AVS2008 Session EW-TuM: Exhibitor Workshops
Tuesday, October 21, 2008 10:00 AM in Room Exhibit Hall
Tuesday Morning
Time Period TuM-EW Sessions | Abstract Timeline | Topic EW Sessions | Time Periods | Topics | AVS2008 Schedule
| Start | Invited? | Item |
|---|---|---|
| 10:00 AM |
EW-TuM-1 RFG Vacuum System PC/PLC Controller
C. Malocsay (Semicore Equipment Inc.) A full featured vacuum sequencer for pump, vent & vacuum interlocking for semi-automated process control. The RFG is a PC based graphical user interface (GUI) with VGA touch screen. Vacuum sequencing and input / output controls are provided by an embedded PLC. The RFG integrates easily with a host of industry proven power supplies, vacuum gauges and deposition instruments. |
|
| 10:20 AM |
EW-TuM-2 New High Performance Vacuum Gauge Controller
B. Langellotti, S. Raczelowski (Varian, Inc.) Varian's new vacuum gauge controller provides unprecedented capacity, performance and flexibility in a cost effective, standard half-rack package. A single controller can simultaneously operate up to four hot filament (or four cold cathode) gauges and four convection gauges, up to five ionization gauges, or up to twelve convection gauges. Expansion or re-configuration in the field is easy to do. Serial communications (RS-232 or RS-485), eight set points, and universal voltage compatibility are standard in all units. A programmable dot matrix LCD provides display flexibility, and simple screen organization and navigation makes the unit extremely easy to use. Drop down gauge selection automatically sets the emission current, sensitivity and overpressure. The screen displays up to eight gauges and pressures simultaneously, and permits the user to label each gauge. A large-font feature provides visibility from 20 feet. |