AVS2003 Thursday Morning

Role of Vacuum Technology and Other Drivers in the Development of Surface Analysis

Valence-band X-ray Photoelectron Spectroscopic Studies of Phosphorus Oxides and Phosphates

Application of Electron Based Spectroscopies Combined with Chemical Derivatization for the Characterization of Black Carbon Surfaces

Comparison of X-ray and Electron Beam Induced Damage Rates

Charge Referencing in XPS Analysis of Self-assembled Nano-phase Particle (SNAP) Surface Treatments

Quantitative Depth Profiling of Silicon Oxynitride Films by Electron Spectroscopy

Characterization of Silicon-Oxynitride Dielectric Thin Films using Grazing Incidence X-Ray Photoelectron Spectroscopy

XPS Study of Ultrathin Ferroelectric Films

Auger Spectra Line Shape Study in Iron-Aluminum-Oxygen Reaction System

The Dispersion of Quantum Well States in Cu/Co/Cu(001)

Development and Implementation of Green Processes for Manufacturing

Environmental Accounting of Air Biofiltration using an Energy-based Life-cycle Assessment Approach

Living Machines Out of Control: Experiments in Autonomous Ecological Engineering

Enhanced Safety, Reliability and Cost Control with Integrated Gas Control Packages

Responsible Care(r): Protecting our Industry

Simultaneous Electrochemical and Tapping Mode Imaging of Soft Biological Samples with AFM Tip Integrated Nanoelectrodes and Nanobiosensors

Simultaneous Atomic Force Microscopy and Fluorescence Imaging of Supported Biomembranes

Force Spectroscopy Investigation of HIV Envelope Glycoprotein and Dual Antibody Complex using Atomic Force Microscopy

Multi-technique Studies of Bio-Interface Processes; QCM-D, (Nanoparticle) SPR, SERS, AFM, Electrical Impedance, and Cell Force Sensor

Coupling of his-tagged scFvs to Functionalized Lipid Assemblies for Array Based Sensing

Real-Time, Quantitative Surface Plasmon Microscopy Measurements of Protein Adsorption

Material and Surface Characterization of Electrodeposited Polysaccharide Chitosan Film as a Platform for Biomolecular Reactions in BioMEMS Systems

Infrared and Visible Spectroscopy of Anisotropic Spin-cast Chitosan Films

Self-aligned Silicides for Ohmic Contacts in CMOS Technology: TiSi₂, CoSi₂ and NiSi

Ni-Si Thin Films Reactions at Low Temperatures: Phase Identification and Sequence Characterization

Development of Ohmic Contact Materials for Compound Semiconductors

Indium-Based Ohmic Contacts to n-Type Gallium Antimonide

Long and Short Term Thermal Stability of Gate Metallizations on GaN/AlGaN/GaN Heterostructures

Compositional Shift in Al_xGa_1-xN Induced by Reaction with Metallic Thin Films

Low Temperature Chemical Vapor Deposition and Characterization of Ultra-thin Ruthenium for Copper Diffusion Barriers in ULSI Interconnects

Evaluating Ruthenium Thin Film Deposited on Silicon as a Directly Plate-able Cu Diffusion Barrier

ZrB₂ Diffusion Barriers: Conformal CVD Below 400 °C

Direct Electrical Detection of Specific Protein Binding at Surfaces

Autonomous DNA Testing for Bio-Detection

Magnetically Based Microarray Platform for Rapid Handheld Bioassays

Microfluidic Approaches to Improving Biosensor Performance

Comparison of Bioassay Surface Chemistries on Gold and Alumina Films

Biocatalytic Nanocomposites as Self-Cleaning Surface Coatings

Novel Surface-Segregating Materials for Chem-Bio Applications

Opportunities in Materials Chemistry at DARPA

Materials for Spin Injection Into GaN-Based Devices

Characterization of AlGaN and AlN Based Dilute Magnetic Semiconductors

Growth and Characterization of GaMnN/AlN Multiple Quantum Wells

Theory of Dilute Magnetic Semiconductors

Materials Characterization and Magnetic Studies of Epitaxial Co_xTi_1-xO_2-x Deposited on Si(001) by Molecular Beam Epitaxy

Ferromagnetic Co-doped Anatase TiO₂: Are All Growth Methods Created Equal?

Ferromagnetism in Optically Transparent Semiconducting Co Doped SnO_2-d Films

Elaboration and Characterisation of Cobalt Doped ZnO Thin Films for Spintronic Applications

Ferromagnetism in Cobalt Doped La_{0.5√sub 0.5}TiO_3-d Films

Autonomous Atom Assembly*

Combined Scanning Force Microscope and Mass Spectrometer

Imaging Semiconducting Samples by Scanning Capacitance Force Microscopy (SCFM) and Scanning Capacitance Microscopy (SCM)

AFM Force Measurements: MEMS Devices for Easy and Accurate Cantilever Spring-Constant Calibration

Thermal Approach to Cantilever Calibration over a 200 kHz Bandwidth

Are V-shaped Atomic Force Microscope Cantilevers Obsolete?

Electronic Properties of Individual Defects in Carbon Nanotubes by Scanning Probe Microscopy

Real-Space Imaging of the Vortex Lattice in V₃Si Using Low Temperature Scanning Tunneling Microscopy*

Adatom Hopping Induced by Tunneling Electrons: Br on Si(100)-(2x1)

Elucidation of the Electronic Properties of Isolated Alkanethiolate-Passivated Undecagold Clusters by Low Temperature Scanning Tunneling Microscopy and Spectroscopy

Analyses of Early Stages of Vertically Aligned Carbon Nanotube Growth

Iron-carbide Cluster Thermal Dynamics for Catalysed Carbon Nanotube Growth

Growth & Control Mechanisms for Directed Assembly of Vertically Aligned Carbon Nanofibers: Fundamental Studies and Nanotech. Applications

Synthesis of Carbon Nanotube Array by Radio-frequency Plasma Enhanced Chemical Vapor Deposition for Field Emission Application

Magnetic Entrapment of Carbon Nanotubes for the Fabrication of Electrically Conductive Bridging Structures

Novel Approaches to Developing Carbon Nanotube Based Polymer Composites

Filling and Chemical Modification of Carbon Nanotubes

Polyatomic-Ion Beam Induced Chemical Functionalization of Carbon Nanotube-Polystyrene Composites

AC Electrical Transport Behavior of Epoxy Matrix/Single-Walled Carbon Nanotube Composites

Reactive Sputtering of Metallic Tin in a Mixture Ar - O2 : Comparison between an Amplified and a Classical Magnetron Discharge

Selective Plasma-induced Deposition of Fluorocarbon Films on Metal Surfaces for Actuation in Microfluidics

Deposition of Transparent Tin Oxide Films by PECVD on Polymers

Temperature Dependence of the SiH₃ Surface Reactivity During Plasma Deposition of a-Si:H Studied by Time-resolved CRDS

Creation of SiOF Films with SiF₄/O₂ Plasmas: from Gas-Surface Interactions to Film Formation

Study of Fluorocarbon Deposition Mechanism with a Small Gap Structure in Fluorocarbon Plasmas

Plasma Chemistry and the Growth Kinetics of Silicon Nitride Deposited by the SiH₄-N₂ Reactant Mixture

Molecular Dynamics Simulations of Organic Polymer Etching by H₂/N₂ and NH₃ Plasmas

Smart Nanoprocess for Organic Low-k Film Etching

Etching Mechanisms of Methylsilsesquioxane Low-k Material in High Density Fluorocarbon Plasma

Low Damage Low-k Film Etching using Advanced Neutral Beams

Control of Degradation Thickness on SiOCH Surface

Three-dimensional Feature Profile Evolution during Etching of Porous Dielectric Materials

Etching of a Porous SiOC with Varied Porosity in Fluorocarbon Based-plasma

In-situ Real-time Monitoring of Profile Evolution During Plasma Etching

Critical Issues in Dual Damascene Etch

In-Situ Etch-Stop Etch for Cu/Low-k Damascene Etch Applications

Study of CO addition to C₄F₈ or C₄F₈/Ar Plasmas for Selective Etching of Organosilicate Glass (OSG) over SiC

Strain Engineering of SiGe/Si Structures

Strain Relaxation of Step-graded InAsP Buffers on InP Grown by Molecular Beam Epitaxy

Effects of InAlSb Buffer Layers on the Structural and Electronic Properties of InSb Films

Heteroepitaxy of III-Se Materials: Compatibility to Si and Their Growth Studied by In-situ Scanning Probe Microscopy

Characterization of High Quality GaAs(100) Films Grown on Ge(100) Substrates

In Situ Monitoring of Stress Relaxation in Semiconductors

Strain Effects in Si-Ge Growth on Vicinal Si Surfaces Prepared by Laser Texturing

Self-Assembly of Atomic Chains on Stepped Silicon

Length Scale Dependence of Evolution of Corrugations During Sublimation from Patterned Vicinal Si(111) Surfaces*

Current-Induced Pattern Formation on Vicinal Surfaces

Effects of Diffusion and Chemical Reactivity on Step Bunching: The Formation of Macrosteps During Etching

Equilibrium Morphologies for Cl-roughened Si(100) at 700 - 750 K: Experiments and Monte Carlo Modeling

Adsorbate Interactions and Roughening of Sub-monolayer Halogenated Si(100) Surfaces

Atomistic Modeling of Morphological Evolution During Active and Passive Oxidation of Si(100)

Oxygen Etching of Low- and High-Index Si Surfaces

Growth of Gd on the High-Index Si(113) and Si(5 5 12) Surfaces

Attempts on Synthesizing Linear Atomic Metal Chains on GaN(0001)

Oxide Nucleation Kinetics on Al(111): The Role of Short-range and Long-range Interactions between Chemisorbed O Atoms

Chemical Inhibition of Aluminum Surface Oxidation

Methane Dissociative Chemisorption on Ni(100): Closing the Non-equilibrium Gap between Surface Science and Catalysis

High Pressure STM Studies of Metal and Alloy Surfaces: Adsorption Induced Phase Separation

STM Observation of Model Catalysts in Action: from Vacuum to High Pressures

Universality in Heterogeneous Catalysis

Lateral Interactions in the Kinetics of Surface Reactions

Strategies for the Study of Methanol and CO Electrocatalysis on Nanometer-Scale Catalysts

The Water Formation Reaction on a Palladium and Platinum Catalysts, Studied with Laser-induced Fluorescence and Kinetic Modelling

Effect of Atomic Polarization on Adsorption on Ferroelectric Surfaces: BaTiO₃ (100)

Sodium Segregation and Morphology on Co₃O₄ Single Crystal Surfaces

Resonant Photoemission of Cobaltite Perovskites and Double Perovskites

Growth Modes in a System Requiring Bulk Mass Transport: Step Motion and Island Nucleation on TiO₂ (110) Exposed to Oxygen

The Effect of Nitrogen Doping on Rutile Single Crystals - A Photochemical Surface Science Study

STM Study of Defect Production on the TiO₂(110)-(1x1) and TiO₂(110)-(1x2) Surfaces Induced by UV-light

The Oxygen Chemistry of Rutile TiO₂(110) - A Comprehensive STM Study

Measuring Defect Sites on TiO₂(110): The CO₂ Probe

Surface Structure and Properties of Vanadia Supported on Anatase TiO₂(001)

Initial Stages of Cu₂O Nano-Clusters Formation on SrTiO₃(100)¹

Mechanisms and Energetics of H Insertion into Si-Si Bonds in Hydrogenated Amorphous Silicon Films

Effect of Crosshatch Formation on the Kinetics of Si_1-xGe_x Growth on Si(001) from Hydride Precursors

Initial Growth of High Rate Deposited Silicon Thin Films Studied by In-situ Spectroscopic Ellipsometry and Attenuated Total Reflection Infrared Spectroscopy

Sn-mediated Ge/Ge(001) Growth by Low-temperature Molecular Beam Epitaxy: Effects on Surface Roughening and Epitaxial Thickness

Understanding Radical-Surface Interactions in the Plasma-Assisted Deposition of Amorphous Hydrogenated Silicon

From Ab-initio Modeling to Experimental Thin Film Synthesis of a Novel Boron-oxygen-yttrium Phase

Low Temperature Nitride and Oxide Thin Film Growth using an Energetic Atom Source

Physical Self-assembly and the Nucleation of 3D Nanostructures by Oblique Angle Deposition¹

Component Requirements for ALD Technology

Towards Improved Control of PVD Processes for Nano-Structured Me-aC:H Coatings¹

A Portable Reference Gas for InSitu Calibration of Residual Gas Analyzers

Specific Reference Calibration - A More Practical Approach to Vacuum Reproducibilty

Characterisation of a Fully Automated, Static Expansion Vacuum Standard at the National Physical Laboratory, UK

A New Look at the Modulated Bayard-Alpert Gauge

Dose Reproducibility in Axcelis GSD Implanters Using Stabil-Ion Gauge

How Stable are Spinning Rotor Gauges

Practical Procedures for the Frequency Corrections of the Spinning Rotor Gauge Residual Drag