AVS2003 Plasma Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
| Session Code | Start | Session Name |
|---|---|---|
| PS-MoM | Monday, November 3, 2003 8:20 AM | Critical Dimension Etching |
| PS+MM-MoA | Monday, November 3, 2003 2:00 PM | MEMS Etching |
| PS-MoA | Monday, November 3, 2003 2:00 PM | Plasma Sources |
| PS+TF-TuM | Tuesday, November 4, 2003 8:20 AM | Plasma Enchanced Chemical Vapor Deposition |
| PS-TuM | Tuesday, November 4, 2003 8:20 AM | Plasma Diagnostics: Processing |
| PS-TuA | Tuesday, November 4, 2003 2:00 PM | Dielectric Etch |
| PS-TuP | Tuesday, November 4, 2003 5:30 PM | Poster Session |
| PS1-WeM | Wednesday, November 5, 2003 8:20 AM | Plasma Processing of Nanostructures and Nanomaterials |
| PS2-WeM | Wednesday, November 5, 2003 8:20 AM | Etching Difficult Materials |
| PS-WeP | Wednesday, November 5, 2003 11:00 AM | Poster Session |
| PS1-WeA | Wednesday, November 5, 2003 2:00 PM | Mechanisms in Plasma-Surface Interactions |
| PS2-WeA | Wednesday, November 5, 2003 2:00 PM | Atmospheric Plasmas & Micro Discharges |
| PS1-ThM | Thursday, November 6, 2003 8:20 AM | Plasma-Surface Interactions: Deposition |
| PS2-ThM | Thursday, November 6, 2003 8:20 AM | Low k Dielectric Etch |
| PS-ThA | Thursday, November 6, 2003 2:00 PM | Plasma Diagnostics: Mechanisms |
| PS-FrM | Friday, November 7, 2003 8:20 AM | Plasma-Surface Interactions: Etching |