AVS2003 Monday Morning
Sessions | Time Periods | Topics | Schedule Overview
Hover over a paper or session to view details.
Click a Session in the first column to view session papers.
Session | Monday, November 3, 2003 | ||||||||||
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8:20 AM | 9:20 AM | 10:20 AM | 11:20 AM | ||||||||
AS-MoM |
Aqueous-derived Planar Proxies: A Connection between Surface Science and Real World Catalysts
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The Role of XPS in Materials Characterization in an Industrial R&D Setting
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Quantitative Depth Distribution Analysis of Hg and Na in Glass
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Rutherford Backscattering Quantification of Mercury Interaction with Fluorescent Lamp Materials
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Investigation of the Tribological System of Roller Bearings with TOF-SIMS
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Interfacial Analysis between Amorphous Carbon Films and Glass by XPS and Improvement of Adhesion Strength at the Interface by Plasma Treatment
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Determination of SiGe Film Composition and Thickness by Combined AES and Multiple-Voltage X-ray Emission Analysis
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Carbon Gold Sulfide by 13.56 MHz Plasma CVD and Sputtering Process
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Thickness, Dose and Distribution Measurements of Silicon Oxynitride Ultra-thin Films
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BI-MoM |
Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) and Surface Plasmon Resonance (SPR) Determination of Surface Bound Anti-Lysozyme Orientation
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Identification of Proteins in the Presence of Topographic Features using TOF-SIMS
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Immobilized Microarrays of Capture Agents for Bioassay: A Return to the Past for Protein Surface Stability?
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Limitations of Molecular Streptavidin/Anti-biotin Antibody Architectures using Micro-contact Printed Biotinylated Thiols
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A Comparison of Microcontact Printed and Solution Adsorbed Cytochrome c Protein Films on Indium Tin Oxide Electrodes
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Using Nanografting to Position with Predictable Orientation, De-novo Proteins on Gold
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Nanoscale Control of ECM Proteins for Cell Adhesion
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Activity of the Model Enzyme Urease Adsorbed on Different Colloidal Oxide Particles
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In situ Real-time Atomic Force Microscopy Studies of Lysozyme and RR02 Protein Crystal Growth at Surfaces
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DI-MoM |
Attempting the Unthinkable: Replacing SiO2 with High-k Materials as the Gate Dielectric for Scaled Devices
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Challenges and Progress on High-K Devices and Materials
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First Principles Studies of the Electronic and Atomic Structures of ZrO2/Si and ZrSiO4/Si Interfaces
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X-ray Photoelectron Spectroscopy (XPS) and Spectroscopic Ellipsometry (SE) Study of Hafnium Silicate Alloys Prepared by Remote Plasma Assisted Chemical Vapor Deposition: Comparisons between Conduction Band Offset Energies and Optical Band Gaps
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Photoemission Study of High-k Gate Dielectric/Si(100) Heterostructures - Chemical Bonding Features and Energy Band Alignment
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Separate and Independent Control of Interfacial Band Alignments and Dielectric Constants in Transition Metal-rare Earth Ternary Oxides
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A Materials and Electronics Properties Study of the ZrO2/Si and SiO2 Interfaces
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Interface and Materials Properties of High-k Gate Stack Structures
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MS-MoM |
Development of Low Resistance Copper Thin Films Using a Strain Enhanced Grain Growth Technique
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Processing and Characterization of PMSSQ Based Materials for Nanoporous Low-K Dielectrics
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Multi-scale Modeling of Chemical Mechanical Planarization
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Thermal Characterization of Stacked 3D System-in-Package
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Advanced Clean Process by Supercritical Carbon Dioxide
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Two-Gas Reactive Sputtering
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Hydrogen Pressure Dependence of Trench Corner Rounding during Hydrogen Annealing
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Development of a Continuous Generation/Supply System of Highly-concentrated Ozone Gas for Low-temperature Oxidation Process
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Profile Control for Deep Silicon Etch by Sidewall Passivation in High Density Plasma
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The Study on Deformation of ArF Photo Resist in Dry Etching
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NS-MoM |
Conductance and Stability of Atom-sized Al Contacts under High Biases
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In-situ Monitoring of Quantum Conductance in Electrodeposited Magnetic Point Contacts1
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Quantum Dot Nucleation and Growth in a Microfluidic Reactor
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Formation of 31P Qubit Test Structures by Single Ion Implantation
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Spin Based Qubit Fabrication in SiGe
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A Systematic Study of SiGe Quantum Fortresses and Possible Applications to Quantum Cellular Automata
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Current Challenges in Nanocrystal-Quantum-Dot Lasing
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Si Nanocrystal Synthesis in an Oxide Matrix: A Multiscale Computational Study
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Nanocrystalline Structures in Amorphous Silica
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Investigation of Nucleation and Growth of Si(Ge) Nanocrystals Embedded in HfO2 as Floating Gate for Flash Memory Devices
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OM-MoM |
Coupling Molecules to Electronic Materials Chemical Bonding and Polarization Effects at Metal-Molecular Monolayer-Semiconductor Junctions
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Long Range Electronic Coupling at Molecule-metal Interfaces: C60/Cu(111)
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Molecule on Metal versus Metal on Molecule: The Sexiphenyl/Al Interfaces
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Adsorption of Sexithiophene on Clean and Potassium-Dosed Al(111)
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Interaction between Metals and Organic Semiconductors Studied by Raman Spectroscopy
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Electronic Structure and Hole Injection Barriers for Pure and Substituted Phenylene Ethynylene Oligomer Self-Assembled Monolayers
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Direct Double-Bond Contacts to Metal Carbides: A New Surface Functionalization Reaction
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Study of Transport Through Organic Molecules on Semiconductor Surfaces Using STM-SPV
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Contact Effects in Molecular Junctions
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PS-MoM |
Not Quite 50 Years of Plasma Etching
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Chemical Topography Analyses of Photoresist Patterns Exposed to HBr/O2 and Cl2/O2 Trimming Plasma Processes
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Aspect Ratio Dependent Etching in the Si-Treatment Process of the Source and Drain Area of sub 90 nm Devices
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Loading Effect Study on Cl2+HBr Plasma Etching of Polysilicon
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Pattern Deformations during Resist Trimming Process and its Suppression by He-diluted O2/SO2 Chemistry
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On the Roughness of Etched Silicon
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Investigation of Trim Etching Process for Formation of Si/High-K Gate Stack
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50nm Gate Electrode Patterning using a Neutral Beam Etching System
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Surface and Reactor Dynamics Governing Photoresist Trim and Organic BARC Open Plasma Processing
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3-Dimensional Modeling of Pulsed Inductively Coupled Plasmas: A Method to Improve Uniformity1
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QS-MoM |
Modules for an XPS Expert System: Applications in Corrosion Science
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Auger Electron Spectroscopy: Reducing Measurement Uncertainty
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Molecular Characterization of Biomaterials with ToF-SIMS Imaging
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Extrinsic and Intrinsic Excitations in Ge and Si Photoelectron Spectra
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Multivariate Analysis for XPS Spectral Imaging1
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SC-MoM |
III-Nitride Epitaxy on Oxide Substrates: New Understanding and Novel Device Alternatives
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Ion-Beam-Assisted Molecular Beam Epitaxy of GaN
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Optimizing AlGaN-GaN Heterostructures by MOCVD for Microwave Electronics
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Improvement of Optical and Electrical Properties in Blue Light-Emitting Diodes with InGaN-based Triangular-Shaped Quantum Wells
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Optical Studies on the Incorporation of Carbon as a Dopant in Cubic GaN
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Effect of Substrate Temperature on Crystal Orientation and Residual Stress in RF Sputtered Gallium Nitride Films
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Formation of Zinc-blende-structure GaN Thin Films on Si Substrates by Radio Frequency Planar Magnetron Sputter Deposition
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SE-MoM |
Nanomechanical Testing of Films and Coatings
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Molecular-Scale Tribology in Model SAMs and Amorphous Carbon Films
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Thin Film Growth by PVD in the Presence of Residual Gas
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John A. Thornton Memorial Award Address: Advances in Reactive Sputtering Processing Technology
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SS1-MoM |
Angular Distribution of Cl Atom Products from Direct and Precursor-Mediated Hyperthermal Abstractive Chemisorption of Cl2/Al(111)
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Photoinduced Electron Transfer Chemistry and Dissociation of Adsorbed CO2: Harnessing Ã…-Scale Molecular Acceleration Towards a Surface
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Adsorption Dynamics and Desorption Kinetics of Argon and Methane on MgO(100)
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Adsorption of CO on Rutile (1x1)-TiO2(110): A Molecular Beam Study
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Ultra-Low Coverage Spontaneous Etching and Hyperthermal Desorption of Aluminum Chlorides from Cl2 on Al(111)
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Probing the Vibrational State-Resolved Gas-Surface Dynamics of Polyatomic Molecules Without the Laser
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Kinetics of H Atom Adsorption on Si(100) at 325 - 600 K
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Charge Exchange between Metal Ions and Surfaces
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SS2-MoM |
Atomic Level Explanation of the Compensation Effect in Heterogeneous Catalysis
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Formation of Surface Cyanide through Carbon-Nitrogen Coupling Reactions on Pt(111)
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The Effect of Atomic Steps on the Adsorption and Desorption of CO on Ru(109)
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Medard W. Welch Award Address: Get Real ! --- The Importance of Complexity for Understanding the Function of Surfaces
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CO and Ethylene Dissociation on Ni(111): Influence of Steps
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From Atomic Scale Reactant Ordering to Mesoscale Pattern Formation: CO Oxidation on Pd(100)
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The Correlation between the Electronic Structure and the Energetics of CO Chemisorption on Pd/Re (0001) Surfaces
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Chemisorption Bond Weakening on Finite Size Terraces: CO on the Stepped Ru(109) Surface Compared to Ru(001)
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Orientation of N2O on Pd (110) and Rh(110) at Low Temperatures
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SS3-MoM |
Determining Diffusion Mechanisms Using STM
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Surface Characterization and Inter-diffusion Study of Copper on Ruthenium Thin Film Deposited on Silicon Substrate
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Dynamics of Surface Alloys: Decay of 2D Islands on Pb/Cu(111)
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Edge Diffusion on Spiral Steps on Pb(111) Microfacets*
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Sb-mediated Ge and Si Growth on Ge(001)
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The Frustrated Alloying of Ge on Ultra-Flat Si(001)
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New Diffusion Mechanisms on Amorphous Surfaces
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Mobility of Nanostructures on the Surface of a Desorbing Solid: Friction at the Nanoscale
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Time-space Height Correlations of Thermally Fluctuating 2-d Systems; Application to Vicinal Surfaces and Analysis of STM Images
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STM Tip-induced Translation through Excitations of the H2O and D2O Bending Modes on Pd(111)
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TF-MoM |
Advancements in ALD Chemistry
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Incorporation and Control of Silica in Hafnium Silicates using Atomic Layer Deposition Techniques
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In-situ Infrared Analysis of Atomic Layer Deposition Half-Reactions: Hafnium Diethyl- Amide Adsorption and Dissociation on SiO2 and HfO2
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Characteristics of Hafnium Aluminate Films for Gate Dielectric Applications Deposited by Atomic Layer Deposition Method
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Atomic Layer Deposition of Transition Metal Films
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Demonstration of AlN ALD Using Hydrazine as the Nitrogen Precursor
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Low Temperature Deposition of SiN using Sequential Exposures of Si2Cl6 and NH3
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Atomic Layer Deposition on Fine Particles
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VT-MoM |
Fifty Years of Vacuum Science
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The Measurement of Vacuum;1950-2003
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Major Advances in Capture Pumps in the Last 50 Years
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Major Advances in Transfer Pumps; 1953-2003
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The Development of Ultrahigh and Extreme High Vacuum Technology for Physics Research1
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