AVS2001 Tuesday Afternoon

Sputtering-induced Effects in Ultra Shallow Depth Profiling

Low Energy Ion-surface Interactions in Ultrashallow Profiling Investigated with In-situ Medium Energy Ion Scattering Spectroscopy

Low Energy Dual Beam Depth-Profiling: Influence of Sputter- and Analysis-Beam Parameters on Profile Performance using TOF-SIMS

Reference Materials for SIMS: Philosophy, Development, and Results

Sustainable Semiconductor Manufacturing: Methods and Applications to Reduce the Environmental Impact of Chip Making

Reducing PFC Emissions from a Semiconductor Wafer Fab: Optimization of Chamber Clean Processes for the CVD Tool Set

AMD's Global Climate Protection Plan

Surface Forces and Coating Properties Involved in Protein Repellency

Water-Uptake of Poly(ethylene glycol)-terminated Self-Assembled Monolayers during Film Formation

Novel PEO-containing Copolymers as Protein Repellent Additives In Polyurethanes: Evaluation of Protein Interactions by Radiolabelling, XPS and MALDI

Surface Modification of Poly(Vinyl Chloride) Intubation Tubes to Control Bacterial Adhesion

XPS-Mediated Robust Design Used to Optimize Hyaluronic Acid Surface Immobilization

Theoretical Prediction of the Enthalpic and Entropic Contributions of the Change in Gibbs Free Energy for Peptide Residue Adsorption onto Functionalized SAM Surfaces

Post-deposition Densification of Yttrium Oxide High Dielectric Constant Insulators Deposited by Oxygen Plasma Assisted Chemical Vapor Deposition

Substitutional Effects of the Dielectric Constant in Ta₂O₅

Ta d-state Derived Electron Traps in non-Crystalline Al₂O₃-Ta₂O₅ Alloys Prepared by Remote PECVD

Angle-Resolved XPS and Auger Analysis of Ultra-Thin Al₂O₃ Films Deposited by Atomic Layer Deposition

In-situ, Real Time Studies of Interface Formation of BST Thin Films on Si Substrates

Direct Observation of Atomic Disordering at the SrTiO₃/Si Interface Due to Oxygen Diffusion

Core-level Photoemission of High-K Dielectrics on Si Substrates

Quadrupole Mass Spectrometer Studies of a High Temperature Etch Process

Spectroscopic Ellipsometry Characterization of High-k Dielectric Thin Films

III-V Based Epitaxial Magnetic Heterostructures: Large Tunneling Magneto-Resistance

Spin Filtering and Tunneling Magnetoresistance in Double Barrier Magnetic Heterostructures

Magnetotransport in Digital Ferromagnetic Heterostructures

Theoretical Band Offsets in Magnetic Semiconductor Heterostructures: CdCr₂Se₄ on Si and GaAs

Effects of Interface Structure and Chemistry on Spin Injection Efficiency in Spin-LEDs

Recent Developments in Spin Electronics

Structural and Optical Characterization during Growth of Co on Ga_1-xIn_xAs(001)

Structural and Magnetic Characterization of the Fe_xCo_1-x / GaAs(100) Interface

Plasma Etch Endpoint and Diagnostic Fault Detection Using Evolving Window Factor Analysis

Characterization of Pattern Transfer from Litho to Etch Using Scatterometry

Chamber Wall Monitoring and Control for Plasma Etching Reproducibility

Integrated RF Sensor for Accurate Control and Monitoring of on Wafer Process Performance

Fault Identification and Classification using a Plasma Impedance Monitor

Real-Time CVD Wafer State Metrology using a Downstream Acoustic Sensor

Thickness Metrology and Real-Time End Point Control in W CVD using in-situ Mass Spectrometry¹

In-situ FTIR Spectroscopy for Metrology of a Tungsten CVD Process

New Mass Spectrometer without Fragment Ions for CVD In-situ Monitoring

Nano-scale Science by Means of UHV Electron Microscopy

Tunneling Spectroscopy of Superconducting Quasiparticles by Scanning Tunneling Microscope with a Bulk NbN Tip

Demonstration of a Tunable Bistable Tunnel Device with a Low Temperature STM and a Self-organized Ga Array on Si(111)¹

Theory and Perspective of the Spin-Polarized STM

Charge Imaging of Electrons and Holes Trapped in Gate Oxides and at the Oxide-silicon Interface

'Artifact-free' Electrostatic Force Measurement using Noncontact Atomic Force Microscopy

Scanning Impedance Microscopy: From Impedance Spectra to Impedance Images

Gas Phase and Surface Diagnostic Measurements of High-density Plasma-based Etching Processes for Dielectrics Based on C₄F₈ Gas Mixtures with Ar, O₂ and N₂

A 0.09µm-capable Plasma Etching of Dielectrics and its Reaction Mechanism

Plasma Etching Chemistry and Kinetics for Silicon Oxide Thin Films

Oxide Etch Behavior in an Inductively Coupled C₄F₈ Discharge Characterized by Diode Laser Spectroscopy

Characterization of Hydrofluorocarbon Reactants for Selective Silicon Nitride Plasma Etch Applications

Modeling of SiO₂ Feature Etching in Fluorocarbon Plasmas: The Effect of Gas Phase Composition on Aspect Ratio Dependent Phenomena

Inductively Coupled Plasma Etching for Arrayed Waveguide Grating Fabrication in Silica on Silicon Technology

Mechanisms Involved in the PECVD of Thin Films in Low Pressure Organosilicon Plasmas

Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition (ECR-PECVD) of ZrO₂ on Silicon

Deposition of a-C:H Films: Plasma Chemistry and Material Properties

Study of SiO_xN_y Films Deposited by Radio-Frequency Plasma Assisted Electron Cyclotron Resonance

An In Situ Study of the Interactions of Atomic Deuterium with Hydrogenated Amorphous Silicon Thin Films Using Multiple Total Reflection Fourier Transform Infrared Spectroscopy

A New and Fast In-situ Spectroscopic Infrared Absorption Measurement Technique for Submonolayer Detection at High Growth Rate

Reaction Mechanism of PECVD to Produce Low Dielectric Constant Thin Films

Characterization of SiGe/Si Heterostructures with Abrupt Interfaces

Indium Segregation and its Effect on Interfacial Bonding at the GaSb-on-InAs Heterojunction: A Cross-Sectional Scanning Tunneling Microscopy Study¹

Dislocations and Microstructure Evolution in Semiconductor Thin Films

The Strain Relaxation Mechanism of SiGe Growth with a Low Temperature Si Buffer Layer by Molecular-beam Epitaxy

Heteroepitaxy of Highly Mismatched Systems and the Role of Coincidence Lattice

Nanoscale Dislocation Patterning in PbTe/PbSe (001) Lattice-mismatched Heteroepitaxy

STM-Controlled Epitaxy of Cobalt-Semiconductor Compounds

Electron-beam Patterning of Cobalt Fluoride on 10-nm Length Scale

Nanoparticles for Fabrication of Zero- and One-dimensional Quantum Objects

Growth of Ag Nanowires on Atomically Flat Ag films Formed on GaAs(110) Surfaces

Ge Nanoclusters Prepared from Solution with Chemically Tailored Surfaces

X-Ray Absorption and Emission Studies of Diamond Nanoclusters

AFM Tip-mediated Nucleation and Growth of Passivated Au Nanocrystal Islands

Chemically Enhanced Electron Beam Induced Micromachining of SiO₂

Surface Passivation Effects of Deposited Ge-Nanocrystal Films Probed with Synchrotron Radiation

Surface Nanostructuring by Ion Sputtering: The Early Stages

Microstructure and Mechanical Properties of Zr-Si-N Films Prepared by r.f.- Reactive Sputtering

Characterization of CrBN Films Deposited by Ion Beam Assisted Deposition

Thin Film Growth by Physical Vapor Deposition in the Presence of Residual Gas

Boron and Boron-Based Coatings as Produced by Vacuum Arc Technology

Ion-bombardment Induced Phase Transformation of Cubic Boron Nitride Studied by Reflection Electron Energy Loss Spectroscopy

Cubic Boron Nitride Thin Films Deposited on Steel Substrates With Different Interlayers

Industrial Laser-Arc Coater for the Deposition of Superhard Amorphous Carbon Films (Diamor)

Deposition of Diamondlike Carbon by Magnetic Pole Enhanced Inductively Coupled Plasma

Scanning Tunneling Microscopy Study of the Reduced Fe₃O₄(111) Terminated Selvedge on a Natural Single Crystal α-Fe₂O₃(0001) Surface: Termination and Surface Reaction with Carbon Tetrachloride

Photo-catalytic Reactions of Organic Molecules Over TiO₂(001) Single Crystal - Effect of Surface Structure

Semiconductor Photocatalysis over Titanium Dioxide

Valence Band Photoemission from Pure and Sr Diffused Single Crystal Anatase TiO₂(001) Surfaces

Surface Investigations of TiO₂ Anatase (101)

Characterization of Surface Defects on Flat and Porous MgO Surfaces

A Study of the Surface Reconstruction of Fe₃O₄ (100) Using Antiferromagnetic Tips

Characterization of Copper Oxides Formed by Thermal and Plasma Oxidation Using Linear Sweep Voltammetry, Galvanostatic Reduction and XPS

The Surface Kinetics of the Initial Stages of Metal Oxidation Visualized by In situ UHV-TEM

Self-Assembling Monolayers and Thin-Film Templates - Driven Assembly of Functional Organic Structures

Adsorption and Photoinitiated Chemistry on Organic-functionalized Semiconductor Surfaces

Photoinduced Processes in Self-Assembled Monolayers on Semiconductor Surfaces

Organic Monolayers on Silicon and Silica Surfaces Via Covalent Linkages

Study of Alkylsilane Monolayers Islands on Mica in the Presence of Water

"Interphase" Liquid Structure and Interfacial Forces

Alkanethiols on Copper Single Crystal Surfaces

Electro-Rheology of Liquid Hexadecane Near a Au Surface

Mechanical Properties and Stresses in Ion-Assisted Thin Films

Growth of Highly-Oriented CeO₂ Layers on Glass Substrates for High-Quality Poly-Si Overlayer Formation

Thin Film Growth of Reactive Sputter Deposited Tungsten-Carbon Thin Films

Reactive Sputter Deposition of Tungsten Nitride Thin Films

The Impact of Residual By-Products from Tungsten Film Deposition on Process Integration due to Non-Uniformity of the Tungsten Film

Thermal Stability of Arc Evaporated Ti_1-xAl_xN Thin Films

Evolution of Ti-3Al Film Structures and its Effect on Film Properties

Surface Structural Anisotropy in Sputter and Electrolytic Deposited Tantalum Films

Calculated Energy Transfer in an Accommodation Pump

Rapid Modelling of Molecular Flow in Steady-State Arbitrary Geometries

Edison's Vacuum Technology Patents