AVS2006 Friday Morning

Probing Interactions of Ge with Chemical and Thermal SiO₂ to Understand Selective Growth of Ge on Si during Molecular Beam Epitaxy

Chemical Vapor Deposition of WN_xC_y from Cl₃[Me₂NC(NⁱPr)₂]W(NⁱPr): Film Characterization and Evaluation for Diffusion Barrier Application

RBS, ERDA and XPS Study of Ca0.28Ba0.72Nb2O6 Epitaxial Thin Films Prepared by PLD for Electro-Optical Applications

Ion-Induced Effects during Reactive Sputter Deposition of ITO Films at the RF-biased Electrode

Electrospray Deposition of Macro-Molecular Thin Films in High Vacuum Directly From Solution for Surface Science Applications

Characterization of Island Growth during Initial Stages of Atomic Layer Deposition of WNx on SiO2

Structural Characterization of HfO₂ Based Silicon CMOS Stacks

Back Side SIMS Depth Profile Analysis of a High-k Dielectric Material

Copper Diffusion Barrier Performance of PEALD TaSiNC

Synthesis and Characterization of Nanoscale Al-Si-O Gradient Membranes for Gas Analytical Microdevices

Studies of Vanadium Pentoxide Thin Films as a Function of Number of Lithium Ion Intercalation Cycles

Probing Relations Between Molecular Orientation and Electron Transfer in Immobilized Metalloprotein Films Using Frequency-Domain, Planar Waveguide Spectroelectrochemistry

Volumetric Interpretation of Protein Adsorption: Partition Coefficients, Interphase Volumes, and Free Energies of Adsorption to Hydrophobic Surfaces

Adsorption-Induced Changes in Protein Bioactivity Correlated with Adsorbed Protein Orientation and Conformation

SIMS Detection of Peptides on Alkanethiol Self-Assembled Monolayers

Temperature Stability of Protein Monolayers Studied by Ellipsometry in the Infrared, Visible and Ultraviolet Spectral Regions

Fibronectin Adsorption onto Tantalum-Oxide Examined by QCM-D and Elipsometry: The Influence of Nano-Roughness

Electrodeposition of Chitosan for BioMEMS: Real-Time, In-Vitro, and Post-Process Characterization

Biomolecule Adsorption Studies at Interfaces using Sum Frequency Generation Vibrational Spectroscopy, Quartz Crystal Microbalance, Dielectric Spectroscopy, and Conducting-Probe Atomic Force Microscopy

Low-Fouling Amine-Terminated Poly(ethylene Glycol) Thin Layers and Effect of Immobilization Conditions on Their Mechanical and Physicochemical Properties

Single Molecule Force Spectroscopy on 5'-Methyl thioadenosine/S-Adenosylhomocysteine Nucleosidase (MTAN) from Escherichia Coli by Atomic Force Microscopy

Single-Molecule Force Spectroscopy of Stimulus-Responsive Polypeptides

Scanning Tunneling Microscopy Study of Azobenzene and Azobenzene-Derivatives

Structural Dependence of Charge Transport in Organic Molecular Films

Temperature Dependent Conduction and Charge Tunneling in Nanoparticle-Molecule-Nanoparticle Bridging Structures

Switching and Conductance Peaks in Metal-Molecule-Silicon Devices with Nitro-Containing Molecular Layers

Towards Molecular Electronics: Controlling and Understanding Metallic Contact Formation on Patterned Self-Assembled Monolayers

Energy-Level Alignment at Thiol/Metal Interfaces: A Model "Molecular Wire" Chemisorbed on Ag, Cu, Au, and Pt.

Fabrication of Semiconductor-Molecule-Semiconductor (SMS) Devices

Molecular Tunnel Junctions Incorporating Nickel-Octanedithiol Multilayer Thin Film

Electrical Transport Measurements on Conjugated Molecules using Nanogap Electrodes on Cleaved AlGaAs Planes

Dynamics of Molecular Quantum-Dot Cellular Automata Devices and Circuits

Chemical Analyses and Electrical Studies of HfO₂/Y₂O₃, Y₂O₃/HFO₂ Bilayered and Y_xHf_yO_z Intermixed Dielectric Materials for MIM Capacitors

Process-Dependent Interface States at Mo/Hafnium Oxide/Si Interfaces

Materials Challenges for High Permittivity Gate Dielectrics and Metal Gate Electrodes

Molecular Beam Epitaxy of Multifunctional Materials Using a Chloride Refractory Metal Chemistry

Magnesium Oxide Thin Film 'Bridge' on Hexagonal Silicon Carbide for Integration of Functional Oxides

Zirconium Dioxide Formation on Silicon Surfaces by Metal-Organic Chemical Vapor Deposition in UHV

Controlling Interfacial Reactions between HfO₂and Si using Ultra-Thin Diffusion Barriers

Comparison of the Calculated Electronic Structure of Oxygen and Nitrogen Adsorption onto Ge(100)

Thermal Stability of High-k Dielectrics on Ge(001)

Oxidation Properties of Al-nanostructures on Si Surfaces

Double-Sided Epitaxy on Si Nanowire Ribbons*

Silicidation and Oxidation of Silicon Nanowires

Large Area, Dense Si Nanowire Array Chemical Sensors

Controlling the Width of Self Assembled Nanowires on the Si(001) Surface

Synthesis and Characterization of Aligned III-Nitride Nanowire and Heterostructure Nanowire Arrays

Epitaxially Grown III-V Nanowires for Quantum Device Applications

Electrical Characterization of Nanowires with the LEEPS Microscope

Germanium Nanocrystals and Nanowires: Morphological Control, Surface Characterization, and Applications

Fabrication of Tin Oxide Nanowires Based Nano-Micro Sensor for Room Temperature Hydrogen Detection

Atomic Level Analysis of Carbon Nanotubes and Graphite Nanofibers by the Scanning Atom Probe

Subplantation and Interface Modification during Ion Assisted Low-Pressure Plasma Deposition of Oxides at the RF-Biased Electrode

Process Performance of H₂ Remote Plasma Based Photoresist Ashing Processes and Their Influence on ULK Materials Modifications

Measurement of Etching Kinetics and Surface Roughening of SiO2 and Coral Films during Plasma Etching

Spectroscopic Studies of Ammonia Plasmas

Study of Downstream NH₃ Plasma Damage to Low k Dielectrics

Investigation of the Plasma-Activated Catalytic Formation of Ammonia in N₂ - H₂ Plasma

Transient Differential Charging of High Aspect Ratio Dielectric Features

On-wafer Monitoring of Charge Accumulation during Plasma Etching Processes

An In-situ Diagnostic to Detect Charging During Plasma Etching

Reduction of UV Irradiation Damage in CCD Image Sensor using CF₃I Gas Plasma

Defect Generation due to UV Radiation in Plasma Etching Process

Evaluation of Sticking Probability of Ti Atoms in Sputtering Deposition

Substrate Temperature Sensor Measurements and Analysis in an Inductively Coupled Plasma

In-Situ Characterization of Oxygen Plasma Surface Etching by Infrared-Visible Sum Frequency Spectroscopy

Application of In Situ Plasma Analysis on Deep Trench Plasma Etch Hardware Design and Process Development

2D-t Plasma Image during One Bias Period of a 2f-CCP in Ar by Emission CT

Advanced Plasma Sources for the Next-Generation Processing

Real-time, Noninvasive Monitoring of Ion Energy and Ion Current at Insulating Electrodes

The Ion Energy Distributions in a High Power Impulse Magnetron Discharge

Monitoring of Electron Density in Plasma Reactor with Frequency Shift Probe

Energy Distribution and Flux of Fast Neutrals and Residual Ions Extracted out of High Aspect-Ratio Holes in a Neutral Beam Source

Electron Energy Distribution Function Measurement in Radio-Frequency Plasmas Produced in Insulated Vessels

Coatings for Aero Engine Applications: Current Status and New Developments

Effect of a BN Interlayer on the Tensile Strength of NiAl Coated Sapphire Fibers

Decomposition Process of Ti₃SiC₂(0001) Thin Films

Synthesis, Structure and Properties of New Types of M-A-X Phase Films

Growth and Characterization of Ti-Al-C Thin Films Deposited by dc Magnetron Sputtering from a Ti₂AlC Compound Target

Reactive dc Magnetron Sputtering of Ti-A-CN (A=Si, and Ge) MAX-Phase Thin Films

The Relation of Tribochemistry to Superlubricity in DLC Films

Synthesis and Tribological Properties of Novel 'Chameleon' Coatings

Tribochemical Studies on Single Crystal Surfaces using Atomic Force Microscopy

Reduction of Sn-Oxide Phases on PtSn Alloys

First Principles Studies of CO Adsorption and Oxidation on Cu2O(100)*

Structure, Energetics and Reactivity of Step Edges on Anatase TiO2(101)*

Nitrogen Doping of TiO₂ Single Crystals

Growth and Properties of High-Quality Epitaxial N-doped TiO₂(110) Grown by Molecular Beam Epitaxy

N and C Doping in TiO2 Using Ion Implantation for Photocatalysis Applications

STM Characterization of TiO₂(011)-2x1 Surface Morphology

Structure and Properties of MBE-grown Epitaxial Anatase Films with Rutile Nanocrystalline Inclusions

Sputtering Induced Vacancy Cluster Formation on TiO₂(110)

Atomic Structure of the MgO(111)-(√3x√3)R30° Phase by Direct-Method Analysis of Surface X-Ray Diffraction Data

Surface Structure of BaTiO₃ (001)

Parameter Uncertainties and Higher-Order Effects in the Analytic First-Order Solution for the Complex Refractive Index and Thickness of a Thin Film on a Substrate

Optical and Morphological Studies on SiO₂-like Films Deposited by Means of Ion Bombardment- Assisted Expanding Thermal Plasma CVD

Real-Time X-ray Studies of Surface and Thin-Film Processes

Novel Annealing Treatments Applied to Binary Alloy Thin Films

In-Situ Studies of Stress Evolution during the Heteroepitaxial Growth of Group III-Nitrides

In Situ ATR - FTIR Spectroscopy of Hf (IV) Tert Butoxide and Tetrakis Ethyl Methyl Amino Hf Adsorption on Si (100), Si (111) and Ge

In Situ Defect Spectroscopy: Probing Dangling Bonds during a-Si:H Film Growth by Subgap Absorption

In Situ Monitoring of Hafnium Oxide Atomic Layer Deposition

In-situ and Real-Time Spectroscopic Ellipsometry on Organic Semiconductors during Growth