AVS2005 Plasma Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
Session Code | Start | Session Name |
---|---|---|
PS-MoM | Monday, October 31, 2005 9:00 AM | Plasma Diagnostics |
PS1-MoA | Monday, October 31, 2005 2:00 PM | Dielectric Etch I |
PS2-MoA | Monday, October 31, 2005 2:00 PM | Silicon Etching |
PS-MoP | Monday, October 31, 2005 5:00 PM | Plasma Science and Technology Poster Session |
PS+BI-TuM | Tuesday, November 1, 2005 8:20 AM | Plasmas in Bioscience |
PS-TuM | Tuesday, November 1, 2005 8:20 AM | Plasma Surface Interactions I |
PS-TuA | Tuesday, November 1, 2005 2:00 PM | Dielectric Etch II |
PS-TuP | Tuesday, November 1, 2005 4:00 PM | Plasma Science and Technology Poster Session |
PS+TF-WeM | Wednesday, November 2, 2005 8:20 AM | Plasma Enhanced CVD and ALD |
PS-WeM | Wednesday, November 2, 2005 8:40 AM | Advanced Gate Stack Fabrication |
PS-WeA | Wednesday, November 2, 2005 2:00 PM | Atmospheric Plasmas and Microdischarges |
PS+MS-ThM | Thursday, November 3, 2005 8:20 AM | Process Equipment Modeling |
PS-ThM | Thursday, November 3, 2005 8:20 AM | Plasma-Surface Interactions II |
PS+TF-ThA | Thursday, November 3, 2005 2:00 PM | Emerging Plasma Applications |
PS-ThA | Thursday, November 3, 2005 2:00 PM | Plasma Sources and Equipment |
PS-FrM | Friday, November 4, 2005 8:20 AM | Plasma Surface Interactions III |