AVS2012 Session EW-WeM: Exhibitor Technology Spotlight
Wednesday, October 31, 2012 10:20 AM in Room West Hall
Wednesday Morning
Time Period WeM Sessions | Abstract Timeline | Topic EW Sessions | Time Periods | Topics | AVS2012 Schedule
| Start | Invited? | Item |
|---|---|---|
| 10:20 AM |
EW-WeM-8 Mass Spectrometer Now Supports Process Control
Steve Lass (Brooks Automation) With the introduction of the 835 Vacuum Quality Monitor and 835 Differential Pumping System, Granville-Phillips has added key control features and extended the operating pressure range to enable process monitoring and control. Driving outputs from user-defined equations which utilize the partial pressures from this gas analysis system provides the ability to start and stop a process based on specific conditions. And differential pumping allows operation at both process and base-out pressures. Process pressure operation together with the features required for process control will be covered. |