. The extent of reduction at various process conditions was evaluated by mass loss measurements and X-ray diffraction. The reduction was correlated with plasma properties by optical emission spectroscopy (OES). In particular, the density of hydrogen radicals in the plasma volume was obtained by actinometry and the transport of hydrogen radicals to the iron oxide surface was estimated by a one-dimensional diffusion-advection-recombination model. The surface temperature of the film was obtained by optical infrared pyrometry. All together, we were able to isolate the role of a plasma-activated species, the hydrogen radical, and demonstrate its capability for low-temperature reduction. In addition, a kinetic analysis was performed to obtain an apparent activation energy of ~50 kJ/mol, compared to purely thermal reduction of 92 kJ/mol.

Session Abstract Book
(287 KB, Jun 15, 2025)
Time Period TuA Sessions | Abstract Timeline | Topic PS Sessions | Time Periods | Topics | AVS 71 Schedule