AVS 66 Session NS+2D+QS-ThM: Direct Atomic Fabrication by Electron and Particle Beams & Flash Session

Techniques based on multiprobe scanning tunneling microscopy (MP-STM) allow determination of charge and spin transport in variety of systems supported on surfaces of solid materials. In classical 2- and 4-probe methods STM tips are navigated by scanning electron microscope or high-resolution optical microscope typically in micrometer scales down to hundreds of nanometers. These MP-STM methods are currently regarded as universal tools for in-situ characterization of mesoscopic transport phenomena [1,2].

Such a mesoscopic experimental paradigm has recently been changed by downscaling of 2-probe STM experiments towards the atomic level [3,4]. In this case current source and drain probes are positioned in atomically defined locations with respect to the characterized nanosystems. Our experiments rely on fully STM-based tip positioning protocol with probe-to-probe separation distances reaching tens of nm [3,4]. Such probe-to-probe lateral positioning precision is combined with about pm vertical sensitivity in probe-to-system contacts. These two factors enable realization of two-probe scanning tunneling spectroscopy (2P-STS) experiments, where transport properties can be characterized by macroscopic probes kept in atomically defined tunneling conditions [4].

Here, we will apply 2P-STS methodology to probe quantum transport properties in functional systems: graphene nanoribbons (GNRs) epitaxially grown on the sidewalls of silicon carbide (SiC) mesa structures. These GNRs display ballistic transport channels with exceptionally long mean free paths and spin-polarized transport properties as proven by mesoscopic multiprobe transport experiments [5-7]. Interestingly, the nature of these ballistic channels remains an open question. We will show that 2P-STS experiments give new insight into quantum origin of the transport behaviors.

[1] Li, A.-P. et al., Adv. Funct. Mater., 23 (20), 2509-2524 (2013)

[2] Voigtländer B. et al., Rev. Sci. Instrum., 89(10), 101101 (2018)

[3] Kolmer M. et al., J. Phys.: Condens. Matter, 29(44), 444004 (2017)

[4] Kolmer M. et al., Nat.Commun., 10, 1573 (2019)

[5] Baringhaus J., Nature, 506, 349–354 (2014)

[6] Aprojanz J. et al., Nat.Commun., 9, 4426 (2018)

[7] Miettinen A.L. et al., submitted, arXiv:1903.05185 (2019)

Nanofabrication requirements for FIB technologies are specifically demanding in terms of patterning resolution, stability and the support of new processing techniques. Moreover the type of ion defines the nature of the interaction mechanism with the sample and thus has significant consequences on the resulting nanostructures [1]. Therefore, we have extended the technology towards the stable delivery of multiple ion species selectable into a nanometer scale focused ion beam by employing a liquid metal alloy ion source (LMAIS) [2]. This provides single and multiple charged species of different masses, resulting in significantly different interaction mechanisms. Nearly half of the elements of the periodic table are made available in the FIB technology as a result of continuous research in this area [3]. This range of ion species with different mass or charge can be beneficial for various nanofabrication applications. Recent developments could make these sources to an alternative technology feasible for nanopatterning challenges. In this contribution the operation principle, the preparation and testing process as well as prospective domains for modern FIB applications will be presented. As example we will introduce a GaBiLi LMAIS [4]. It enables high resolution imaging with light Li ions and sample modification with Ga or heavy polyatomic Bi clusters, all coming from one ion source. For sub-10 nm focused ion beam nanofabrication and microscopy, the GaBiLi-FIB or the AuSiGe-FIB could benefit of providing additional ion species in a mass separated FIB without changing the ion source.

References

[1] L. Bruchhaus, P. Mazarov, L. Bischoff, J. Gierak, A. D. Wieck, and H. Hövel, Comparison of technologies for nano device prototyping with a special focus on ion beams: A review, Appl. Phys. Rev. 4, 011302 (2017).

[2] L. Bischoff, P. Mazarov, L. Bruchhaus, and J. Gierak, Liquid Metal Alloy Ion Sources – An Alternative for Focused Ion Beam Technology, Appl. Phys. Rev. 3 (2016) 021101.

[3] J. Gierak, P. Mazarov, L. Bruchhaus, R. Jede, L. Bischoff, Review of electrohydrodynamical ion sources and their applications to focused ion beam technology, JVSTB 36, 06J101 (2018).

[4] W. Pilz, N. Klingner, L. Bischoff, P. Mazarov, and S. Bauerdick, Lithium ion beams from liquid metal alloy ion sources, JVSTB 37, 021802 (2019).

Precision control of interfacial structures and electronic properties is the key to the realization of functional heterostructures. Here, utilizing the scanning tunneling microscope (STM) both as a manipulation and characterization tool, we demonstrate the fabrication of a heterostructure in a single atomically precise graphene nanoribbon (GNR) and report its electronic properties¹. The heterostructure is made of a seven-carbon-wide armchair GNR (7-aGNR) and a lower band gap intermediate ribbon synthesized bottom-up from a molecular precursor on an Au substrate. The short GNR segments are directly written in the ribbon with an STM tip to form atomic precision intraribbon heterostructures. Based on STM studies combined with density functional theory calculations, we show that the heterostructure has a type-I band alignment, with manifestations of quantum confinement and orbital hybridization. We further investigate the negative differential resistance (NDR) devices using the GNR heterostructure based double-barrier models². Our computational results indicate that nanoscale engineering for NDR needs to consider atomic size effect in design and atomic precision in fabrication. This combined theoretical-experimental approach opens a new avenue for the design and fabrication of nanoscale devices with atomic precision.

References

1. Ma, C.; Xiao, Z.; Huang, J.; Liang, L.; Lu, W.; Hong, K.; Sumpter, B. G.; Bernholc, J.; Li, A.-P. Direct writing of heterostructures in single atomically precise graphene nanoribbons. Phys. Rev. Materials 2019, 3, 016001.

2. Xiao, Z.; Ma, C.; Huang, J.; Liang, L.; Lu, W.; Hong, K.; Sumpter, B. G.; Li, A. P.; Bernholc, J. Design of Atomically Precise Nanoscale Negative Differential Resistance Devices. Adv. Theory Simul. 2018, 2, 1800172.

Recent advances in CVD-growth consistently yield high quality 2D materials for large(er) scale fabrication. Monolayers of molybdenum and tungsten diselenide and suflide, graphene, and other exotic 2D materials are becoming routine in fabrication of functional electronic and optoelectronic devices. In order to attain novel functionalities, it is critical to tune and engineer defects in 2D materials directly with nanometer precision. Advances in ion beam-based imaging and nanofabrication techniques have offered a pathway to precisely manipulate 2D materials and offer a roadmap to create junctions, amorphized areas, and introduce dopants for new types of electronic devices. Here, we demonstrate the use of a focused helium and neon ion beams in a scanning helium ion microscope (HIM) in tailoring material functionality in MoSe2, WSe2, CuInP2S6 and graphene.

The helium ion microscope can “direct-write” capabilities, capable of both imaging and nanofabrication with Helium and Neon gases, thus making it an excellent candidate for processing a wide range of 2D, and conventional materials. We explore milling by the helium and neon ion beams of suspended and supported samples in order to control material’s electronic and mechanical properties. We validate the results with other chemical imaging techniques such as Scanning Transmission Electron Microscopy, correlated band excitation (BE) scanning probe microscopy, and photoluminescence (PL) spectroscopy.

Acknowledgement

This work was conducted at the Center for Nanophase Materials Sciences (CNMS), which is a U.S. Department of Energy (DOE) Office of Science User Facility.