AVS2001 Monday Morning

Sessions | Time Periods | Topics | Schedule Overview

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Session Monday, October 29, 2001
9:40 AM 10:40 AM 11:40 AM
AS-MoM
TOF-SIMS Characterization of Additives in Polymer Materials: Influence of Primary Ion Bombardment Conditions
ToF-SIMS Surface Chemical State Imaging of Biomaterials
Application of Spectrum Imaging and Multivariate Statistical Analysis to Time-of-Flight Secondary Ion Mass Spectrometry1
Multivariate Statistical Approaches for Distinguishing Between Chemical and Topographical Features in TOF-SIMS Images
Data Interpretation and Quantitative Analysis - A Global Approach in Static SIMS
Secondary Ion Mass Spectrometry Analysis of Wafer Contamination Resulting from Gloved Hands
BI-MoM
Chemical Recognition on Lipid Membrane Surfaces
Surface Docking Sites for Macromolecules: Interface Architecture based on PLL-g-PEG/PEGbiotin-(Strept)avidin
Self-Assembly of Modified Porphyrin Monolayers
Efficient New Method of Nucleic Acid Immobilization
Probe Density Effects for Target Hybridization in DNA Monolayer Films Studied By SPR
Two-dimensional Arrangements of Streptavidin on Biotin-doped Supported Lipid Bilayars Optimized for DNA-DNA Hybridization
EC-MoM
Surface Science Studies of Model Fuel Cell Electrocatalysts
The Surface Electrochemistry of Carbon Monoxide and Methanol on Solid Electrodes and Supported Catalysts
Measurement of Elevated Temperature Rate Processes Involved in Methanol Electro-Oxidation on Supported Platinum Catalysts
Ruthenium, Osmium, and Palladium Modified Platinum Elecrodes: Surface Structure and Reactivity
EL-MoM
Quantitative Analysis of Piezoresponse Force Microscopy: Electrostatic vs. Electromechanic Interactions
Template Sol-Gel Synthesis and Characterization of BaTiO3 Nanostructures
Low-temperature Process of (Y0.95,Bi0.05)MnO3 Ferroelectric Thin Film and its Structural and Electrical Properties
Effects of Bi/Sr Stoichiometric Ratio on Electrical Properties of Pt/SrBi2Nb2O9/Si Ferroelectric Gate Structure
Recent Progress of Ferroelectric Memory Materials and FET-type FeRAMs
MI+
High Speed 256k Magnetoresistive RAM
Dry Etching of MRAM Device Structures
Spin Dependent Tunneling Devices for Nonvolatile Latch Memory
Effects of Interfacial Electronic States and Roughness on Tunnel Magnetoresistance
Performance of the BARC Magnetoresistive Sensor*
MS-MoM
Optical Digital Profiling for Production Applications
Critical Dimension and Profile Measurement by Optical Scatterometry for Sub-0.15 µm Advanced Gate and Shallow Trench Isolation Structures
Wafer Inspection with HDI Surface Reflectance Analyzer
Using SQUIDs for Failure Analysis in the Semiconductor Industry
Development of a 300 mm Wafer Defect Analysis Tool Integrating High Resolution Auger Spectroscopy and Ultrahigh Resolution Immersion Lens SEM Microscopy
PN-MoM
The "Millipede" - More than 1000 Tips for parallel and dense AFM Data Storage
Attractive Mode Manipulation of Fullerenes on Si(100)
Reliable Nanofabrication Method on Au Cluster Films in a Non-contact Mode with an Atomic Force Microscope
Creating Nanoscale Patterns by Arranging Gold Nanocolloids with an AFM
Dynamics and Manipulation of Surface Electronic States
PS1+
The Challenges of Plasma Etching in MEMs Processing
Maskless Etching of Silicon using Patterned Microdischarges
Efficiency of Microfabricated ICP Sources1
Microhollow Cathode Discharge Flow and Stability
Experimental and Numerical Model Investigations of Miniature Microwave Plasma Sources
Potential and Current Profiles of Nitrogen Gas DC Microplasmas
PS2-MoM
Optical Emission Spectroscopy of Exhaust Stream Gases for Improved Process Control
Peak Wafer Temperature Measurements during Dielectric Etching in a MERIE Etcher
Spatially (z)-Resolved Electron Temperatures and Species Concentrations in Inductively-Coupled Chlorine Plasmas, Measured by Trace-Rare Gases Optical Emission Spectroscopy
Diagnostic of Silicon Etch Plasmas by Optical and Mass Spectrometry, Correlation with XPS Surface Diagnostics
Electrical and Plasma Property Measurements of a DRIE Bosch Process
SC-MoM
III-N-V: A Novel Class of Compound Semiconductors for Electronic and Photonic Applications
Microstructure and Optical Properties of (InGa)(AsN) Alloys and Nanostructures
Measurement of Charge Separation Potentials In GaAs(1-x)N(x)
Characterization of GaPN Layers Grown by Molecular Beam Epitaxy on Si Substrates
Nanoscale Phase Formation at Cu(In,Ga)Se2 Surfaces
Metal-organic Vapor Phase Epitaxial Growth and Photoluminescent Properties of ZnMgO and ZnCdO Thin Films
SC+
Coexistence of Active and Passive Oxidation Areas on the Si(100) Surface under Oxygen Cluster Beam Impact
An Ab Initio Study of the Initial Oxidation of the Si(100)-(2x1)
Oxidation of Si(100): Mechanisms of Oxygen Insertion, Migration and Agglomeration
Fundamental Aspects of Silicon Oxidation: O2 and H2O Reaction with Si(100) and H-passivated Si Surfaces
Displacement of Surface As Atoms by Insertion of Oxygen Atoms into As-Ga Backbonds
SE-MoM
Magnetron Sputtered W/C Films with C60 as Carbon Source
Synthesis and Characterization of Thermally Stable TiB2/TiC Nanolayered Superlattice Coatings for Dry Machining Applications
Chemical Vapor Deposition and Characterization of TiO2 Nanoparticles
Nanocomposite Tribological Coatings with "Chameleon" Surface Adaptation
Nanometer-size Monolayer and Multilayer Molecule Corrals on HOPG: A TOF-SIMS, XPS and STM Study
SS1-MoM
Great Enhancements in Dissociative Electron Attachment to Chlorofluorocarbons Adsorbed on Polar Molecular Ices: A New Pathway for the Formation of the Ozone Hole
Electron Stimulated Reactions of Chlorocarbons in Ice Films
Study of CO2 Adsorption on Ice using High-pressure X-ray Photoelectron-spectroscopy
Sea Salt Aerosol Reactions: Quantitative Single Particle Studies
Surface Chemistry of Size-Selected, Gas-Phase Nanoparticles
Scanning Electron Microscopy Studies of the Hydration of Mixed Alkali Halide Aerosols
SS2-MoM
Mesoscopic Strain-Induced Magic Fe Nanostructures on Cu(100)
Nanostructed Growth of Metal Clusters on Ultrathin Al2O3 Films on Ni3Al(111)
Nanocatalysis:Tuning Efficiency and Selectivity Atom-by-Atom
Ion Beam Deposition of Size-selected Supported Metal Clusters
Decay Characteristics of Surface Nanostructures: (100) vs (111) Surfaces1
Reactions on Free Platinum Clusters: Adsorption of Oxygen and Hydrogen and Formation of Water
TF+
MEMS Device Platforms as Research Tools for Developing Improved Sensing Films
Correlation Between Gas Response of MIS Field-Effect Sensors and the Bond Strength Between the Metal and the Insulator Layer of the Device
On the Ammonia Response Mechanism of Field-effect Gas Sensors with Thin Pt Gates
Charge Transport Mechanisms in Epitaxial Tungsten Oxide Films Used for Chemiresistive Sensors
VST-MoM
RHIC Insulating Vacuum System: Status and Performance*
Getter Requirements for a CRT with a Diamond Coated FE Electron Source
Applicability of Spinning Rotor Gauges to Pressure Measurements in Sealed System
Sealed Vacuum Systems including Vacuum Insulation
Sessions | Time Periods | Topics | Schedule Overview