AVS2003 Manufacturing Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
Session Code | Start | Session Name |
---|---|---|
MS-MoM | Monday, November 3, 2003 8:40 AM | Process and Equipment Integration and Development |
MS-MoA | Monday, November 3, 2003 2:00 PM | Challenges in Advanced Materials and New Processes for Semiconductor Manufacturing |
MS-TuM | Tuesday, November 4, 2003 8:20 AM | Packaging and Role of Interface Engineering in IC Processing |
MS-TuA | Tuesday, November 4, 2003 2:00 PM | Directions in Semiconductor Device Scaling for the Next Decade |
MS-TuP | Tuesday, November 4, 2003 5:30 PM | Poster Session |
MS-WeM | Wednesday, November 5, 2003 8:20 AM | Sensors, Metrology, and Control |