AVS2000 Thursday Morning

Engineering Life into Nanofabricated Systems

Powering Molecular Shuttles through an Artificial Photosynthetic System

Unbinding Process of Adsorbed Proteins under External Stress Studied by AFM Force Spectroscopy

Single-Molecule Protein-Ligand Bond-Rupture Forces Measured Using the Poisson Atomic Force Method

Measuring the Mechanical Properties of Soft Samples by Atomic Force Microscopy

Protein Adsorption and Monocyte Activation on Ge Nanopyramids

Oxidation of Clean and H-passivated Silicon by Molecular and Atomic Oxygen

New Oxidation Process Using Collimated Hyperthermal Ozone Beam

Nondestructive Investigation of the Si/SiO2 Interface by Spectroscopic Ellipsometry, Reflectance Difference Spectroscopy, Second Harmonic Generation, and X-ray Photoelectron Spectroscopy

Core-level Photoemission of Interface States on SiO₂/Si: Substrate Orientation Effects

Spectroscopic and Electrical Characterization of the Evolution of Chemical Oxides Into Ultrathin Gate Oxides

Studies on Accurate Determination of the Physical Thickness of nm Gate Oxides and its Correlation with the Electric Thickness

Bonding of Nitrogen in Silicon Oxynitride Films

Photoemission Investigation of Nitrogen Incorporation at the Si/SiO₂ Interface

Investigation of Fluorine in Dry Ultrathin Silicon Oxides

Studies on Electrical Properties of Ultrathin Oxides of Silicon Grown by Wet Oxidation at Low Water Vapor Pressure

Properties of SiO₂ Thin Films Deposited at Low Temperature on SiGe and Si Samples in O₂/TEOS Helicon Plasmas

Quantification of Polymer Surface Composition Based on ToF-SIMS Data

Characterisation of Polymer Additives by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

Surface Composition of Poly(imidesiloxane) Copolymers Containing Multiple Siloxane Lengths

High Spatial Resolution XPS and FTIR: An Approach to 3-D Characterization of Polymer Blends

Iron Metallization of Fluorinated Organic Films; A Combined XPS and AFM Study

Interactions of Cu(I) with the Surface of a Novel Poly(imidazole)

Study of Semicrystalline Poly(ethylene terephthalate) by Atomic Force Microscopy

Morphology of Catalytically Formed Polyethylene on a Planar Model System for the Phillips (CrOx / SiO2) Catalyst

Nano-Mechanics of Polymer Surfaces

New Directions for Semiconductors

Electron Spin Relaxation at Nanometer Length Scales Near a Ferromagnet

Ferromagnetic Resonance of Monodisperse Co Particles

Magnetic Mirages

Correlation of Structural and Magnetic Properties of Ultra-Thin Fe-Films on W(110) by Spin-Polarized STM/STS

Current-driven Magnetization Reversal in Nanopillars

Patterning of Co/Pt Multilayers: Topological vs. Magnetic

Microfabrication Technologies for Biomedical Applications

Suppression of Blood Serum Adhesion on Quartz Inner Wall of Microcapillary Coated by Bio-compatible MPC Polymer

Biologically-Compatible Polymeric MEMS Devices Fabricated using Holographic Two-Photon Induced Photopolymerization

Patch Clamping with Microfabricated Planar Electrodes

High Sensitivity Resonant Biosensor

Nanofluidic Entropic Trap Array device for DNA Separation

Integration of Microcapillary Electroporesis and Inductively Coupled Plasma Spectrometry for Rapid Biological/Chemical Analysis

Silicone Elastomer Microwell Arrays for High Throughput Protein Biochemical Assays

Development of a Micro Capillary Pumped Loop System for Microelectronic Device Cooling

Design, Fabrication, and Testing of Cross Flow Micro Heat Exchanger

Simulation of Transient Enhanced Diffusion of B in Si

New Physics for Models of Transient Enhanced Diffusion

Fast-Ramp Annealing for Reducing Implant-Induced Transient Enhanced Diffusion

Dynamic Simulation: Guiding Manufacturing from Process Mechanisms to Factory Operations

Integrated Metrology with Run to Run Control

W CVD Thickness Metrology and Run-to-Run Control using Mass Spectrometry

Feedback Control of Morphology During III-V Semiconductor Growth by Molecular Beam Epitaxy¹

Data Requirements and Communication Issues for Advanced Process Control

Implantation and Pinning of Size-selected Ag Nanoclusters at the Graphite Surface

Self-organization of Pt Nanoparticles on Surfaces in Catalytic Reaction

Quantum-Coherence and Self-Assembly of Metallic Nanostructures

Immobilization and Isolation of Molecule Corral Nanostructures Produced on Highly Oriented Pyrolytic Graphite

Ultraflat Nanosphere Lithography

Controlled Growth of Metal Nanoclusters on Polymers

Noble Metal Nanoparticles in Polymeric Thin Films

Biomimetic Self-Assembly

Cluster Size Effect Observed for Gold and Silver Sulfide Nanoparticles Synthesized by Sol-Gel Technique as Studied by X-ray Photoelectron Spectroscopy

Highly Ordered Layers of Large Conjugated π-systems on Cu(111): A Novel Preparation Method

The Effect of Conjugation Length on the Frontier Orbital Position of Oligothiophene Derivatives at Metal-organic Interface

Electronic Properties of π-Conjugated Organic Molecular Semiconductor Interfaces

Effect of Alkyl Substituents on the Adsorption of Thienylenevinylene Oligomers on the Si(100) Surface

Growth of Films of Thiophene Oligomers by Seeded Supersonic Beams to Improve Control on their Quality and Properties

Scanning Tunneling Microscopy/Spectroscopy Investigation of the Organic Molecules PTCDA and HBC on Au(100)

STM, AFM, & Electrochemical Investigations of Squaraine Thin Films

Work Function Modification and Surface Chemistry of Indium Tin Oxide with Organosilane Self Assembled Monolayers

Effect of Fluoride Layer Insertion on the Electronic Structures of Al/Organic Interfaces¹

Interface of Aluminum and Poly(vinylidene fluoride with Trifluoroethylene) Copolymer

Analysis of Pulsed O₂/TEOS Helicon Plasmas by Time-resolved Optical Spectroscopy

Aluminum Oxide Deposition in an Ionized PVD System

Surface Transport Kinetics in Plasma Deposition of Hydrogenated Amorphous Silicon

Hydrogenated Amorphous Silicon Fractal Growth and its Relation to the Growth Mechanism

Interactions of Chemically Reactive Radicals with Si Growth Surfaces during Plasma Deposition of Si Thin Films

SiH_x Radical Densities in a Remote SiH₄ Plasma for High Rate Deposition of a-Si:H

Fundamentals of Plasma Enhanced Chemical Vapor Deposition

Thin Film Growth via Surface Reactions of CH₃, C₂H₂ and H as Investigated by Radical Beam Experiments

Deposition Kinetics in Methane rf Glow Discharges: A Combined Experimental and Modeling Study

Using Plasma Energetics to Influence Silicon Nitride Step Coverage

Advanced Actinometry of Inductively Coupled Cl₂-Ar Plasmas For Plasma Etching

Diagnostics of Inductively Coupled Chlorine Plasmas: Measurements of the Neutral Gas Temperature

A New Diagnostic Method for Monitoring Plasma Reactor Walls: Multiple Total Internal Reflection Infrared Surface Probe

Laser-Aided Diagnostics of Discharge Plasmas

Energy Distributions of Incident Ions to a RF-Biased Substratep

Energy and Angular Distribution of Ions Effusing from a Hole in Contact with a High Density Plasma

Electron Temperature and Ion Energy Measurements with A High-resolution, Sub-micron, Retarding Field Analyzer

Mass Resolved Ion Energy Distribution Measurements in an Inductively Coupled H₂/Ar Plasma with a Highly Collisional Presheath

Langmuir Probe Analysis for High Density Plasmas

Single Photon Ionization as a Probe of Radicals in Hot-Wire and Plasma Processing

Step Structures and Energies on Vicinal Si(001) Monohydride Surfaces: Dependence on H Chemical Potential

Si(100) Surface Roughening and H Atom Absorption: Surface and Bulk Characterizations.

Dissociation Pathways of Molecular Hydrogen on Silicon Surfaces¹

Hydrogen Bonding on Compound Semiconductor Surfaces

Scanning Tunneling Microscopy of Low Temperature Adsorption H2 on GaAs(001)

Theoretical Approaches for Predicting SiGe Heteroepitaxy

Real-time Monitoring of H₂ Adsorption on C(001) at High Temperature by Ultraviolet Photoelectron Spectroscopy

Infrared Studies of Hydrogen on Diamond (100)

Fundamental Connection Between the ESD of H/D at Silicon Surfaces and at Oxide/Silicon Interfaces

Depth-Resolved Determination of the Hydrogen Concentration at Buried SiO₂/Si(100) Interfaces by Resonant Nuclear Reaction Analysis

Synthesis and Characterization of Self-assembled Cu₂O Quantum Dots on SrTiO₃(001) Surface

Correlation of Electronic Structure with Photoluminescence Properties in Oxidized Silicon Nanoclusters

The Behavior of Ultrathin Al₂O₃ Films in Very High Electric Fields: STM-induced Pitting and Dielectric Breakdown

Oxidation of Sn/Pt (111) Surface Alloys under UHV Conditions- Formation of Ultrathin SnOx Films on Pt(111)

Monte Carlo Simulation of Initial Al(111) Oxidation

Thin Epitaxial Oxide Films and Interfaces for Advanced Microlectronics and Magnetics

The Oxidation of Pd(100)

Surface Characterization of Oxidative Corrosion of U-Nb Alloys

AFM Non-contact Imaging of Titaniumdioxid at Variable Temperatures

Plasma Oxidation as a Tool to Design Oxide Films at Low Temperatures

Alkali Metal and H₂O Co-adsorption and Reaction on Graphite(0001)

Adsorption of Hydrogen on Clean and Alkali-modified Low-index and Stepped Copper Surfaces

Angle Resolved Photoemission Study on Adsorption and Desorption of Cobaltocene on Cu(111)

Angle Effects on the Nucleation of Polymeric Thin Films from Molecular Cluster Deposition: Molecular Dynamics Simulations

Geometrical Structure and Orientation of Metal Tetraphenylporphyrins on Au (111)

Experimental and Theoretical STM Imaging of Xylene Isomers on Pd(111)¹

Reactions of cis-, trans-, and 1,1-dichloroethene on Pd(111) Studied by TDS, LITD, and STM

Wet Oxidation of CO on Pt(111)

The Behavior of Zirconium Surfaces in the Presence of Oxygen, Nitrogen, and Hydrogen Containing Adsorbates

Chlorosilane Adsorption on Clean Si Surfaces: STM and FT-IR Studies

A Far-IRAS Study of Water Adsorption on V₂O₃(0001)

Polar Oxide Surfaces

Helium Atom Scattering Study of the Surface Structure and Dynamics of in situ Cleaved MgO(001) Single Crystals¹

Molecular Beam Epitaxy-Scanning Tunneling Microscopy of Wurtzite GaN Thin Films

One-Dimensional Noble Metal Growth on Si(5 5 12)

Stability and Nuclear Formation of Si(111)-7x7 Structure as Determined from Charge Redistribution in Surface Layers

First Principles Study of Cross-sectional Surface Structure of III-V Heterostructures

Reflectance Difference Spectroscopy of Mixed Arsenic-Rich Phases of Gallium Arsenide (001)

Dynamics of the Flip-Flop Motion of Single Buckled Dimers of Si(100)

Molecular Dynamics Simulations of Energetic Silicon Cluster Deposition on Graphite (0001)

Optical Thin Film Multilayer Systems for Thermal Emittance Modulation in the 300K Blackbody Spectral Region

Structural Characterization of High and Low Index PECVD Optical Coating Materials: The Case of Titanium Dioxide and Silicon Dioxide

Porous Thin Film Microstructure Control for Tuned Optical Properties

Development of a PECVD Antireflective Layer for 193nm Polysilicon Gate Applications

Characterizing Bi-Layer ARC for Advanced Lithography

A Near-grazing-incidence, Antireflective Coating for 121.6 nm for a Mars-bound Neutral Particle Detector.

Studies of Pulsed DC Power in Magnetron Sputtering Systems

Art and Science of Fabricating Optical Coatings by PECVD

Inhomogeneous Optical Coatings Deposited by Plasma

Uranium Coated Optics for Space Applications in the Extreme Ultraviolet

Design, Construction and Maintenance of Large Vacuum Systems

Design of the US Spallation Neutron Source Ring Vacuum Systems

The Interesting and Important Problem of Water in Vacuum Systems

Large Motion Feedthrough Designs for Ultra Accurate Positioning in Vacuum

Design and Operation of Scroll Type Dry Primary Vacuum Pumps

Influence of the Production Parameters on the Vacuum Properties of Ti-Zr-V Non-evaporable Getter Films

Influence of the Elemental Composition and Crystal Structure on the Vacuum Properties of Ti-Zr-V Non-evaporable Getter Films

Miniature Vacuum Pumps