AVS2003 Tuesday Afternoon

Spatially Defined Immobilization of Biomolecules on Microstructured Polymer Substrate*

Low-Temperature STM Manipulation of Single Bio Molecules

Base-dependent Displacement of Thiolated DNA Films by Mercaptohexanol (MCH)

Neuron Pathfinding and Surface Chemistry, Patterning and Reactions

In-situ Spectroscopic Study of Thermal Phase Transition of Supported Hybrid Bilayer Membranes

Spectroscopic Quantification of Covalently Immobilized Oligonucleotides

Photoionization for Trace Measurement of DNA on Surfaces

Utilization of Polyatomic Primary Ion Sources for Analysis of Drug Delivery Systems by Secondary Ion Mass Spectrometry (SIMS)

Invited Paper

Enhanced Tunneling in Symmetric Stacked Gate Dielectrics with Ultra-thin HfO₂ Layers (0.5-10. nm) Sandwiched between Thicker SiO₂ Layers (1.5 nm)

Observation of Bulk HfO₂ Defects by Spectroscopic Ellipsometry

Chemically Abrupt Interfaces between Lanthanum Aluminate and Silicon for Alternative Gate Dielectric Applications

Medium Energy Ion Scattering Studies of the Structure and Composition of Epitaxial SrTiO₃ Films on Silicon

In-situ and Ex-situ Characterization of Barium Strontium Titanate Thin Films on Thermal SiO₂/Si Substrates

Band Offsets at Ba- SrTiO₃ / Si Interfaces

Electronic Materials Growth: A Retrospective and Look Forward

Electronic Materials Theory: Interfaces and Defects

Progress in Electronic Materials Characterization

Making Contact - The Evolution of Materials for Silicon Device Contacts and Interconnections

Many-spin Hamiltonian for the Single-molecule Magnet Mn12-Ac

Magnetic Interaction in Assemblies of Nanometer-sized Fe Dots on Cu (111)

Contribution of Orbital Magnetism to the Magnetism of Monodisperse Nanoparticles

Self-assembly of FePt Nanoparticles on Si(100) Surface

Submicron Cobalt Particle Fabrication by Ion Beam Induced Chemical Vapor Deposition (IBICVD)

Magnetic Nanostructures Made by Self-assembled Block Copolymer Lithography

Magnetic Properties of Low-dimensional Nanostructures on an Insulator

Magnetic Reversal of Co/Pd Multilayer Films and Sub-100nm Islands

Development of a Deep Phase Fresnel Lens in Silicon

Fabrication and Characterization of a Capacitive Micromachined Shunt Switch

Design and Process Integration of an Electric Induction Micromotor

Microfabrication of a Pressure Sensor Array Using 3D Integration Technology

Simulation of Field Emission-based Pressure Sensors

Nanotribological Characterization of Digital Micromirror Devices using Atomic Force Microscopy

PZT Dry Etching using ICP Etcher for MEMS Devices

Integration of Silicon Anisotropic Wet Etching and BCB Processes

Optical Characterization of Poly-Dimethyl Siloxane (PDMS) during Inductively Coupled Plasma Processing for Implementation in a PDMS-based Photonic Crystal*

The Future of Chip Making Is Different --- Or Is It?

Technology and Manufacturing Challenges in High Tech

The Future of Semiconductor Lithography

CMOS Scaling Limits and Opportunity for Nanoelectronics

John Bardeen and Transistor Physics

OLEDs and Solid State Lighting

Hybrid Electroluminescent Devices Based on Conjugated Polymers and CdS:Mn/ZnS Core/Shell Nanocrystals

Large Magnetic Field Effects in Organic Light Emitting Diodes (OLED) based on Alq3

The Application of DLC Layer for Polymeric Electroluminescent Devices

Photonic Crystals and Nanocomposite Materials

Patterning Magnetic Recording Media by Imprinting

Buffer Layer Assisted Laser Patterning of Metals at the Nanometer Scale

Low-Temperature Nanolithography using Energetic Neutral Atoms

Self-Assembling Circuits?

Fabrication and Electrical Characterization of 2D Dopant Nanostructures in Si

Polymer Patterning using a Soft Inkpad

Influence of Stoichiometry and Structure on the Local Oxidation of Metal Films

Dielectric Etch: Past, Present and Future

Depth Dependent Spatial Frequency Analysis of Post-Etch Sidewall Roughness

Investigation of Bottom-emitted Particles and their Influence on the Etch Characteristics of Sidewall in the Fluorocarbon Plasma Etching

Bilayer Mask Process for sub-90 nm Patterning using a New 100MHz CCP RIE

Etching Bilayer Resists in Ammonia Based Plasmas

Model for Dielectric Etching in C₄F₆ Based Inductively Coupled and Dual Frequency Plasmas

A Computational Investigation of Plasma and Surface Chemistry During Fluorocarbon Plasma Etching of SiO₂ in Ar/c-C₄F₈/O₂/CO Magnetically Enhanced Capacitively and Inductively Coupled Plasmas¹

Kinetic Study on SiO₂ Dry Etching Process by Chemical Reaction Engineering Approach

Selective Silicon Nitride Etching by ECR Plasmas Using SF6 and NF3 Based Gas Mixtures

Complex Formation between Magnesocene (MgCp₂) and NH₃: Origin of the "Memory Effect"

Real-time Optical Monitoring of Gas Phase Kinetics in InN Vapor Phase Epitaxy at Elevated Pressures

Chemical Complexities of AlGaInN MOCVD

Ab initio Prediction of the Gas-Phase Precursors for AlN Sublimation Growth¹

Reflectance Interferometry During III-V Nitride Growth, Much More than a Growth Rate Monitor

Real-time Diagnostics of OMCVD Epitaxy with an Integrated Rotating-compensator/Rotating-sample Polarimeter

GaN Nucleation Layer Evolution on Sapphire

Investigations of Plasma Etching and Contact Processing on AlGaN Alloys Containing 0 to 50% Al

Morphological Evolution of GaAs Surface during Damage-free Etching

Synthesis and High Temperature Performance of SiAlON Thin Film Coatings

Synthesis and Characterization of Nanolayered TiO_x/Al₂O₃ Coatings for Possible Elevated Temperature Applications

Advances in Surface Engineering for High Temperature and Wear Resistant Applications

Processing and Properties of NiAl-Hf Coatings via DC Magnetron Sputtering

Surface Alloying of Aluminum Films by Electron Beam Evaporation on Zirc-4 Substrates and Hydrothermal Crystal Growth in Sub-critical Condition

Surface Studies of the High Temperature Corrosion of Stainless Steel by Oxygen Contolled Lead-Bismuth Eutectic

Why Water Wets Precious Metals¹

Absence of Surface Water Crystallization

Surface Science - A New Tool for Laboratory Astrophysics

Formation and Dynamics of Water Clusters on Ru(001)

Comprehensive Structural Analysis of H₂O/MgO(111) using DLD-LEED and IR Spectroscopy

The Growth of Water Monolayers on Pd(111)

The Surface Chelate Effect

The Plasmons of ErAs (100)

Growth Characteristics of ErAs Interlayers in Metal/Ga_1-xAl_xAs Heterostructures

Some Tricks in Photoelectron Diffraction Experiments for Structural Investigations at Surfaces

Synthesis and Characterization of an Ordered Ge Overlayer and Pt₂Ge Compound on Pt(100)

New Structural Model for Au/Si(111)5x2 from First Principles

First Principles Study of the Stability of Ag Ultra-thin Films on III-V Substrates: An Interfacial Study

A Self-Assembled Two Dimensional Electron Gas: √7x√3 In on Si(111)

Buckling of Si and Ge(111)2x1 Surfaces

Dimer Structure of the Si(001)2x1 Surface Observed below 10K by Scanning Tunneling Microscope

Adsorption of Substituted Butadienes on Si(100)

Surface Chemistry of Conjugated Heteroatomic Compounds on Diamond and Silicon (100)

Reaction of Acetyl Chloride on Ge(100)-2x1: Formation of a Surface-bound Carbonyl

Diethyl Ether Reactions with the Si(100) Surface

Modification of Silicon Surfaces: Toward Functional Organic and Bioorganic Interfaces

Investigation of the Adsorption of Acetic Acid on Ge(100)-2x1

Electron Beam Effect of Diethylsilane on Si (100) Surfaces Investigated by TPD and LISD

Adsorption of Naphthalene on a Si(100)-2x1 Surface Investigated by Infrared Absorption Spectroscopy

Vapor-phase Adsorption Kinetics of 1-Decene on H-terminated Si(100)

Enhanced Conductivity in Post Deposition Annealed Spinel Oxide Films

Reactive-Environment, Hollow Cathode Sputtering: Basic Characteristics and Application to Al₂O₃ and Doped ZnO

Transparent Electronics: An Overview of Materials, Devices, and Applications

Expanding Thermal Plasma Deposition of Textured ZnO: Plasma Processes and Film Growth

Transparent Conducting Amorphous Zn-Sn-O Films Deposited by Simultaneous DC Sputtering

Highly Transparent and Conductive ZnO:Al Thin Films Prepared by Vacuum Arc Plasma Evaporation