AVS 66 Plasma Science and Technology Division Sessions
Topic Abstract Book
(1MB, Apr 26, 2020)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS1+SE-MoM | Monday, October 21, 2019 8:20 AM | Atmospheric-Pressure Plasmas |
| PS2-MoM | Monday, October 21, 2019 8:20 AM | Plasma Modeling |
| PS+AS+EM+SS+TF-MoA | Monday, October 21, 2019 1:40 PM | Plasma-Surface Interactions |
| PS1-MoA | Monday, October 21, 2019 1:40 PM | Plasma-Liquid Interactions, Medicine, and Agriculture |
| PS+EM-TuM | Tuesday, October 22, 2019 8:00 AM | Advanced FEOL |
| PS-TuM | Tuesday, October 22, 2019 8:00 AM | Plasma Diagnostics and Sources I |
| PS+EM-TuA | Tuesday, October 22, 2019 2:20 PM | Advanced BEOL/Interconnect Etching and Advanced Memory and Patterning |
| PS-TuP | Tuesday, October 22, 2019 6:30 PM | Plasma Science and Technology Poster Session |
| PS+EM-WeM | Wednesday, October 23, 2019 8:00 AM | Plasma Processing of Materials for Energy |
| PS-WeA | Wednesday, October 23, 2019 2:20 PM | Commemorating the Career of John Coburn (ALL INVITED SESSION) |
| PS-ThM | Thursday, October 24, 2019 8:00 AM | Plasma Diagnostics and Sources II |
| PS+2D+EM+SS+TF-ThA | Thursday, October 24, 2019 2:20 PM | Plasma-Enhanced Atomic Layer Etching |
| PS+SS-ThA | Thursday, October 24, 2019 2:20 PM | Plasma Conversion and Enhanced Catalysis for Chemical Synthesis |
| PS+2D+SE+TF-FrM | Friday, October 25, 2019 8:20 AM | Plasma Deposition and Plasma-Enhanced Atomic Layer Deposition |