AVS2000 Manufacturing Science and Technology Sessions
Topics | Time Periods | Schedule Overview
Click a Session Code to view its Abstracts
Session Code | Start | Session Name |
---|---|---|
MS-MoM | Monday, October 2, 2000 8:20 AM | Metrology for IC Manufacturing |
MS-MoA | Monday, October 2, 2000 2:00 PM | Challenges in Semiconductor Manufacturing for the First Decade of the 21st Century |
MS-WeA | Wednesday, October 4, 2000 2:00 PM | Process Integration (Cu/Low-k/300mm) |
MS-ThM | Thursday, October 5, 2000 8:20 AM | Advanced Modeling and Control for IC Manufacturing |
MS-ThA | Thursday, October 5, 2000 2:00 PM | Advanced Modeling for IC Manufacturing |
MS-FrM | Friday, October 6, 2000 8:20 AM | Langmuir Award/Ultra Clean Society and Contamination Free Manufacturing |