AVS2012 Session EL+TF+AS+EM+SS-TuP: Spectroscopic Ellipsometry Poster Session

Iron pyrite (FeS₂) and samarium sesquisulfide (Sm₂S₃) are transition metal chalcogenides characterized as absorbing semiconductors with bandgaps of 0.95 eV and 1.8 eV respectively. Synthesis of both n-type and p-type samples have been reported in the form of single crystals and thin films for both materials. As a result of these properties they have received considerable interest as photovoltaic absorber materials. We present the characterization of FeS₂ and Sm₂S₃ thin films using spectroscopic ellipsometry. FeS₂ thin films were synthesized by sulfurizing DC magnetron sputtered iron films and reactive ion sputtered iron (III) oxide films in H₂S / Ar atmosphere. Sm₂S₃ thin films were synthesized by reactive ion sputtering of Sm in an H₂S / Ar atmosphere. This analysis gives the optical properties of chalcogenide films from near-UV (300 nm) to the mid-IR (20 μm). This can then be correlated to the structural and electronic properties as well. The analysis is corroborated with results obtained from Raman spectroscopy, scanning electron microscopy, profilometry, X-ray diffraction (XRD), and Van der Pauw measurements. The ellipsometric results can be used to access different processing methods for synthesizing FeS₂ and Sm₂S₃, to determine the presence of different phases and intermediate products. This work will lay the foundation for employing in situ ellipsometry as a process monitor and quality control tool during manufacture of earth abundant chalcogenide thin films.

Germanium has important applications in photovoltaics as a substrate for III/V triple-junction solar cells, especially in space vehicles and for terrestrial concentrator-based applications. Unfortunately, the optical properties of germanium (complex refractive index and absorption coefficient) and their temperature dependence (important to consider the effects of the space environment or the radiation-induced heating in concentrators) are not as well known as for silicon, which limits the accuracy of modeling for solar cells and Ge-based optical interconnects. In this work, we report precision measurements of the complex refractive index of germanium from 0.5 to 6.6 eV at room temperature using variable-angle spectroscopic ellipsometry. To improve accuracy, especially at photon energies below 2 eV, we used a Berek waveplate compensator. By cleaning a commercial Ge wafer in isopropanol followed by deionized water, we were able to reduce the native oxide thickness to 1.3 nm. Heating the wafer in UHV at 700 K did not reduce the oxide thickness further. (The oxide thickness can be determined with precision measurements of Δ below the band gap on a single-side polished wafer.) From the ellipsometric angles of the Ge wafer measured at three angles of incidence (65, 70, and 75° ), we calculated the dielectric function from 0.5 to 6.6 eV, by correcting for the effects of a native oxide.

Mounting our wafer in a compact UHV cryostat allowed temperature-dependent measurements from 80 to 700 K at 70° angle of incidence. Using similar methods as described above, we determined the dielectric function at different temperatures. We also determined the critical-point parameters (amplitude, energy, phase angle, and broadening) of the E₀, E₁, E₁+Δ₁, E₀’, and E₂ critical points as a function of temperature. To separate the non-resonant contributions from the critical-point line shapes, we calculated the second derivative of the dielectric function with respect to photon energy and fitted the result to analytical line shapes with two-dimensional critical points. In general, our results are in good agreement with those of Viña et al. However, our results cover a wider spectral range and are more accurate because of the use of a compensator. Work is in progress to form thermal oxides on Ge wafers by annealing in oxygen, which will allow a multi-wafer analysis for Ge similar to work on Si by Herzinger et al.

This work was supported by NSF (HRD-0803171 and DMR-11104934) and the New Mexico Louis Stokes Alliance for Minority Participation.

Reference: L. Viña, S. Logothetidis, M. Cardona Phys. Rev. B 30, 1979 (1984).