AVS 66 Atomic Scale Processing Focus Topic Sessions
Topic Abstract Book
(670KB, Apr 26, 2020)
Topics
| Time Periods
| Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| AP+2D+EM+PS+TF-MoM | Monday, October 21, 2019 8:40 AM | Area Selective Deposition and Selective-Area Patterning |
| AP+EL+MS+PS+SS+TF-TuA | Tuesday, October 22, 2019 2:20 PM | Advancing Metrology and Characterization to enable Atomic Layer Processing |
| AP+BI+PS+TF-WeM | Wednesday, October 23, 2019 8:00 AM | Surface Reaction Analysis and Emerging Applications of Atomic Scale Processing |
| AP+PS+TF-ThM | Thursday, October 24, 2019 8:00 AM | Thermal Atomic Layer Etching |
| AP-ThP | Thursday, October 24, 2019 6:30 PM | Atomic Scale Processing Poster Session |